Herunterladen Inhalt Inhalt Diese Seite drucken

Technical Information; Description Of The Turbopump - Varian Turbo-V 1000HT Bedienungshandbuch

Vorschau ausblenden Andere Handbücher für Turbo-V 1000HT:
Inhaltsverzeichnis

Werbung

DESCRIPTION OF THE TURBOPUMP

The Turbo-V1000HT pump is available in two ver-
sions which differ only in their inlet flange.
They are:
− Model 969-9074 with ISO 200 high vacuum
flange
− Model 969-9075 with ConFlat 10" external di-
ameter high vacuum flange
Model 969-9074
Model 969-9065
The Turbo-V1000HT pump consists of a high fre-
quency motor driving a turbine fitted with 8 bladed
stages and 4 Macrotorr stages. The turbine rotates
in an anticlockwise direction when viewed from the
high vacuum flange end.
The turbine is made of high-strength, light alumin-
ium alloy, and is machined from a single block of
aluminium. The turbine stages have six different
angles, from 44° to 16°, while the Macrotorr stages
are in form of discs.
The turbine rotor is supported by permanently lu-
bricated high precision ceramic ball bearings in-
stalled on the forevacuum side of the pump.
The static blades of the stator are made of stain-
less steel with five different blade angles from 44°
to 16°. These are supported and accurately posi-
tioned by spacer rings.
The Macrotorr stators are in the form of self-
positioning machined discs with pumping channels
and an opening restricted by the corresponding ro-
tor discs. These are made of aluminium alloy.
During normal operation, the motor is fed with a
voltage of 56 Vac three-phase at 633 Hz. To re-
duce losses during start-up to a minimum, the fre-
quency increases according to a ramp with a
higher initial voltage/frequency ratio.
The pump must operate with forced air cooling. A
water cooling kit is available to cool the pump in
the cases where it is used under heavy load or
when forced air is insufficient for cooling purposes.
A thermistor sensor is mounted near the upper
bearing to prevent the pump from overheating. The
thermistor sensor, the motor stator windings and
the earth are connected to a Turbo-V controller
through a 8 pin socket on the side of the pump.
The pump is balanced after assembly with a resid-
ual vibration amplitude less than 0.01 µm.
The pump can operate in any position and can be
supported on the high vacuum flange or on its
base. The connection of the forevacuum on the
side of the pump is a KF 40 flange.
25

TECHNICAL INFORMATION

87-900-892-01(D)

Werbung

Inhaltsverzeichnis
loading

Diese Anleitung auch für:

Tv-1000ht969-9074969-9075

Inhaltsverzeichnis