sylvac ISP091201D Bedienungsanleitung Seite 23

Accuracy 3μm
4μm
5μm
7μm
8μm
Repeatability 1μm
1μm
1μm
2μm
2μm
Flatness 0.6μm
Parallelism 2μm
2μm
3μm
3μm
3μm
3μm 3μm
4μm 4μm
5μm 5μm
6μm
7μm
1μm 1μm
1μm 1μm
1μm 1μm
2μm
2μm
0.6μm 1μm
2μm 2μm
2μm 2μm
3μm 3μm
3μm
3μm
23
3μm 4μm
1μm 1μm
1μm -
- -
4μm (full)
10μm (partial)
1μm
E
2μm
5μm (full)
10μm (partial)