40
Gas Correction Factor (C1 / C4)
The measurement signal of the VSM depends on type and composition of the gas
being measured. The unit is adjusted for N
sure display can be corrected below 0.1 mbar by setting correction factors for both
sensor types.
The measurement results of each sensor are then individually multiplied with the
corresponding correction factors by the unit's microcontroller, thereby providing a
corrected pressure reading as digital output.
Value range: 0.20 ... 8.0
Correction factor C1 Pirani:
Ar
CO
1.6
1.0
Correction factor C4 cold cathode:
Ar
CO
2
0.8
0.74
VSM-EtherCAT-200116
CO
H
2
2
0.89
0.57
H
He
2
2.4
5.9
and dry air. For other gases the pres-
2
He
N
2
1.0
1.0
N
Ne
2
1.0
3.5
Ne
Kr
1.4
2.4
Kr
Xe
0.6
0.41