Inhaltsverzeichnis
Werbung
6.2
Parameter
Overview
VRZ 7301770
Keys
19+0
Ftmction
Subdivision
Factor
Parameter
q
POI. 1
154 PO1.2
@l PO1.3
Entry
Vafua
q
100 up to 0,l
(depending
on Parameter P04)
q
0 a normal
1 A invers
q
4 ,um, IO Pm, 20 Pm, 40 Pm,
100 Pm, 200 ,um
H 0 " no axis
1 " X axis normal
2 " X axis invers
3 " Zo axis normal
4 " Zo axis invers
5 k Z axis normal
6 A Z axis invers
Enter any compensation
value in pm/m
q
0 A Single
distance-coded
with
500
1000
i
. Grating Periods
2000
q
0 4 mm displa y
1 " inch display
2 A mmlinch
instant calculator
via key
q
Enter compensation
value
in ,umfm
Enter selected range in mm
m 7 ; ;zs
Transfer to memory
q
q +B
Counting
Direction
q
PO2.1
q
PO2.2
@ P02.3
m PO4.1
@ P04.2
fg PO4.3
PO50
"'i
Grating
Period
";o
Zero Crossover
Signal
Linear
Error Compensation
fg PO7 1
@ P07.2
q
PO7.3
q +:
q +i .
Reference
Mark
Evaluation
q
PO9.1
q
PO9.2
pJ PO9.3
q +m
q
mm/inch
selection
P10.0
"+:
Shrinkage
Compensation
q
P13.1
u
p'"'
z Pl33
q +:
P 14.0
Zero recognition
range
for Zero Cross-over
"+! l
Set to Zero
vsing key m
P20.0
13
Werbung
Inhaltsverzeichnis
