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Technical Information
Technical Specification
Inlet flange
Foreline flange
Rotational speed
Start-up time
Recommended forepump
Operating position
Operating ambient temperature
Relative humidity of air
Bakeout temperature
Lubricant
Cooling requirements
Coolant water
Noise Pressure level (pump only)
Pwr supply:
Input Voltage:
Input Frequency:
Max input pwr:
Stand-by pwr:
Max oper. power:
Installation category
Pollution degree
Storage temperature
Max operating altitude
†
average value ± standard deviation.
284/336
CFF 4.5" O.D.
CFF 2.75" O.D.
KF16 NW
81000 rpm (1350 Hz driving frequency)
2 minutes
mechanical: Agilent DS 42
mechanical: Agilent DS 102
dry pump: Agilent SH 110
dry pump: Agilent IDP-3
Any
+5 °C to +35 °C
0 – 90 % (not condensing)
80 °C at inlet flange (ISO63) and 120°C (CFF 4.5") max
Permanent lubrication
Max forced cooling air temperature = 35°C
Max cooling water temperature = 25°C
Minimum flow: 65 l/h (0.30 GPM)
Temperature: +15 °C to +25 °C
Pressure: 2 to 4 bar (30 to 60 psi)
40 ± 4 dB(A) at 1 meter
†
76 Vac, 3 Phase (provided by the controller)
1350 Hz max (provided by the controller)
130 VA
8 W
70 W (according to controller model) with water or air cooling
II
2
-40° C to +70° C
3000 m
TwisTorr 84 FS User Manual / 87-901-043-01(B)
ISO 63
(Min = 32 dB(A), Max = 48 dB(A))
KF 40
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