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Connection B - FORE-VACUUM PUMP
A flange KF 40 NW is available to connect the Tur-
bopump to the fore-vacuum pump. A hose or vac-
uum approved pipe can be used. If a rigid pipe is
used, any vibration generated by the mechanical
pump must be eliminated through the use of bel-
lows.
NOTE
The Turbo pump is characterized by its high com-
pression ratio also for oil vapors. When using a
mechanical oil-sealed pump, it is advisable to in-
stall a suitable trap between the turbopump and the
fore-vacuum pump in order to prevent oil back-
streaming.
Connection C - ELECTRICAL
The turbopump is connected to the controller
through an 8-pin connector. Pins B, C and D are
the 3-phase supply to the motor, pins A and F are
connected to the temperature sensor (NTC type,
30 KΩ resistance at 20° C) and pin E is connected
to the pump ground; pins G and H are not con-
nected.
If the temperature sensor is disconnected, the
pump will not start. To prevent damage to the
pump when the temperature exceeds 60° C, the
sensor automatically cuts out the power supply.
PUMP USED IN PRESENCE OF MAGNETIC
FIELDS
Magnetic fields induce eddy currents in the rotor of
a turbomolecular pump that tend to oppose to its
rotation.
The result is increased electrical power consump-
tion by the motor, most of which is dissipated in the
rotor.
Since the rotor is not in contact with the stator the
above power can leave the rotor mainly by radia-
tion and hence the rotor may be overheated while
static parts of the pump remain cool.
This effect is strongly dependant from the intensity,
time function and distribution of the magnetic field.
In general, therefore, an increase in pump current
can be expected.
If this increase is lower than 50% of the current
value drawn by the motor in high vacuum opera-
tion, no particular problem should be expected.
However if the effect is grater, than the case
should be carefully reviewed by Varian's specialist.
As a matter of fact, in case of high magnetic fields,
also important forces might be generated and ap-
plied to the rotor.
ACCESSORIES
DESCRIPTION
Inlet screen, ISO 200
Heater band, 120 V
Heater band, 220 V
Water cooling kit
Plastic water cooling kit
Air cooling kit
Vent flange NW 10 KF (M8)
Vent valve with fixed delay time
Vent device with adjustable delay
time
Purge valve KF16-M12 10 SCCM
Purge valve 7/16-M12 10 SCCM
Purge valve KF16-M12 20 SCCM
Purge valve 7/16-M12 20 SCCM
Forepump DS 402, with 1 ph. / 3
ph., universal motor
Forepump MD 60, 120 V
Forepump MD 60, 220 V
Triscroll Dry Vacuum Pump PTS
300 single phase, universal motor
Triscroll Dry Vacuum Pump PTS
300 3 phase, universal motor
Vibration damper ISO 200
Vibration damper CFF 10"
For a complete overview of Varian's extensive
product lines, please refer to the Varian catalog.
35
TECHNICAL INFORMATION
PART NUMBER
969-9316
969-9317
969-9327
969-9337
969-9347
969-9315
969-9108
969-9833
969-9831
969-9239
969-9240
969-9241
969-9242
949-9382
949-9411
949-9412
PTS03001UNIV
PTS03003UNIV
969-9346
969-9336
87-900-892-01(D)
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