Inhaltsverzeichnis
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Turbo-V70LP
969-9365 series
969-9366 series
969-9367 series
969-9368 series
87-900-862-01(E)
MARCH 2003
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
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Inhaltsverzeichnis
Verwandte Anleitungen für Varian Turbo-V70LP
Inhaltszusammenfassung für Varian Turbo-V70LP
- Seite 1 MANUALE DI ISTRUZIONI Turbo-V70LP BEDIENUNGSHANDBUCH pumps NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES BEDRIJFSHANDLEIDING 969-9365 series INSTRUKSTIONSBOG 969-9366 series BRUKSANVISNING 969-9367 series INSTRUKSJON MANUAL 969-9368 series OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-862-01(E) MARCH 2003...
- Seite 2 Turbo-V 70LP...
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Seite 5: Inhaltsverzeichnis
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO ....................9 GEBRUIKSAANWIJZINGEN ..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Seite 6: Informazioni Generali
Per garantire il massimo livello di funzionalità ed affidabilità delle Le pompe turbomolecolari della serie Turbo-V 70LP devono esse- pompe Turbomolecolari Varian, devono essere osservate le se- re utilizzate solo con uno degli appositi controllori Varian (serie guenti prescrizioni: 969-9405, 969-9505, 969-9507e 969-9508) e devono essere •... - Seite 7 La seguente tabella descrive, per ogni dimensione flangia e tipo di morsetto, il numero di morsetti necessari e con quale coppia di Le pompe della serie Turbo-V70LP non richiedono alcuna manu- serraggio stringerli. tenzione. Qualsiasi intervento deve essere eseguito da personale autorizzato.
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Seite 8: Allgemeines
Beim Betrieb müssen folgende Umgebungsbedingungen ein- gehalten werden: LAGERUNG − Maximaldruck: 2 Bar Um ein Höchstmaß an Effizienz und Zuverlässigkeit der Varian − Temperatur: von +5°C bis +35°C Turbomolekularpumpen zu gewährleisten, sind die folgenden − Relative Luftfeuchtigkeit: 0-95% (nicht kondensierend). -
Seite 9: Anwendung
Pumpenghehäuse unter 50°C abgesunken ist. Turbopumpen mit ConFlat-Eingangsflansch müssen mit dem speziellen Varian-Befestigungsmaterial an die Vakuumkammer Bei einem Defekt kann der Varian Service oder der " advanced angeschlossen werden. Weitere Hinweise siehe Anhang “Techni- exchange service" in Anspruch genommen werden. -
Seite 10: Preparation Pour L'installation
éléments devant être exposés au vide. Mettre nie par Varian, avant d'utiliser l'appareil. Varian décline par consé- toujours des gants ou toute autre protection appropriée. quent toute responsabilité en cas d'inobservation totale ou partielle des instructions données, d'utilisation incorrecte de la part d'un... - Seite 11 La turbopompe à bride d’entrée ConFiat doit être fixée à la cham- NOTE bre à vide à l’aide des éléments mécaniques Varian prévus à cet effet. Pour tout autre détail, se reporter à l’appendice “Technical Avant de renvoyer au constructeur une pompe pour des répara- Information”.
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Seite 12: Informacion General
Varian ¡ATENCION! antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las Para evitar la degasificación, no tocar con las manos sin guantes instrucciones, al uso poco apropiado por parte de personal sin los componentes destinados a someterse al vacío. - Seite 13 La turbobomba con brida de entrada ISO ha de ir fijada a la cámara de vacío mediante mordazas dobles o mordazas Las bombas de la serie Turbo-V70LP no necesitan ningún tipo de individuales. La tabla siguiente describe el número de mordazas mantenimiento.
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Seite 14: Instalação
Para evitar problemas de perdas de gás, não tocar com as mãos outra informação adicional fornecida pela Varian antes de usar a os componentes destinados à exposição do vácuo. Utilizar aparelhagem. -
Seite 15: Manutenção
à base. MANUTENÇÃO As bombas da série Turbo-V70LP não requerem qualquer A turbobomba pode ser instalada em qualquer posição. Fixar a manutenção. Qualquer operação deve ser efectuada por pessoal turbobomba em posição estável ligando a flange de entrada da... -
Seite 16: Gebruiksaanwijzingen
EEG milieurichtlijn 85/399. gebruiker wordt verzocht aandachtig deze handleiding en alle overige door Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet ATTENTIE! aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht... - Seite 17 22 Nm In geval van storing is het mogelijk om de reparatiedienst van M10 schroefdraad Varian of de "Varian advanced exchange service" in te schakelen: Enkelvoudige klem 11 Nm zo krijgt men een ruilpomp ter vervanging van de defecte pomp.
