Technical Information; Description Of The Turbopump - Varian Turbo-V 550 Bedienungshandbuch

DESCRIPTION OF THE TURBOPUMP

The Turbo-V550 pump is available in four versions
which differ only in their inlet flange.
They are:
− Model 969-9047 with ISO 100 high vacuum
flange
− Model 969-9048 with ConFlat 6" external di-
ameter high vacuum flange
− Model 969-9049 with ISO 160 high vacuum
flange
− Model 969-9050 with ConFlat 8" external di-
ameter high vacuum flange
Model 969-9047
Model 969-9049
The Turbo-V550 pump consists of a high fre-
quency motor driving a turbine fitted with 8 bladed
stages and 4 Macrotorr stages. The turbine rotates
in an anticlockwise direction when viewed from the
high vacuum flange end.
The turbine is made of high-strength, light alumin-
ium alloy, and is machined from a single block of
aluminium. The turbine blades have six different
angles, from 40° to 16°, while the Macrotorr stages
are in form of discs.
Model 969-9048
Model 969-9050
The turbine rotor is supported by permanently lu-
bricated high precision ceramic ball bearings in-
stalled on the forevacuum side of the pump.
The static blades of the stator are made of
stainless steel. These are supported and accu-
rately positioned by spacer rings.
The Macrotorr stators are in the form of self-
positioning machined discs with pumping channels
and an opening restricted by the corresponding
rotor discs. These are made of aluminium alloy.
During normal operation, the motor is fed with a
voltage of 56 Vac three-phase at 700 Hz. To re-
duce losses during start-up to a minimum, the fre-
quency increases according to a ramp with a
higher initial voltage/frequency ratio.
The external body of the pump is shaped so that
the pump can function with natural convection air
cooling. Kits are available for water cooling or
forced air cooling to cool the pump in the cases
where it is used under heavy load or when natural
convection is insufficient for cooling purposes.
A thermistor sensor is mounted near the upper
bearing to prevent the pump from overheating.
The thermistor sensor, the motor stator windings
and the earth are connected to a Turbo-V control-
ler through a 8 pin socket on the side of the pump.
The pump is balanced after assembly with a resid-
ual vibration amplitude less than 0.01 µm.
The pump can operate in any position and can be
supported on the high vacuum flange or on its
base. The connection of the forevacuum on the
side of the pump is a KF 25 NW flange.
25

TECHNICAL INFORMATION

87-900-874-01(B)