Inhaltsverzeichnis
Verwandte Anleitungen für Varian 929-0200
Inhaltszusammenfassung für Varian 929-0200
- Seite 1 MicroVac MANUALE DI ISTRUZIONI Controller BEDIENUNGSHANDBUCH NOTICE DE MODE D’EMPLOI (GB) INSTRUCTION MANUAL Model 929-0200 Model 929-0201 87-900-089-01 (F) APRIL 2006...
- Seite 2 MicroVac Controller...
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Seite 5: Inhaltsverzeichnis
ISTRUZIONI PER L’USO ....................GEBRAUCHSANLEITUNG ................... MODE D’EMPLOI ......................INSTRUCTIONS FOR USE ................... TECHNICAL INFORMATION ..................MICROVAC CONTROLLER DESCRIPTION .................. CONTROLLER SPECIFICATIONS ....................CONTROLLER OUTLINE ....................... INTERCONNECTIONS ........................FUSE HOLDER AND VOLTAGE CHANGER ASSEMBLY ............. Input/Output Interconnections ....................Input Signals ......................... Output Signals ........................ -
Seite 6: Istruzioni Per L'uso
Le note contengono informazioni importanti estrapolate dal testo. IMMAGAZZINAMENTO Imballo dei controller Durante trasporto l'immagazzinamento Ogni controller giunge dalla Varian predisposto per una MicroVac devono essere soddisfatte le seguenti certa tensione di alimentazione: condizioni ambientali: • temperatura: da -20 °C a +70 °C •... - Seite 7 ISTRUZIONI PER L’USO INSTALLAZIONE Comandi, Indicatori e Connettori Del Controller Di seguito sono illustrati sia il pannello frontale che quello posteriore con le interconnessioni. PERICOLO! Per maggiori dettagli fare riferimento alla sezione "Technical Information". Il controller è fornito di un cavo di alimentazione a tre fili con una spina di tipo approvato a livello internazionale.
- Seite 8 ISTRUZIONI PER L’USO 1. Modulo di ingresso dell’alimentazione per il Controller. Comprende il fusibile di protezione, il cambia-tensione, la presa di alimentazione di potenza ed il filtro EMC (non compreso nel blocco presa/cambia-tensione). 2. Connettore di uscita alta tensione per alimentazione pompa (tipo KINGS).
- Seite 9 In caso di guasto è possibile usufruire del servizio di riparazione Varian o del "Varian advance exchange service", che permette di ottenere un controller rigenerato in sostituzione di quello guasto. PERICOLO! Prima di effettuare qualsiasi intervento sul controller scollegare il cavo di alimentazione.
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Seite 10: Gebrauchsanleitung
Geltung kommenden Bestimmungen übernimmt die werden. Es ist vollständig recyclebar und entspricht der Firma Varian keinerlei Haftung. Der MicroVac ist ein EG-Richtlinie 85/399 für Umweltschutz. Hochspannungsnetzgerät niedriger Leistung, das zur Versorgung von Ionenpumpen verwendet wird. Er ist einem... - Seite 11 GEBRAUCHSANLEITUNG INSTALLATION Steuerungen, Anzeigen und Anschlüsse des Controllers Nachstehend werden dass Bedienfeld des Controllers sowie die Anschlußfelder beschrieben. Für weitere GEFAHR! Einzelheiten siehe "Technical Information". Der Controller wird mit einem 3-adrigen Netzkabel geliefert, das mit einem den internationalen Normen entsprechenden Stecker ausgerüstet ist. Es sollte immer dieses Netzkabel benutzt werden, das an eine korrekt geerdete Steckdose anzuschließen ist, um Stromentladungen zu vermeiden.
- Seite 12 GEBRAUCHSANLEITUNG 1. Eingangsmodul Controller-Stromversorgung Sicherung, Spannungswahlschalter, Leistungsstecker und EMC-Filter (nicht Block Stecker/ Spannungswahlschalter eingeschlossen). 2. Hochspannungs-Ausgangsstecker Pumpen versorgung (Typ KINGS). 3. Stecker zur Aktivierung der Ausgangshochspannung (H.V. Cable Interlock). 4. Eingangs-/Ausgangsstecker für Signale für Zubehör. Rücktafel der Controller Installation der als Zubehör gelieferten Skala in Pascal oder Millibar Controller MicroVac...
- Seite 13 Die Controller der MicroVac Serie brauchen keinerlei Wartung. Alle Eingriffe dürfen nur von autorisiertem Personal vorgenommen werden. Bei Defekten kann der Reparatur Service von Varian oder der "Varian Advance Exchange Service" in Anspruch genommen werden, der den defekten Controller durch ein Austauschgerät ersetzt.
