Content
1
2
2.1
For Orientation ......................................................................... 31
2.2
Delivery Content ....................................................................... 31
2.3
3
Installation .................................................................................... 33
3.1
3.2
Vacuum Connection ................................................................. 33
3.3
3.3.1
3.3.2
4
Operation ...................................................................................... 36
4.1
General ..................................................................................... 36
4.2
4.3
Bake-Out .................................................................................. 38
4.4
Readjustment ........................................................................... 38
5
Communication ............................................................................ 41
5.1
5.2
5.3
5.4
Measurement Query ................................................................ 44
5.5
Display Functions ..................................................................... 44
5.6
Switchpoints ............................................................................. 45
5.7
Readjustment ........................................................................... 47
5.8
Sensor Parameters .................................................................. 48
5.9
6
7
Technical Data .............................................................................. 52
Manufacturer:
Thyracont Vacuum Instruments GmbH
Max Emanuel Straße 10
D 94036 Passau
Tel.: ++49/851/95986-0
email: info@thyracont-vacuum.com
Internet: http://www.thyracont-vacuum.com
Software ............................................................ 49
29
VSP-de-171005