Content
1
2
2.1
For Orientation ......................................................................... 25
2.2
Delivery Content ....................................................................... 25
2.3
3
Installation .................................................................................... 27
3.1
3.2
Vacuum Connection ................................................................. 27
3.3
3.3.1
3.3.2
4
Operation ...................................................................................... 30
4.1
General ..................................................................................... 30
4.2
Status LED ............................................................................... 31
4.3
Bake-Out .................................................................................. 31
5
Communication ............................................................................ 32
5.1
5.2
5.3
5.4
5.5
Measurement Query ................................................................ 36
5.6
Readjustment ........................................................................... 36
5.7
Sensor Parameters .................................................................. 37
6
7
Technical Data .............................................................................. 40
Manufacturer:
Thyracont Vacuum Instruments GmbH
Max Emanuel Straße 10
D 94036 Passau
Tel.: ++49/851/95986-0
email: info@thyracont-vacuum.com
Internet: http://www.thyracont-vacuum.com
23
VSPE-de-171117