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Seite 18: Almene Oplysninger
For at undgå afgasningsproblemer skal man ikke røre med de Varian har leveret, inden udstyret tages i brug. Varian er ikke ans- bare hænder de dele, der vil bliver udsat for vakuum. Brug altid varlig, hvis vejledningen ikke er nøje fulgt, eller hvis den kun er... -
Seite 19: Vedligeholdelse
Turbomolekulærpumperne i V 70LP serien må kun anvendes med mellem 0.4 og 1 mbar l/s. en af de særlige Varian kontrolapparater (serie 969-9405, 969- 9505, 969-9507 eller 969-9508) og skal forbindes med en primær pumpe (se skemaet i "Technical Information"). -
Seite 20: Bruksanvisning
övrig dokumentation från Komponenter som skall utsättas för vakuum får inte hanteras med Varian före användning av utrustningen. Varian tar inget ansvar bara händer p g a kontamineringsrisken. Använd alltid handskar för skador helt eller delvis till följd av åsidosättande av eller liknande skydd. -
Seite 21: Underhåll
är försedd med ett specialuttag dit ett ädelgasflöde mellan 0.4 och 1 mbar l/s skall anslutas. Turbomolekylärpumparna i serien V 70LP måste användas med en särskild styrenhet från Varian (serie 969-9405, 969-9505, 969- UNDERHÅLL 9507- eller 969-9508), och anslutas till en förpump (se schema i "... -
Seite 22: Brukerveiledning
Brukeren bør lese denne brukerveiledningen og all annen For å unngå avgassingsproblemer, må ingen del som skal informasjon fra Varian før utstyret tas i bruk. Varian kan ikke utsettes for vakuum håndteres med bare hendene. Bruk alltid holdes ansvarlig for hendelser som skjer på grunn av manglende hansker eller andre og passende verneutstyr. - Seite 23 0.4 og 1 mbar l/s. Turbo-V 70LP serien turbo-molekulære pumper må kun brukes VEDLIKEHOLD med en av de spesielle Varian kontrollere (969-9405, 969-9505, Turbo-V 70LP serien pumper er vedlikeholdsfrie. Alt arbeid på 969-9507 eller 969-9508), og må koples til hovedpumpen (se pumpen må...
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Seite 24: Yleisiä Tietoja
Jotta kaasun poistumisongelmilta vältyttäisiin, tyhjiöön käyttöohje sekä kaikki muu Varianin toimittama lisätieto. Varian ei tarkoitettuihin osiin tule koskea paljain käsin. Hanskojen tai muun ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden sopivan suojan käyttö on tarpeellinen. täydestä tai osittaisesta laiminlyönnistä, ammattitaidottoman henkilön... - Seite 25 50º. kierteitys M10 Laitteen vahingoittuessa mahdollista käyttää Varianin Yksinkertainen 11 Nm korjauspalvelua tai "Varian advanced exchange service", joka kiinnike, kierteitys mahdollistaa regeneroidun pumpun saamisen vahingoittuneen tilalle. Torbopumppu ConFlat siaääntilolaipalla tulee kiinnittää tyhjiökammariin sopivien Varian mekaanisien varusteiden avulla.
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Seite 26: Pdhgies Crhsews
£llh prÒ sqeth plhrofor∂a pou d∂nei h Varian, prin apÒ th crhsimopo∂hsh thj suskeuÿj. H Varian den f◊rei kamm∂a euqÚ nh Ò son afor£ thn olikÿ ÿ merikÿ aq◊thsh odhgièn, akat£llhlh... - Seite 27 FLANTZA TUPOS MEGGENHS ZEUGOS Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto service thj BIDWMATOS Varian ÿ sto “Varian advanced exchange service”, pou saj d∂nei th ISO 63 22 Nm Diplÿ m◊ggenh el∂kwsh M10 dunatÒ thta na antikatastÿsete thn calasm◊nh antl∂a me m∂a 11 Nm Monÿ...
