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Verfügbare Sprachen
N.
Read/
Data
Write
Type
110
R/W
L
Interlock type
(default = 1)
111
R/W
L
Analog
output type:
output
voltage
signal
proportional
to frequency
or power
117
R/W
N
Low Speed
frequency
(Hz)
120
R/W
N
Rotational
frequency
setting (Hz)
122
R/W
L
Set vent
valve on/off
(on = closed)
123
Reserved to Varian service
124
125
R/W
L
Set the vent
valve
operation
126
R/W
N
Vent valve
opening
delay
(expressed in
0.2 sec)
130
Reserved to Varian service
147
R/W
N
Vent open
time
See "vent
connector"
paragraph
155
R
N
Power limit
applied
Read the
maximun
allowable
power
157
R/W
N
Gas load
type
Select the
gas load to
the pump
Pressure
161
R/W
N
Reading
Connection
Factor
See "GAUGE
CONNECTOR
" for more
details
162
R/W
A
R1 Set Point
Pressure
Description
Admitted
Values
Impulse = 0
Continuous = 1
0 = frequency
1 = power
(default = 1)
2 = Pump
temperature
3 = Pressure
1100 to
"Maximum
rotational
frequency"
(win 121)
(default = 1100)
1100 to
"Maximum
rotational
frequency"
(win 121)
(default = 1350)
On = 1
Off = 0
(default = 1)
Automatic = 0
(see note 1.)
On command = 1
(see note 2.)
0 to 65535
(corresponding to
0 to 13107 sec)
0 = infinite
1 bit = 0.2 sec
watt
Ø = N
2
1 = Av
0 to 10
0 = 0
10 = 1 = N
2
N.
Read/
Data
Write
Type
163
R/W
167
R/W
171
R/W
172
R/W
173
R/W
174
R/W
175
R/W
176
R
200
R
201
R
202
R
203
R
84
TECHNICAL INFORMATION
Description
Valve
Valid if min.
101 = 4
Format X.X
E. XX
Where X = 0
to 9
s = + or -
N
Pressure unit
0 = mBar
of measure
1 = Pa
2 = Torr
A
Stop speed
0 = disable
reading
1 = enable
Activates /
deactivates
the pump
speed
reading after
Stop
command
N
R2 Set Point
0 = Freq
Type
1 = Power
2 = Time
3 = Normal
4 = Pressure
N
R2 Set Point
Value
(Hz, W, s)
N
R2 Set Point
Mask (sec)
L
R2 Set Point
Ø = high level
Segnal
active
Activation
1 = low level
Type
active
N
R2 Set front
Mysteresis
(in % of R2
Valve)
A
R2 Set Point
Pressure
Valve
Valid in win
171 = 4
Format X.X E
X.X
Where: X= 0
to 9
s = + or -
N
Pump
current in
mA dc
N
Pump
voltage in
Vdc
N
Pump power
in W (pump
current x
pump
voltage duty
cycle)
N
Driving
frequency
in Hz
87-900-986-01 (C)
Admitted
Values
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