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Varian Turbo-V 2K-G Bedienungshandbuch Seite 76

Turbomolekularpumpen
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Maximum flange
no process: 80 °C
temperature
process: 50 °C
Max rotor temperature
120 °C
Vibration level
< 0.01 µm at inlet flange
(displacement)
Lubricant
permanent lubrication
Cooling requirements
Water
Coolant water
Minimum flow: 200 l/h (0.89 GPM)
Temperature: +10 °C to +35 °C
Pressure: 3 to 5 bar (45 to 75 psi)
Noise level
<45 dB(A) at 1 meter
Power supply:
Input voltage:
100 - 240 Vac
Input freq.:
50 - 60 Hz
Max input power:
850 VA
Stand-by power:
30 to 35 W
Max operating
power:
400 W for Nitrogen and lighter
gases
390 W for Argon
Protection fuse
2 x 8 A
• EN 55011 (Radio disturbance
Compliance with:
characteristics)
• EN 61000-3-2 (Limits for har-
monic current emissions)
• EN 61000-3-3 (Limitation of
voltage changes, voltage fluc-
tuations and flicker)
• EN 61000-6-2 and EN 61326
(Immunity for industrial envi-
ronments) which recall:
- EN 61000-4-2 (Electrostatic
discharge phenomena)
- EN 61000-4-3 (Radiated
high-frequency phenomena)
- EN 61000-4-4, EN 61000-4-
5, EN61000-4-6 (Conducted
high-frequency phenomena)
- EN 61000-4-11 (Voltage
fluctuation, voltage dips and
short interruptions)
Installation Category
Pollution Degree
Power cable
Serial communication
kit
Storage temperature
Environment
protection
Weight kg (lbs)
When the Turbo-V 2K-G has been stored at a tem-
perature less than 5°C, wait until the system has
reached the above mentioned temperature before
starting the pump.
71
TECHNICAL INFORMATION
II
2
With European or NEMA plug
3 meters long (optional)
RS232 cable with a 9-pin D type
male connector and a 9-pin D
type female connector, and Navi-
gator software (optional)
-20° C to +70° C
IP54
35 (77.16)
NOTE
87-900-968-01(C)

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Diese Anleitung auch für:

969-8871969-8873

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