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Seite 28: General Information
Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, improper use by untrained persons, non-authorized interference with the equipment or any action contrary to that provided for by specific national standards. - Seite 29 50 °C. DEVICE ISO 63 M10 clamps 22 Nm In the case of breakdown, contact your local Varian service center M8 claws 11 Nm who can supply a reconditioned pump to replace that broken down.
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Seite 30: Technical Information
The turbine is made of high-strength, light alumin- ium alloy, and is machined from a single block of The Turbo-V70LP pump is available in four ver- aluminium. The turbine blades have five different sions. The difference between the two versions angles, from 44°... -
Seite 31: Technical Specification
Storage - 20° C to + 70° C temperature Recommended fore- mechanical: Varian SD-40 pump diaphragm: Varian MD 6 Weight kg (lbs) ISO: 1.7 (4) CFF: 2.5 (4) Operating position * According to standard DIN 28 428, the base pres-... - Seite 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed against inlet pressure Graph of compression ratio against foreline pressure Graph of nitrogen throughput against inlet pressure using the recommended mechanical forevacuum pump 87-900-862-01(E)
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Seite 33: Inlet Screen Installation
TECHNICAL INFORMATION The screen can be mounted on either pump series INLET SCREEN INSTALLATION and is supplied with a small tab for easy removal (see figure). The inlet screens mod. 969-9300 and 969-9309 prevent the blades of the pump from being dam- aged by debris greater than 0.7 mm diameter. -
Seite 34: Heater Band Installation
TECHNICAL INFORMATION Switch on the heater while the turbopump is in op- HEATER BAND INSTALLATION eration. If, for any reason, the turbopump body overheats, it will be automatically cut out by the thermistor sensor. NOTE The turbopump must be "baked" only when operating with an inlet pressure less than 10 mbar and with water cooling. -
Seite 35: Water Cooling Kit Installation
TECHNICAL INFORMATION WATER COOLING KIT INSTALLATION Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9337 (me- tallic model), and 969-9347 (plastic model). -
Seite 36: Base Fixing Kit Installation
TECHNICAL INFORMATION Insert the three feed as shown in the figure, bear- BASE FIXING KIT INSTALLATION ing in mind that the position must be as indicated in the figure. The kit mod. 969-9326 enables the pump to be fixed at the base. Open the package containing the feet and respec- tive screws. -
Seite 37: Air Cooling Kit Installation
TECHNICAL INFORMATION AIR COOLING KIT INSTALLATION SIDE MOUNTING A fan kit model 969-9310 is available for air cool- ing the pump, when natural air convenction is in- sufficient. Fan specification: The fan can also be mounted under the pump as −... -
Seite 38: Vent Valve Installation
TECHNICAL INFORMATION VENT VALVE INSTALLATION The vent valve mod. 969-9833 enables undesired pump areation during a temporary power failure (5 sec maximum) to be avoided, and enables an automatic vent operation. Unscrew the threaded plug. VENT DEVICE INSTALLATION Screw the adapter (1) into the vent hole (2) of the pump. -
Seite 39: Vibration Isolator Installation
12. Roughing line with valve (optional) 13. Turbopump Connection A - HIGH VACUUM FLANGE To connect the Turbo-V70LP pump to the ISO inlet flange, remove the outer ring and position the centering ring as shown in the figure. Then fix the two flanges with the clamps or claws as shown in the figure. -
Seite 40: Connection Configurations
For ConFlat flange connections we recommend using Varian hardware. To facilitate assembly and dismantling, apply Fel- pro C-100 high temperature lubricant to the screw threads protruding from the flange and between... -
Seite 41: Connection B - Fore-Vacuum Pump
Base fixing kit 969-9326 For a complete overview of Varian's extensive product lines, please refer to the Varian catalog. The turbopump is connected to the controller through an 6-pin connector. Pins B, C and D are the 3-phase supply to the motor, pins A and F are connected to the temperature sensor (NTC type, 30 KΩ... -
Seite 42: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Seite 43 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Seite 44 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...