Status Led; Bake-Out - thyracont VSP63E Betriebsanleitung

4.2

Status LED

The status LED signalizes the following operational states:
Normal Operation / Pirani (green LED continuously on)
Error (red LED continuously on)
4.3

Bake-Out

When a bake-out of the vacuum chamber is performed with the VSP/VCP being
mounted to the chamber, the temperature at the sensor flange must not exceed
150 °C.
The transducer's voltage supply must be switched-off while the
chamber is heated. Otherwise a damage of the electronics can
be the result!
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