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Varian Turbo-V 2K-G Bedienungshandbuch Seite 95

Turbomolekularpumpen
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INPUT BUFFER (15 WORDS)
OFFSET
SIZE
UNIT
BYTE
BYTE
0
2
2
2
4
2
6
2
8
2
10
2
12
2
14
2
16
2
18
2
hours
20
1
21
1
22
1
23
1
24
1
25
1
26
1
27
1
Bit Field
RANGE
RES
mA
0-10000
Current
Motor current consumption
W
0-500
Power
Motor power absorption
W
0-400
Power Limit Applied
Maximum allowable power
Hz
0-555
Driving Frequency
Read the rotational speed of the pump
Hz
0-555
Target Frequency
Read the target rotational speed
-
-
Flow Meter Alarm Time
Specific option, not available on standard models
-
-
Flow Meter Alarm Event
Specific option, not available on standard models
-
0-65536
Cycle Number
Number of cycles (start and stop) done by the pump
min
0-65536
Last Cycle Time
How long the last cycle lasted
0-65536
Pump Life
Total pump running time
V
0-100
Voltage
Voltage provided to the motor
°C
0-70
Pump Bearing Temperature
Read the pump upper bearing temperature.
If > 60°C the controller goes in fail and the pump is stopped
°C
0-45
Pump Body Temperature
Read the pump body temperature close to the water circuit.
If > "Pump Body Temperature Limit" (In Buff byte-25) the controller will re-
duce the "Max Allowable Power"
If > 38°C the controller goes in fail "pump over-temperature" and the pump is
stopped
°C
0-100
Controller Power Section Temperature
Read the controller power section temperature if > 75°C the controller
goes in fail "controller over-temperature"
°C
0-100
Controller CPU Section Temperature
Read the controller CPU section temperature if > 80°C the controller goes
in fail "controller over-temperature"
°C
15-38
Pump Body Temperature Limit
Read the body temperature limit calculated from the" Water Cooling Max
Temperature" (parameter buffer byte-0)
-
0-6
B0-B3 – Status
0 = Stop
1= Waiting for interlock (interlock connections on remote I/O connector
missing)
2 = Ramp (the pump is increasing the speed)
3 = Auto tuning (the speed has been reduced because the gas load is
higher than the Power Limit)
4 = Braking (the pump is reducing the speed using the motor)
5 = Normal operation (the pump is at target speed)
6 = Fail (see error code byte Input Buffer Byte-27)
B4-B7 – Reserved
Error Code (bit field)
B7 – Too High Load
(the gas load is too high for the pump)
B6 – Short Circuit
(a short circuit happened between the two of the three motor phases)
B5 – Over-voltage
(not used)
DESCRIPTION
90
TECHNICAL INFORMATION
SERIAL
87-900-968-01(C)
WIN
200
201
155
203
120
213
215
301
300
302
201
204
216
222
211
164
205
206

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Diese Anleitung auch für:

969-8871969-8873

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