Inhaltsverzeichnis
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Turbo-V70
969-9357 series
969-9358 series
969-9359 series
969-9360 series
87-900-860-01(E)
MARCH 2003
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
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Inhaltsverzeichnis
Verwandte Anleitungen für Varian Turbo-V70
Inhaltszusammenfassung für Varian Turbo-V70
- Seite 1 MANUALE DI ISTRUZIONI Turbo-V70 BEDIENUNGSHANDBUCH pumps NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES BEDRIJFSHANDLEIDING 969-9357 series INSTRUKSTIONSBOG 969-9358 series BRUKSANVISNING 969-9359 series INSTRUKSJON MANUAL 969-9360 series OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-860-01(E) MARCH 2003...
- Seite 2 Turbo-V 70...
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Seite 5: Inhaltsverzeichnis
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO ....................9 GEBRUIKSAANWIJZINGEN ..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Seite 6: Informazioni Generali
Per garantire il massimo livello di funzionalità ed affidabilità delle Le pompe turbomolecolari della serie Turbo-V 70 devono essere pompe Turbomolecolari Varian, devono essere osservate le se- utilizzate solo con uno degli appositi controllori Varian (serie 969- guenti prescrizioni: 9405, 969-9505, 969-9507e 969-9508) e devono essere collegate •... - Seite 7 MANUTENZIONE d’ingresso, fissare sempre la turbopompa alla base. Le pompe della serie Turbo-V70 non richiedono alcuna manuten- zione. Qualsiasi intervento deve essere eseguito da personale autorizzato. La turbopompa con flangia di ingresso ISO deve essere fissata...
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Seite 8: Allgemeines
Gasen sind und in denen Explosions- und erhöhte Brandge- fahr besteht. Beim Betrieb müssen folgende Umgebungsbedingungen ein- LAGERUNG gehalten werden: Um ein Höchstmaß an Effizienz und Zuverlässigkeit der Varian − Maximaldruck: 2 Bar Turbomolekularpumpen zu gewährleisten, sind die folgenden −... -
Seite 9: Anwendung
Pumpenghehäuse unter 50°C abgesunken ist. FLANSCH SCHELLENART ANZAHL ANZUGSMOMENT ISO 63 Doppelklemme mit 22 Nm Bei einem Defekt kann der Varian Service oder der " advanced NM10-Gewinde exchange service" in Anspruch genommen werden. Einzelklemme 11 Nm NM8-Gewinde ANMERKUNG Turbopumpen mit ConFlat-Eingangsflansch müssen mit dem Vor dem Versand einer defekten Pumpe an die Fa. -
Seite 10: Preparation Pour L'installation
éléments devant être exposés au vide. Mettre nie par Varian, avant d'utiliser l'appareil. Varian décline par consé- toujours des gants ou toute autre protection appropriée. quent toute responsabilité en cas d'inobservation totale ou partielle des instructions données, d'utilisation incorrecte de la part d'un... - Seite 11 "advanced exchange service", remplir et faire parve- filetage M8 nir au bureau local Varian la fiche "Sécurité et Santé" annexée à la présente notice d'instructions. Une copie de cette fiche devra La turbopompe à bride d’entrée ConFiat doit être fixée à la cham- être mise dans l'emballage de la pompe avant l'expédition.
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Seite 12: Informacion General
Varian los componentes destinados a someterse al vacío. Utilizar antes de utilizar el equipo. Varian se considera libre de cualquier siempre los guantes u otra protección apropiada. responsabilidad debida al incumplimiento total o parcial de las... - Seite 13 MANTENIMIENTO Las bombas de la serie Turbo-V70 no necesitan ningún tipo de mantenimiento. Cualquier operación tendrá que ser realizada por personal autorizado. La turbobomba se puede instalar en cualquier posición. Fijar la turbobomba en posición estable uniendo la brida de entrada de la...
