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Turbo-V 300SF
969-9068 series
969-9069 series
87-900-882-01(B)
APRIL 2002
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
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Inhaltsverzeichnis
Verwandte Anleitungen für Varian 969-9068 Serie
Inhaltszusammenfassung für Varian 969-9068 Serie
- Seite 1 MANUALE DI ISTRUZIONI Turbo-V 300SF BEDIENUNGSHANDBUCH pumps NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES BEDRIJFSHANDLEIDING 969-9068 series INSTRUKSTIONSBOG 969-9069 series BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-882-01(B) APRIL 2002...
- Seite 2 Turbo-V 300SF...
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Seite 5: Inhaltsverzeichnis
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO....................9 GEBRUIKSAANWIJZINGEN..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING ......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Seite 6: Informazioni Generali
"Technical Information" per ulteriori dettagli. chiatura. Le pompe turbomolecolari della serie Turbo-V300SF devono essere utilizzate solo con uno degli appositi controllori Varian NOTA (serie 969-9424, 969-9524, 969-9870) e devono essere Le note contengono informazioni importanti estrapolate dal collegate ad una pompa primaria (vedere schema in "Technical... - Seite 7 In caso di guasto è possibile usufruire del servizio di snervamento di 500 N/mm e devono essere fissate con una riparazione Varian o del "Varian advanced exchange service", coppia di 3,1 Nm. che permette di ottenere una pompa rigenerata in sostituzione Per l'installazione degli accessori opzionali, vedere "Technical...
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Seite 8: Allgemeines
Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen Mißachtung einheimischen, hier zur Geltung kommenden Bestimmungen übernimmt die Firma Varian keinerlei Haftung. Bei den Pumpen der Serie Turbo-V300SF handelt es sich um Turbomolekularpumpen für Hoch- Ultrahochvakuumanwendungen. Sie eignen sich für jede Art von Gas oder gashaltige Gemische, nicht jedoch zur Förderung... -
Seite 9: Anwendung
Pumpenghehäuse unter 50°C abgesunken ist. angeschlossen werden. Weitere Hinweise siehe Anhang “Technical Information”. Bei einem Defekt kann der Varian Service oder der " advanced Wenn die Pumpen über ihr Unterteil installiert werden sollen, exchange service" in Anspruch genommen werden. -
Seite 10: Indications Generales
Les pompes turbomoléculaires de la série Turbo-V300SF ne doivent être utilisées qu’avec l’un des contrôleurs spéciaux NOTE Varian (série 969-9424, 969-9524, 969-9870) et doivent être Les notes contiennent des renseignements importants, isolés connectées à une pompe primaire (Cf. schéma dans du texte. - Seite 11 Avant de renvoyer au constructeur une pompe pour des UTILISATION réparations ou un "advanced exchange service", remplir et faire parvenir au bureau local Varian la fiche "Sécurité et Toutes les instructions pour le fonctionnement correct de la Santé" annexée à la présente notice d'instructions. Une copie turbopompe sont contenues dans la notice de l'unité...
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Seite 12: Instrucciones De Uso
Varian antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las instrucciones, al uso poco... - Seite 13 Para instalar los accesorios opcionales, véase “Technical En caso de avería se podrá utilizar el servicio de reparación Information”. Varian o el "Varian advanced exchange service", que permite obtener una bomba regenerada para sustituir la averiada. UTILIZACION Todas las instrucciones para el funcionamiento correcto de la...
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Seite 14: Instruções Para O Uso
Varian antes de usar a aparelhagem. A Varian não se responsabiliza pela eventual inobservância total ou parcial das instruções, pelo uso indevido por parte de pessoas não treinadas, por operações não autorizadas ou pelo uso contrário às normas... - Seite 15 Para a instalação dos acessórios opcionais, ver "Technical Information". Em caso de defeito é possível usufruir do serviço de reparação Varian ou do "Varian advanced exchange service", que permite UTILIZAÇÃO obter uma bomba regenerada que substitua a bomba com defeito.