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Seite 14: Mode D'emploi
Les notes contiennent des renseignements importants, isolés du texte. EMMAGASINAGE Emballage des Contrôleurs Pendant le transport et l'emmagasinage des Micro Chaque contrôleur est fourni par Varian prééquipé pour Vaccontrôleurs, il faudra veiller à respecter les une certaine tension d'alimentation: conditions environnementales suivantes: •... - Seite 15 MODE D'EMPLOI INSTALLATION Commandes, Indicateurs et Connecteurs du Contrôleur La figure ci-après représente le tableau de commande du Contrôleur et les tableaux d'interconnexion. Pour de DANGER! plus amples détails, se reporter à la section "Technical Information". Le contrôleur est doté d'un câble d'alimentation à trois fils avec une fiche du type approuvé...
- Seite 16 MODE D'EMPLOI 1. Module d’entrée de l’alimentation du Contrôleur. Il est doté du fusible de protection, du dispositif de changement de tension, de la prise d’alimentation en puissance et du filtre EMC (qui n’est pas compris dans le bloc prise/dispositif de changement de tension). 2.
- Seite 17 Toute intervention doit être effectuée par du personnel autorisé. En cas de panne, il est possible de faire appel au service de réparation Varian ou au "Varian advance exchange service", qui permet d’obtenir un contrôler régénéré à la place de celui en panne.
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Seite 18: Instructions For Use
If this shows signs of damage which may have other additional information supplied by Varian before occurred during transport, contact your local sales operating the equipment. Varian will not be held office. When unpacking, ensure that the module is not responsible for any events occurring due to non- dropped or subjected to any form of impact. - Seite 19 INSTRUCTIONS FOR USE INSTALLATION Controller Controls, Indicators and Connectors The following paragraph illustrates either the front and rear panel with its interconnections. More details are WARNING! contained in the appendix "Technical Information". The controller is equipped with a 3-wire power cord and plug (internationally approved) for user's safety.
- Seite 20 INSTRUCTIONS FOR USE 1. Input module for the controller power supply. It includes the protection fuse, the voltage changer, the power supply plug, and the EMC filter (not included into the plug/voltage switch assembly). 2. High voltage output connector for the pump (KINGS type) power supply.
- Seite 21 Any intervention must be performed by authorised personnel only. When a fault has occurred it is possible to use the Varian repair service or the “Varian advance exchange service”, that allows to obtain a regenerated controller replacing the faulty one.
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Seite 22: Technical Information
Inspect the controller for any shipping damage. The MicroVac controller is a quarter rack solid state power supply with self protection features, which • Model 929-0200 is factory set for 120 Vac generates the high voltage for the pump. operation. •... -
Seite 23: Controller Specifications
KINGS type: 0 to 10 Vdc (10 V - Log Rec Out P/N 10664-I for Model correspond to 1 mA; (see attached 929-0200 and 929-0201 10 nA resolution graphs) - Accessory J 101 input/output signal (9- Voltage Recorder pin “D” type socket) - Seite 24 TECHNICAL INFORMATION 1x10 1x10 1x10 1x10 1x10 1x10 CURRENT (A) Voltage/current diagram on front connector 1x10 1x10 1x10 1x10 1x10 1x10 1x10 PRESSURE (TORR) Pressure/voltage diagram on front connector for 2 l/s pump and Minipump 87-900-089-01 (F)
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Seite 25: Controller Outline
TECHNICAL INFORMATION CONTROLLER OUTLINE The outline dimensions for the MicroVac controllers are shown in the following figures. Controller outline INTERCONNECTIONS The following figure shows the Controller interconnections. Controller interconnections 87-900-089-01 (F) -
Seite 26: Fuse Holder And Voltage Changer Assembly
TECHNICAL INFORMATION FUSE HOLDER AND VOLTAGE CHANGER Input/Output Interconnections ASSEMBLY All input/output signals are accessible at J001 accessory connector. If a change in line voltage operation is desired, proceed as follows: With the provided P001 mating connector make the connections with AWG 24 (0.24 mm 2 ) - or smaller wire •... -
Seite 27: Pump Connection
• Plug the controller connector. Interlock Jack position Interlock The interlock is a safety device designed by Varian to prevent serious damages to the operator due to high voltage on the pump power connector. Therefore, two serial electrically connected interlocks are planned;... -
Seite 28: Use
Make all vacuum manifold and electrical connections Replacement controllers are available on advance and refer to the ion pump instruction manual prior to exchange basis through Varian service/sales operating the MicroVac controller. organization. NOTE WARNING! The accessory P001 connector should be left in position •... - Seite 29 TECHNICAL INFORMATION 87-900-089-01 (F)
- Seite 30 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
- Seite 31 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Seite 32 Toll Free # 1 (800) 882 7426 Tel: 00 800 234 234 00 vtt.technical.support@varianinc.com China Mexico Varian Technologies - Beijing Varian, S. de R.L. de C.V. Rm 1648 Central Tower South Wing Concepcion Beistegui No 109 China Beijing Junefield Plaza Col Del Valle No.