Product Description - thyracont VSM77E Betriebsanleitung

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2.3 Product Description

The VSM vacuum transducer is measuring total gas pressure in the range of
-9
5.0x10 - 1000 mbar. Readings and data are transmitted via EtherCAT interface,
the device must be connected to suitable components only.
In addition the device has a serial RS485 interface for digital data transfer (see
section 5.1).
The VSM is equipped with a metal-sealed combination sensor type Pirani / Cold
Cathode (inverted magnetron) and temperature compensated. It can be mounted
to suitable flange connectors.
Proper Use
The VSM serves exclusively to provide absolute pressure measurements in ga-
seous media. It may only be connected to components specifically provided for
such purpose.
Improper Use
The use for purposes not covered above is regarded as improper, in particular:
connection to components which are not specified for in their operating in-
structions
connection to components containing touchable, voltage carrying parts.
No liability or warranty will be accepted for claims arising from improper use.
The user bears the responsibility with respect to the used process media.
The device is not designed for use in corrosive gas atmosphere.
Aggressive media such as halogenides, carbon or oxygen plasma
can reduce sensor life-time!
Dust, oil or condensing vapours will affect sensor performance and
may cause malfunction!
Permanent operation in the pressure range 5.0x10
5.0x10
sensor.
VSM-EtherCAT-200116
-3
mbar may cause increased wear of the cold cathode
-4
to