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Seite 16: Gebruiksaanwijzingen
Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik... - Seite 17 M6 bouten nodig die in de gaten in de basis van de pomp In geval van storing is het mogelijk om de reparatiedienst van worden ingebracht. Deze bouten moeten een vloeisterkte van Varian of de "Varian advanced exchange service" in te 500 N/mm bezitten en met een koppel van 3,1 Nm worden schakelen: zo krijgt men een ruilpomp ter vervanging van de aangehaald.
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Seite 18: Brugsanvisning
Brugeren bedes læse denne håndbog samt enhver yderligere vejledning, Varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hvis den kun er delvist fulgt, og heller ikke hvis udstyret anvendes forkert af ukvalificeret personale, hvis der foretages uautoriserede indgreb på... - Seite 19 50°C. fra Varian. For detaljer henvises til “Teknisk information”. Hvis pumpen går i stykker, kan man benytte sig af Varians For at fastspænde pumpen til fundamentet er det nødvendigt at reparationsservice eller af Varians "Advanced Exchange...
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Seite 20: Bruksanvisning
Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen eller hantering som strider mot gällande lokala föreskrifter. - Seite 21 För att fästa pumpen till fundamentet är det nödvändigt att Om pumpen havererar, kontakta Varian reparationsverkstad använda 3 M6 skruvar, som installeras i hålen på pumpens eller Varian utbytesservice, som kan ersätta pumpen med en fundament. De använda skruvarna måste tåla en belastning på renoverad pump.
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Seite 22: Brukerveiledning
Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra Varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglende oppfølging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som på... - Seite 23 50°C. Varian. For detaljer henvises det til “Teknisk informasjon”. For å feste pumpen til fundamentet er det nødvendig å bruke Dersom pumpen stanser, må du ta kontakt med Varians tre M6-skruer, som skrues fast i hullene på...
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Seite 24: Käyttöohjeet
YLEISIÄ TIETOJA Tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava käyttöohje sekä kaikki muu Varianin toimittama lisätieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden täydestä tai osittaisesta laiminlyönnistä, ammattitaidottoman henkilön virheellisestä laitteen käytöstä,... - Seite 25 Laitteen vahingoittuessa on mahdollista käyttää Varianin Torbopumppu ConFlat siaääntilolaipalla tulee kiinnittää korjauspalvelua tai "Varian advanced exchange service", joka tyhjiökammariin sopivien Varian mekaanisien varusteiden mahdollistaa regeneroidun pumpun saamisen vahingoittuneen avulla. Lisätietoja löytyy ©Technical Information©-liittestä. tilalle. Pumppu tulee kiinnittää jalustan avulla käyttäen kolmea M6 ruuvia jotka on kiinnitetty sopiviin pumpun jalustassa oleviin rakoihin.
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Seite 26: Pdhgies Crhsews
£llh prÒsqeth plhrofor∂a pou d∂nei h Varian, prin apÒ th crhsimopo∂hsh thj suskeuÿj. H Varian den f◊rei kamm∂a euqÚnh Òson afor£ thn olikÿ ÿ merikÿ aq◊thsh twn odhgièn, thn akat£llhlh crÿsh ek m◊rouj anekpa∂deutou proswpikoÚ, auqa∂retej epemb£seij ÿ crÿsh pou den sumfwne∂... - Seite 27 M6 sterewvnete stiÇ eidikevÇ opevÇ pou upavrcoun sth bavsh thÇ antlivaÇ. Oi Varian ÿ sto “Varian advanced exchange service”, pou saj d∂nei th crhsimopoiouvmeneÇ bivdeÇ prevpei na evcoun antochv 500 dunatÒthta na antikatastÿsete thn calasm◊nh antl∂a me m∂a N/mm , kai prevpei na sterewqouvn me evna zeugavri 3,1 Nm.
