Herunterladen Inhalt Inhalt Diese Seite drucken

Varian Turbo-V 2K-G Bedienungshandbuch Seite 93

Turbomolekularpumpen
Inhaltsverzeichnis

Werbung

OFFSET
SIZE
UNIT
BYTE
BYTE
RES
15
1
Bit Filed
16
1
RANGE
B0 - Vent & Purge Auto/Man
0 = Auto (the controller drives purge and vent valves)
1 = Manual (see Par. Buff. byte-15-B2)
B1 - Vent & Purge Remote/Profibus
0 = Serial or Profibus (see Out. Buff. byte-0 B3 and B2)
1 = Remote (the valves are driven by the inputs on remote I/O connector)
B2 - Interlock Type
0 = continuos (the interlock must be present to run the pump)
1 = at start (the interlock must be present only at start command)
B3 - Setpoint Logic
0 = active close (NO)
1 = active open (NC)
B4 - Heather Jacket Mode (Auto/man)
Specific option, not available on standard models
B5 - Gas Load Type
0 = Ar
1 = N
2
B6 - Purge Gas Type
0 = N
2
1 = Ar
B7 - Reserved -
B0.. B1 - Reserved -
B2.. B3 - Start/Stop/Interlock Mode
Change the logic of Start/stop and Interlock inputs.
Ask to Varian personnel for this option
B4.. B5 - Set Point Type
0 = frequency
1 = current
2 = time
3 = status (normal operation)
B6.. B7 - Analog Output Type
Set the analog output on remote I/O connector proportional to:
0 = frequency
1 = power
88
TECHNICAL INFORMATION
DESCRIPTION
WIN
SERIAL
125
146
110
104
-
157
-
114
151
101
111
87-900-968-01(C)

Werbung

Inhaltsverzeichnis
loading

Diese Anleitung auch für:

969-8871969-8873

Inhaltsverzeichnis