Inhaltsverzeichnis
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Turbo-V250
969-9007 series
969-9008 series
87-900-851-01(A)
APRIL 2002
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
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Inhaltsverzeichnis
Verwandte Anleitungen für Varian 969-9007 Serie
Inhaltszusammenfassung für Varian 969-9007 Serie
- Seite 1 MANUALE DI ISTRUZIONI Turbo-V250 BEDIENUNGSHANDBUCH pumps NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES BEDRIJFSHANDLEIDING 969-9007 series INSTRUKSTIONSBOG 969-9008 series BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-851-01(A) APRIL 2002...
- Seite 2 Turbo-V 250...
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Seite 5: Inhaltsverzeichnis
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO ....................9 GEBRUIKSAANWIJZINGEN ..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Seite 9: Anwendung
Rotor vollkommen stillsteht. NM8-Gewinde Turbopumpen mit ConFlat-Eingangsflansch m¸ssen mit dem Bei einem Defekt kann der Varian Service oder der " advanced speziellen Varian-Befestigungsmaterial an die Vakuumkammer exchange service" in Anspruch genommen werden. angeschlossen werden. Weitere Hinweise siehe Anhang ìTechnical Informationî. -
Seite 10: Preparation Pour L'installation
Varian, avant d'utiliser l'appareil. Varian dÈcline par consÈquent toute responsabilitÈ en cas d'inobservation totale ou partielle des instructions donnÈes, d'utilisation incorrecte de la part d'un personnel non formÈ, d'opÈrations non autorisÈes ou d'un emploi contraire... - Seite 11 "advanced exchange service", remplir et chambre ‡ vide ‡ líaide des ÈlÈments mÈcaniques Varian faire parvenir au bureau local Varian la fiche "SÈcuritÈ et prÈvus ‡ cet effet. Pour tout autre dÈtail, se reporter ‡ SantÈ" annexÈe ‡ la prÈsente notice d'instructions. Une copie líappendice ìTechnical Informationî.
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Seite 12: Informacion General
Varian antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las instrucciones, al uso poco... - Seite 13 En caso de averÌa se podr· utilizar el servicio de reparaciÛn c·mara de vacÌo mediante los accesorios mec·nicos Varian. Varian o el "Varian advanced exchange service", que permite Para m·s detalles vÈase el anexo ìTechnical Informationî. obtener una bomba regenerada para sustituir la averiada.
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Seite 14: Instruções Para O Uso
Varian antes de usar a aparelhagem. A Varian n„o se responsabiliza pela eventual inobserv‚ncia total ou parcial das instruÁıes, pelo uso indevido por parte de pessoas n„o treinadas, por operaÁıes n„o autorizadas ou pelo uso contr·rio ‡s normas... - Seite 15 Em caso de defeito È possÌvel usufruir do serviÁo de reparaÁ„o ‡ c‚mara de v·cuo atravÈs de parafusos especÌficos da Varian ou do "Varian advanced exchange service", que permite mec‚nica Varian. Para maiores detalhes, ver o apÍndice obter uma bomba regenerada que substitua a bomba com "Technical Information".
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Seite 16: Gebruiksaanwijzingen
Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik... - Seite 17 In geval van storing is het mogelijk om de reparatiedienst van Zie ìTechnical Informationî voor installatie van accessoires die Varian of de "Varian advanced exchange service" in te als optie verkrijgbaar zijn. schakelen: zo krijgt men een ruilpomp ter vervanging van de defecte pomp.
