Typical Layout Diagram; With Navigator Controller - Agilent Technologies Turbo-V 81-M Bedienungshandbuch

17 Technical Information

Typical Layout Diagram

Typical Layout Diagram

With Navigator Controller

Figure 28
1
Turbo-V Navigator controller
2
Vent valve
3
Vacuum pump shut-off valve (optional)
4
System vent valve (optional)
5
Vacuum chamber
6
Ionization gauge
7
Fore-vacuum pump connecting flange
8
Oil mist eliminator
9
Fore-vacuum pump with internal one-way valve
10 Fore-vacuum pump control relay
11 Connection for water cooling
12 Roughing line with valve (optional)
13 Turbopump
14 Fan
15 Flexible connection
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Turbo-V 81-M User Manual / 87-900-983-01 (E)