Use Of Twistorr 304 Fs - Agilent Technologies TwisTorr304 FS X3500-64000 Bedienungshandbuch

Use of TwisTorr 304 FS

All the instructions to correctly use the turbopump are contained in
the controller manual. Read carefully this manual before use the
pump. To obtain better limit pressures it is possible to heat the
pump.
While heating the vacuum chamber, the temperature of the inlet
flange must not exceed 120 °C for a ConFlat flange and 80 °C for a
ISO flange. While heating always use the water cooling.
WARNING! Never use the turbopump when the inlet flange is not connected to the
vacuum chamber. Do not touch the turbopump or any of its accessories
during the heating process. The high temperatures may cause burns.
Avoid impacts, oscillations or harsh movements of the pump when in operation.
CAUTION!
The bearings may become damaged. Use air or inert gas free from dust or
particles for venting the pump. The pressure at the vent port must be less than 2
bar (above atmospheric pressure). For pumping gases containing particulate or
aggressive pollutants for the bearings, these pumps are fitted with a special port
(integrated purge/vent device) to allow a steady flow of inert gas (He, N2, Ar) for
pump bearing protection (see the annex "Technical Information").
Never use the pump with corrosive gases or vapor to avoid damage to the
ATTENZIONE!
internal materials of the pump.
TwisTorr 304 FS User Manual / 87-901-027-01(A)
Instructions for Use

Use of TwisTorr 304 FS

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