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Technical Information
The optional Integrated vacuum gauge measures pressure downstream of the
NOTE
optional Integrated Isolation Valve (VPI). In the event that the Integrated Isolation
Valve is closed, the pressure reading will correspond to the pressure inside the
pump, not the pressure in the vacuum chamber upstream of the Integrated
Isolation Valve.
Table 6
Accuracy
Ambient Operating Temperature
Ambient Storage Temperature
Analog Output
Electrical Connection
Maximum Baking Temperature
Measurement Range
Agilent IDP-35 & IDP-45 Dry Scroll Pump User Manual
Figure 26 Integrated Vacuum Gauge
Integrated PCG750KF16 Vacuum Gauge Specifications
±2.5% (950 to 1050 mbar), ±5% (100 to 950 mbar),
±15% (1*10
-3
to 100 mbar), ±50% (5*10
+10 to +50 °C
-20 to +65 °C
0-10.23 VDC
FCC 68/RJ45 appliance connector, 8 poles, male
80 °C
5*10
-5
to 1500 mbar
-5
to 1*10
-3
mbar)
201
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