Technical Specification - Varian Turbo-V 550 Bedienungshandbuch

TECHNICAL SPECIFICATION

The following figure shows the Turbo-V550 pump outline drawing. Dimensions are in inches [mm].
Pumping speed With CFF 8" or ISO
160:
N : 550 l/s
2
He: 600 l/s
H : 510 l/s
2
Compression ra-
tio
Base pressure* with recommended mechanical forepump:
< 1 x 10
with recommended diaphragm forepump:
-9
2 x 10 mbar (1.5 x 10
Inlet flange CFF 8" O.D.
ISO 160
CFF 6" O.D.
ISO 100
Foreline flange KF 25 NW
Rotational speed 42000 RPM
Start-up time < 3 minutes
Recommended mechanical: Varian SD 300
forepump diaphragm: Varian MD 60
Operating Any
position
Cooling Natural air convection
requirements Forced air or water optional
With CFF 6" or ISO
100:
N : 350 l/s
2
He: 450 l/s
H : 450 l/s
2
9
N : >1 x 10
2
7
He: 1 x 10
6
H : 2 x 10
2
-10 -10
mbar (< 1 x 10 Torr)
-9
Torr)
Operating ambient
temperature
Coolant water
Bakeout
temperature
Vibration level
(displacement)
Noise level
Input
Lubricant
Storage
temperature
Weight kg (lbs)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test
dome, 48 hours after the completion of test dome
bake-out, with a Turbopump fitted with a ConFlat
flange and using the recommended pre-vacuum
pump.
26
TECHNICAL INFORMATION
+ 5° C to + 35° C
flow: 200 l/h (0.89 GPM)
temperature: + 10° C to + 30° C
pressure: 3 to 5 bar (45 to 75 Psi)
120° C at inlet flange max. (CF
flange)
80° C at inlet flange max. (ISO
flange)
< 0.01 µm at inlet flange
≤ 45 dB (A) at 1 meter
56 Vac, three phase, 700 Hz
permanent lubrication
- 20° C to + 70° C
ISO 100 and 160: 14 (31)
CFF 6" and 8": 18 (39.6)
87-900-874-01(B)