Vibration Isolator Installation; Typical Layout Diagram; Connection A - High Vacuum Flange - Varian Turbo-V 550 Bedienungshandbuch

VIBRATION ISOLATOR INSTALLATION

Four vibration isolators for ISO and CFF inlet
flange version pumps are available as accesso-
ries.
The four model part numbers are the following:
− model 969-9342 for ISO 100 flange;
− model 969-9343 for ISO 160 flange;
− model 969-9332 for CFF 6" flange;
− model 969-9333 for CFF 8" flange.
They typically reduce the vibration transmitted
from the Turbo-V550 pump to the system by a fac-
tor of 20.
Please refer to the relevant instruction manual.

TYPICAL LAYOUT DIAGRAM

1. Turbo-V controller
2. Vent valve
3. Vacuum pump shut-off valve (optional)
4. System vent valve (optional)
5. Vacuum chamber
6. Ionization gauge
7. Fore-vacuum pump connecting flange
8. Oil mist eliminator
9. Fore-vacuum pump with internal one-way
valve
10. Fore-vacuum pump control relay
11. Connection for water cooling
12. Roughing line with valve (optional)
13. Turbopump
14. Fan
15. Flexible connection

Connection A - HIGH VACUUM FLANGE

To connect the Turbo-V550 pump to the ISO inlet
flange, remove the outer ring and position the cen-
tering ring as shown in the figure.
Then fix the two flanges with the clamps or claws
as shown in the figure.
For ConFlat flange connections we recommend
using Varian hardware.
To facilitate assembly and dismantling, apply Fel-
pro C-100 high temperature lubricant to the screw
threads protruding from the flange and between
the nuts and flange.
Note that the connections can be made only with
the bolt in the lower side.
Attach the units and tighten each one in turn. Re-
peat the sequential tightening until the flange faces
meet.
Exercise care when tightening nuts and bolts to
avoid creating dents in the envelope as this may
cause the pump rotor to lock.
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TECHNICAL INFORMATION
CAUTION
87-900-874-01(B)