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Seite 18: Almene Oplysninger
Brugeren bedes lÊse denne hÂndbog samt enhver yderligere vejledning, Varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er n¯je fulgt, eller hvis den kun er delvist fulgt, og heller ikke hvis udstyret anvendes forkert af ukvalificeret personale, hvis der foretages uautoriserede indgreb pÂ... -
Seite 19: Vedligeholdelse
ìTechnical Informationî for yderligere detaljer. TurbomolekulÊrpumperne i V 250 serien m kun anvendes ! ! ! ! med en af de sÊrlige Varian kontrolapparater (serie 969-9423, PAS P@ 969-9504, 969-9523, 969-9425 eller 969-9866) og skal Brug kun specialpumperne af Turbo - V 250 typen til pumpning forbindes med en primÊr pumpe (se skemaet i "Technical... -
Seite 20: Bruksanvisning
Anv‰ndaren bˆr l‰sa denna bruksanvisning, samt ˆvrig dokumentation frÂn Varian fˆre anv‰ndning av utrustningen. Varian tar inget ansvar fˆr skador helt eller delvis till fˆljd av Âsidos‰ttande av instruktionerna, ol‰mplig anv‰ndning av person utan tillr‰cklig kunskap, obehˆrigt bruk av utrustningen eller hantering som strider mot g‰llande lokala fˆreskrifter. - Seite 21 22 Nm med g‰nga M10 Om pumpen havererar, kontakta Varian reparationsverkstad Enkel klammer 11 Nm eller Varian utbytesservice, som kan ers‰tta pumpen med en med g‰nga M8 renoverad pump. Turbopumparna med intagsfl‰ns ConFlat ska f‰stas till OBSERVERA vakuumkammaren med hj‰lp av Varian f‰stdelar. Fˆr detaljer Innan pumpen l‰mnas in till tillverkaren fˆr reparation eller...
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Seite 22: Brukerveiledning
Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren b¯r lese denne brukerveiledningen og all annen informasjon fra Varian f¯r utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer p grunn av manglende oppf¯lging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som pÂ... - Seite 23 Se ìTeknisk informasjonî for detaljer. VEDLIKEHOLD Turbo-V 250 serien turbo-molekulÊre pumper m kun brukes med en av de spesielle Varian kontrollere (969-9423, 969- Turbo-V 250 serien pumper er vedlikeholdsfrie. Alt arbeid p 9504, 969-9523, 969-9425 eller 969-9866), og m koples til pumpen mÂ...
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Seite 24: Käyttöohjeet
YLEISIƒ TIETOJA T‰m‰ laite on tarkoitettu ammattimaiseen k‰yttˆˆn. Ennen laitteen k‰yttˆˆnottoa tulee k‰ytt‰j‰n lukea huolellisesti mukana seuraava k‰yttˆohje sek‰ kaikki muu Varianin toimittama lis‰tieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen k‰yttˆohjeiden t‰ydest‰ tai osittaisesta laiminlyˆnnist‰, ammattitaidottoman henkilˆn virheellisest‰ laitteen k‰ytˆst‰,... - Seite 25 Laakerit voivat Informationî-liitteest‰. vahingoittua. Sarjan V 250 turbomolekyylipumppuja tulee k‰ytt‰‰ ainoastaan niihin sopivien varian valvojien kanssa (sarja 969-9423, 969- ! ! ! ! 9504, 969-9523, 969-9425 tai 969-9866) ja niiden t‰ytyy olla HUOMIO yhdistettyin‰ p‰‰pumppuun (katso kaaviota osasta "Technical Information").
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Seite 26: Pdhgies Crhsews
£llh pr“sqeth plhrofor∂a pou d∂nei h Varian, prin ap“ th crhsimopo∂hsh thj suskeuˇj. H Varian den f◊rei kamm∂a euq⁄nh “son afor£ thn olikˇ ˇ merikˇ aq◊thsh twn odhgiËn, thn akat£llhlh crˇsh ek m◊rouj anekpa∂deutou proswpiko⁄, auqa∂retej epemb£seij ˇ crˇsh pou den sumfwne∂... - Seite 27 Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto service thj q£lamo keno⁄ m◊sw diplËn ˇ monËn m◊ggenwn. H ak“louqh Varian ˇ sto ìVarian advanced exchange serviceî, pou saj d∂nei th tamp◊la perigr£fei to apara∂thto no⁄mero m◊ggenwn kai me poio ze⁄goj bidËmatoj na ta sf∂xete.
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Seite 28: General Information
This equipment is destined for use by professionals. The user should read this instruction manual and any other additional information supplied by Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, improper... - Seite 29 In the case of breakdown, contact your local Varian service FLANGE FIXING...