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Seite 28: General Information
This equipment is destined for use by professionals. The user should read this instruction manual and any other additional information supplied by Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, improper... - Seite 29 To fix the pump by means of its base, it is necessary to use In the case of breakdown, contact your local Varian service three M6 screws fixed to the foreseen holes of the pump base. center who can supply a reconditioned pump to replace that The used screws must have a minimum strength point of 500 broken down.
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Seite 30: Technical Information
TECHNICAL INFORMATION The turbine is made of high-strength, light alumin- DESCRIPTION OF THE TURBOPUMP ium alloy, and is machined from a single block of The Turbo-V300SF pump is available in two ver- aluminium. The turbine blades have two different sions which differ only in their inlet flange. angles, 16°... -
Seite 31: Technical Specification
Start-up time < 3 minutes Weight kg (lbs) 10 (22) Recommended mechanical: Varian SD 300 forepump diaphragm: Varian MD 60 * According to standard DIN 28 428, the base Operating pressure is that measured in a leak-free test dome,... - Seite 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure 87-900-882-01(B)
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Seite 33: Inlet Screen Installation
TECHNICAL INFORMATION The screen can be mounted on each pump model INLET SCREEN INSTALLATION and is supplied with a small tab for easy removal (see figure). The inlet screen mod. 969-9302 prevents the blades of the pump from being damaged by debris greater than 0.7 mm diameter. -
Seite 34: Water Cooling Kit Installation
TECHNICAL INFORMATION WATER COOLING KIT INSTALLATION The metallic model is assembled as shown in the figure. Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9337 (metal- lic model), and 969-9347 (plastic model). -
Seite 35: Air Cooling Kit Installation
TECHNICAL INFORMATION AIR COOLING KIT INSTALLATION A fan kit model 969-9314 is available for air cooling the pump. Fan specification: − air flow: 25 l/s (51 CFM) − input voltage: 120 Vac 50-60 Hz − maximum power: 17 W − dimensions: 119 x 119 mm (4.69 x 4.79 inches) Position the fan on the pump, ensuring that the holes in the plate line up with those in the pump base. -
Seite 36: Gas Purge Valve Installation
TECHNICAL INFORMATION GAS PURGE VALVE INSTALLATION Unscrew the threaded plug. A gas purge valve is available to protect the pump bearings against particulate and corrosive gases that could move into the pump. To install the gas purge valve it is necessary to un- screw the purge port cover as shown in the follow- ing figure, Screw the vent valve into the pump. -
Seite 37: Vent Device Installation
Assemble the seal ring and lock the vent device in position using the KF klamp. For ConFlat flange connections we recommend using Varian hardware. To facilitate assembly and dismantling, apply Fel- pro C-100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange. -
Seite 38: High Vacuum Flange Connection Configurations
TECHNICAL INFORMATION ! ! ! ! CAUTION Exercise care when tightening nuts and bolts to avoid creating dents in the envelope as this may cause the pump rotor to lock. High Vacuum Flange Connection Configurations Fore-vacuum Pump Connection Electrical Connection A flange KF 25 NW is available to connect the Turbo-V300SF to the fore-vacuum pump. -
Seite 39: Pump Used With Corrosive Gases
! ! ! ! 6. Turbopump CAUTION 7. Vent valve To prevent bearing damage, Varian suggests a minimum purge gas flow rate of 10 sccm (0.17 Purge layout mbar l/s). This value can be exceeded, according to the process requirements. Please contact Var- ian for specific applications. -
Seite 40: Accessories
Vent device with adjustable delay 969-9831 time Forepump DS 302, with 1 ph., 949-9325 universal motor Forepump MD 60, 120 V 949-9411 Forepump MD 60, 220 V 949-9412 For a complete overview of Varian's extensive product lines, please refer to the Varian catalog. 87-900-882-01(B) -
Seite 41: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Seite 42 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Seite 43 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...