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Seite 14: Instalação
Para evitar problemas de perdas de gás, não tocar com as mãos outra informação adicional fornecida pela Varian antes de usar a os componentes destinados à exposição do vácuo. Utilizar aparelhagem. -
Seite 15: Manutenção
à base. MANUTENÇÃO As bombas da série Turbo-V70 não requerem qualquer manutenção. Qualquer operação deve ser efectuada por pessoal A turbobomba pode ser instalada em qualquer posição. Fixar a autorizado. -
Seite 16: Gebruiksaanwijzingen
EEG milieurichtlijn 85/399. gebruiker wordt verzocht aandachtig deze handleiding en alle overige door Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet ATTENTIE! aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht... - Seite 17 Gebruik voor het pompen van agressieve gassen alleen de van de turbompomp worden gestoken. Men raadt gebruik van speciale uitvoeringen van de Turbo-V70 pomp. Deze pompen zijn het beschermgaasje aan (optional). Als een trillingdemper of voorzien van een speciale poort, waardoor een stroom inert gas een metalen flexibel balgje op de inlaatopening wordt moet worden geleverd die varieert tussen 0.4 en 1 mbar lt/s.
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Seite 18: Almene Oplysninger
For at undgå afgasningsproblemer skal man ikke røre med de Varian har leveret, inden udstyret tages i brug. Varian er ikke bare hænder de dele, der vil bliver udsat for vakuum. Brug altid ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hvis den kun er... -
Seite 19: Vedligeholdelse
"Advanced Exchange Service", skal man udfylde formularen Varian. For detaljer henvises til “Teknisk information”. "Sikkerhed og Helbred" vedlagt denne håndbog og tilsende den til For at fastspænde pumpen til fundamentet er det nødvendigt at den lokale forhandler. -
Seite 20: Bruksanvisning
Utrustningen är avsedd för yrkesmässig användning. Användaren VIKTIGT bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar Komponenter som skall utsättas för vakuum får inte hanteras med för skador helt eller delvis till följd av åsidosättande av bara händer p g a kontamineringsrisken. -
Seite 21: Underhåll
är lägre än 50ºC. åtdragningsmoment de ska spännas. Om pumpen havererar, kontakta Varian reparationsverkstad eller Varian utbytesservice, som kan ersätta pumpen med en renoverad FLÄNS TYP AV ANTAL ÅTDRAGNINGS- pump. -
Seite 22: Brukerveiledning
Dette utstyret er beregnet til bruk av profesjonelle brukere. FORSIKTIG Brukeren bør lese denne brukerveiledningen og all annen informasjon fra Varian før utstyret tas i bruk. Varian kan ikke For å unngå avgassingsproblemer, må ingen del som skal holdes ansvarlig for hendelser som skjer på grunn av manglende utsettes for vakuum håndteres med bare hendene. - Seite 23 Varian. For detaljer henvises det til “Teknisk informasjon”. For å feste pumpen til fundamentet er det nødvendig å bruke tre Dersom en pumpe skal kasseres, må...
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Seite 24: Yleisiä Tietoja
KÄYTTÖOHJEET YLEISIÄ TIETOJA Tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen HUOMIO käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava käyttöohje sekä kaikki muu Varianin toimittama lisätieto. Varian ei Jotta kaasun poistumisongelmilta vältyttäisiin, tyhjiöön ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden tarkoitettuihin osiin tule koskea paljain käsin. - Seite 25 Jotta henkilövahingoilta vältyttäisiin, ei missään tapauksessa Aggressiivisten kaasujen pumppauksessa käyttäkää ainoastaan turbopumpun suuaukkoon saa laittaa sormia tai muita Turbo-V70 pumpun erikoisversiota. Näissä pumpuissa on aukko, esineitä. Turvaverkon käyttö on suositeltavaa (lisävaruste). jonka läpi on kuljettava 0.4 ja 1 mbar l/s:n välillä oleva Mikäli suuaukolla käytetään värähtelyjen vaimentajaa tai...
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Seite 26: Pdhgies Crhsews
£llh prÒ sqeth plhrofor∂a pou d∂nei h Varian, prin apÒ th crhsimopo∂hsh thj suskeuÿj. H Varian den f◊rei kamm∂a euqÚ nh Ò son afor£ thn olikÿ ÿ merikÿ aq◊thsh odhgièn, akat£llhlh... - Seite 27 Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto service thj crhsimopoiÒ ntaj kat£llhlo scetikÒ Varian ÿ sto “Varian advanced exchange service”, pou saj d∂nei th staqeropoiÿsete th b£sh.. H tourmpoantl∂a me fl£ntza eisÒ dou ISO pr◊pei na sterewqe∂ sto dunatÒ thta na antikatastÿsete thn calasm◊nh antl∂a me m∂a q£lamo kenoÚ...
