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Risks during installation
DANGER
Danger to life from electric shock
Touching exposed and voltage-bearing elements causes an electric shock. Improper connection of
the mains supply leads to the risk of touchable live housing parts. There is a risk to life.
► Before the installation, check that the connection leads are voltage-free.
► Make sure that electrical installations are only carried out by qualified electricians.
► Provide adequate grounding for the device.
► After connection work, carry out an earthed conductor check.
WARNING
Risk of fatal injury due to electric shock on account of incorrect installation
The device's power supply uses life-threatening voltages. Unsafe or improper installation can lead to
life-threatening situations from electric shocks obtained from working with or on the unit.
► Ensure safe integration into an emergency off safety circuit.
► Do not carry out your own conversions or modifications on the unit.
WARNING
Risk of danger to life through missing mains disconnection device
The vacuum pump and electronic drive unit are not equipped with a mains disconnection device
(mains switch).
► Install a mains disconnection device according to SEMI-S2.
► Install a circuit breaker with an interruption rating of at least 10,000 A.
WARNING
Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum flange
With the high vacuum flange open, access to sharp-edged parts is possible. A manual rotation of the
rotor increases the danger situation. There is the risk of cuts, up to the separation of body parts (e.g.
fingertips). There is a risk of hair and loose clothing being drawn in. Objects falling in destroy the tur-
bopump during subsequent operation.
► Only remove the original protective covers immediately prior to connecting the high vacuum
flange.
► Do not reach into the high vacuum connection.
► Wear protective gloves during installation.
► Do not start the turbopump with open vacuum connections.
► Always carry out the mechanical installation before electrical connection.
► Prevent access to the high vacuum connection of the turbopump from the operator side (e.g.
open vacuum chamber).
WARNING
Danger of cut injuries from unexpected start up.
The use of mating plugs of the electronic drive unit (accessories) enables the automatic run-up of the
vacuum pump as soon the power is turned on. Attaching mating plugs before or during the installa-
tion leads to the movement of parts hence the risk of cut injuries by sharp-edged in the exposed high
vacuum flange.
► Only connect mating plugs after the mechanical installation.
► Only switch on the vacuum pump immediately prior to operation.
Safety
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