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Technical Information
Venting Procedure (without Contaminants and/or Corrosive Gases) –
Manual Venting
Venting Procedure (without Contaminants and/or
Corrosive Gases) – Manual Venting
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To safely slow down the pump use a venting flow able to decelerate the rotor at
CAUTION!
a rate lower than 13-15 Hz/s. Higher deceleration rates could damage the
bearings.
328/336
Close the process gases flowing into the system before sending
the STOP signal to the TwisTorr 84 FS pump.
Close the gate valve connecting the Turbo pump to the chamber
(if present).
Switch off the backing pump or close a fore-vacuum valve (if
present).
Turn off the Turbo pump by sending the STOP signal to the
controller.
Open the Vent Port (positioned on the envelope) slowly until to
reach atmospheric pressure in the system.
For water cooling: shut off the water supply.
TwisTorr 84 FS User Manual / 87-901-043-01(B)
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