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Seite 28: General Information
Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, improper use by untrained persons, non-authorized interference with the equipment or any action contrary to that provided for by specific national standards. - Seite 29 The turbopump with ISO inlet flange must be fixed to the vacuum chamber by means of clamps or claws. The following table shows, In the case of breakdown, contact your local Varian service center for each flange and fixing device, the necessary number of clamps who can supply a reconditioned pump to replace that broken or claws and the relevant fixing torque.
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Seite 30: Technical Information
The turbine is made of high-strength, light alumin- DESCRIPTION OF THE TURBOPUMP ium alloy, and is machined from a single block of The Turbo-V70 pump is available in four versions. aluminium. The turbine blades have five different The difference between the two versions lies angles, from 42°... -
Seite 31: Technical Specification
Rotational speed 75000 RPM Installation category Start-up time < 60 seconds Pollution degree Recommended fore- mechanical: Varian SD-40 pump /h (1.2 CFM) Storage temperature - 20° C to + 70° C Operating position Weight kg (lbs) ISO: 1.6 (6) CFF: 2.3 (4) - Seite 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed against inlet pressure Graph of compression ratio against foreline pressure Graph of nitrogen throughput against inlet pressure using the recommended mechanical forevacuum pump 87-900-860-01(E)
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Seite 33: Inlet Screen Installation
TECHNICAL INFORMATION The screen can be mounted on either pump series INLET SCREEN INSTALLATION and is supplied with a small tab for easy removal (see figure). The inlet screens mod. 969-9300 and 969-9309 prevent the blades of the pump from being dam- aged by debris greater than 0.7 mm diameter. -
Seite 34: Heater Band Installation
TECHNICAL INFORMATION Switch on the heater while the turbopump is in op- HEATER BAND INSTALLATION eration. If, for any reason, the turbopump body overheats, it will be automatically cut out by the thermistor sensor. NOTE The turbopump must be "baked" only when operating with an inlet pressure less than 10 mbar and with water cooling. -
Seite 35: Water Cooling Kit Installation
TECHNICAL INFORMATION WATER COOLING KIT INSTALLATION Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9337 (me- tallic model), and 969-9347 (plastic model). -
Seite 36: Base Fixing Kit Installation
TECHNICAL INFORMATION Insert the three feed as shown in the figure, bear- BASE FIXING KIT INSTALLATION ing in mind that the position must be as indicated in the figure. The kit mod. 969-9326 enables the pump to be fixed at the base. Open the package containing the feet and respec- tive screws. -
Seite 37: Air Cooling Kit Installation
TECHNICAL INFORMATION AIR COOLING KIT INSTALLATION SIDE MOUNTING A fan kit model 969-9310 is available for air cool- ing the pump, when natural air convenction is in- sufficient. Fan specification: The fan can also be mounted under the pump as −... -
Seite 38: Vent Valve Installation
TECHNICAL INFORMATION VENT VALVE INSTALLATION The vent valve mod. 969-9833 enables undesired pump areation during a temporary power failure (5 sec maximum) to be avoided, and enables an automatic vent operation. Unscrew the threaded plug. VENT DEVICE INSTALLATION Screw the adapter (1) into the vent hole (2) of the pump. -
Seite 39: Vibration Isolator Installation
TECHNICAL INFORMATION Screw the flange mod. 969-9109 on the pump, TYPICAL LAYOUT DIAGRAM taking care of the o-ring right position. Assemble the seal ring and lock the vent device in position using the KF klamp. Turbo-V controller Vent valve VIBRATION ISOLATOR INSTALLATION Vacuum pump shut-off valve (optional) A vibration damper model 969-9340 for ISO 63 System vent valve (optional) -
Seite 40: Connection A - High Vacuum Flange
For ConFlat flange connections we recommend Connection A - HIGH VACUUM FLANGE using Varian hardware. To connect the Turbo-V70 pump to the ISO inlet flange, remove the outer ring and position the cen- To facilitate assembly and dismantling, apply Fel- tering ring as shown in the figure. -
Seite 41: Connection B - Fore-Vacuum Pump
Base fixing kit 969-9326 For a complete overview of Varian's extensive product lines, please refer to the Varian catalog. The turbopump is connected to the controller through an 6-pin connector. Pins B, C and D are the 3-phase supply to the motor, pins A and F are connected to the temperature sensor (NTC type, 30 KΩ...