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Seite 30: Technical Information
TECHNICAL INFORMATION During normal operation, the motor functions with DESCRIPTION OF THE TURBOPUMP a power feed at 58 Vac three-phase at 933 Hz. To The Turbo-V250 pump is available in two versions. reduce losses during start-up to a minimum, the The difference between the two versions lies frequency increases according to a ramp with a purely in the high vacuum connection. -
Seite 31: Technical Specification
TECHNICAL INFORMATION TECHNICAL SPECIFICATION UPPER VIEW BOTTOM VIEW Pumping speed (l/s) : 250 l/s Operating ambient + 5Z C to + 35Z C He: 220 l/s temperature : 200 l/s Coolant water flow: 30 l/h (0.13 GPM) Compression ratio : 2 x 10 temperature: + 10Z C to + 30Z C He: 1 x 10 pressure: 3 to 4 bar... - Seite 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed against inlet pressure Graph of compression ratio against foreline pressure Graph of nitrogen throughput against inlet pressure using the recommended mechanical forevacuum pump 87-900-851-01(A)
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Seite 33: Inlet Screen Installation
TECHNICAL INFORMATION INLET SCREEN INSTALLATION The inlet screens mod. 969-9302 prevents the Overall dimensions with the protection screen fit- blades of the pump from being damaged by debris ted on pump series 969-9007 (with ISO 100 greater than 0.7 mm diameter. flange). -
Seite 34: Heater Band Installation
TECHNICAL INFORMATION HEATER BAND INSTALLATION Switch on the heater while the turbopump is in op- eration. If, for any reason, the turbopump body overheats, it will be automatically cut out by the thermistor sensor. NOTE The turbopump must be "baked" only when operating with an inlet pressure less than 10 mbar and with water cooling. -
Seite 35: Water Cooling Kit Installation
TECHNICAL INFORMATION WATER COOLING KIT INSTALLATION Two 6 mm (1/4") internal diameter rubber or plastic hoses from the water supply must be fitted to the two nozzles. NOTE These hoses must be held on the respective noz- zles using hose clips to avoid that the tube do not detach during operation. -
Seite 36: Base Fixing Kit Installation
TECHNICAL INFORMATION BASE FIXING KIT INSTALLATION Fix the feet to the pump by tightening the previ- ously inserted grub screws with the Allen key. The kit mod. 969-9326 enables the pump to be fixed at the base. Open the package containing the feet and respec- tive screws. -
Seite 37: Air Cooling Kit Installation
TECHNICAL INFORMATION AIR COOLING KIT INSTALLATION Insert the respective washers and screws and tighten with a screwdriver. Connect the fan to the controller. SIDE MOUNTING Two fan kits are available for air cooling the pump, when natural air convenction is insufficient. Specification for small fan (mod. -
Seite 38: Vent Valve Installation
TECHNICAL INFORMATION VENT VALVE INSTALLATION Screw the vent valve into the pump. Tighten the valve using a 10 mm hexagonal span- ner. CAUTION The vent valve mod. 969-9833 enables undesired Do not overtighten the valve as this may damage pump areation during a temporary power failure (5 the thread on the pump. -
Seite 39: Vent Device Installation
TECHNICAL INFORMATION Assemble the seal ring and lock the vent device in VENT DEVICE INSTALLATION position using the KF klamp. VIBRATION ISOLATOR INSTALLATION The vent device mod. 969-9831 allows to avoid Vibration isolators for both ISO and CF version undesired pump aeration of the pump during a pumps are available as accessories. -
Seite 40: Typical Layout Diagram
Vacuum chamber Ionization gauge For ConFlat flange connections we recommend Fore-vacuum pump connecting flange using Varian hardware. Oil mist eliminator To facilitate assembly and dismantling, apply Fel- 10. Fore-vacuum pump with internal one-way pro C-100 high temperature lubricant to the screw... -
Seite 41: Connection B - Fore-Vacuum Pump
For a complete overview of Varian's extensive through an 6-pin connector. Pins B, C and D are product lines, please refer to the Varian catalog. the 3-phase supply to the motor, pins A and F are connected to the temperature sensor (NTC type, 30 KΩ... -
Seite 42: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Seite 43 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Seite 44 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...