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Agilent Technologies 4UHV Gebrauchsanleitung
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Agilent Technologies 4UHV Gebrauchsanleitung

Agilent Technologies 4UHV Gebrauchsanleitung

Ion pump controller
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Agilent 4UHV Ion Pump
Controller
Models
8299010, 8299011, 8299020, 8299021, 8299022,
8299101, 8299200, 8299201, 8299210, 8299211,
8299212, 8299213, 8299400, 8299401, 8299402,
9299010, 9299011, 9299020, 9299021, 9299022,
9299101, 9299200, 9299201, 9299210, 9299211,
9299212, 9299213, 9299400, 9299401, 9299402
Manuale di Istruzioni
Bedienungshandbuch
Notice de Mode D'Emploi
User Manual
87-900-137-01 (D)
06/2017

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Inhaltszusammenfassung für Agilent Technologies 4UHV

  • Seite 1 Agilent 4UHV Ion Pump Controller Models 8299010, 8299011, 8299020, 8299021, 8299022, 8299101, 8299200, 8299201, 8299210, 8299211, 8299212, 8299213, 8299400, 8299401, 8299402, 9299010, 9299011, 9299020, 9299021, 9299022, 9299101, 9299200, 9299201, 9299210, 9299211, 9299212, 9299213, 9299400, 9299401, 9299402 Manuale di Istruzioni Bedienungshandbuch Notice de Mode D’Emploi...

  • Seite 2: Trademarks

    “Restricted computer software” as proceed beyond a WARNING notice defined in FAR 52.227-19 (June 1987) until the indicated conditions are or any equivalent agency regulation or fully understood and met. Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (D)
  • Seite 3 4UHV Ion Pump Controller 4UHV Ion Pump Controller Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 3/114...
  • Seite 4 4UHV Ion Pump Controller 4/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)

  • Seite 5: Inhaltsverzeichnis

    Preparazione per l’installazione 9 Installazione Manutenzione 16 Smaltimento Gebrauchsanleitung Allgemeines Lagerung Vor der Installation 19 Installation 20 Gebrauch Wartung Entsorgung 26 Mode d’emploi Indications Generales Emmagasinage 29 Preparation pour l’Installation Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 5/114...
  • Seite 6 Prior to Installation 39 Installation 40 Usage Maintenance Disposal Technical Information 47 4UHV Controller Description 49 Specifications 50 Interlock connection Operating Mode Start-Up Serial Display and Menus 88 PROFIBUS 95 Orderable Parts 107 6/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)

  • Seite 7: Istruzioni Per L'uso

    Agilent 4UHV Ion Pump Controller User Manual Istruzioni per l’uso Informazioni Generali Immagazzinamento 9 Preparazione per l’installazione Installazione Uso 12 Accensione del controller dal pannello frontale (modalità LOCAL) Manutenzione 16 Smaltimento Traduzione delle istruzioni originali 7/114...

  • Seite 8: Informazioni Generali

    I messaggi di attenzione sono visualizzati prima di procedure che, se non ATTENZIONE! osservate, potrebbero causare danni all’apparecchiatura. Le note contengono informazioni importanti estrapolate dal testo. NOTA 8/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)

  • Seite 9: Immagazzinamento

    Il materiale dell’imballo è completamente riciclabile e risponde alla direttiva CEE 85/399 per la tutela dell’ambiente. Figura 1 Imballo del controller Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 9/114...

  • Seite 10: Installazione

    Installazione Installazione AVVERTENZA! Per la sicurezza dell’operatore il controller 4UHV deve essere alimentato con un cavo di alimentazione a 3 fili dotato di una spina approvata a livello internazionale. Utilizzare questo cavo e spina insieme ad una presa adeguatamente connessa a terra per evitare scosse elettriche e soddisfare i requisiti delle norme CE.
  • Seite 11 EN 61010-1. Connettere quindi il dispositivo ad una linea di alimentazione che soddisfi tale categoria. Il controller 4UHV ha dei connettori per gli ingressi/uscite e per la comunicazione seriale che devono essere connessi ai circuiti esterni in modo che nessuna parte sotto tensione sia accessibile.

  • Seite 12: Uso

    L’uso del controller è inteso con cavo di alta tensione provvisto di interlock. 4UHV Figura 2 Collegamenti delle masse 12/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 13 L’interlock del cavo viene chiuso sulla massa della pompa. Se il collegamento è interrotto l’alta tensione viene disabilitata. Per collegare il controller alla pompa, utilizzare un cavo HV dotato di interlock (vedere nelle parti ordinabili). Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 13/114...

  • Seite 14: Accensione Del Controller Dal Pannello Frontale (Modalità Local)

    “MODE” fino a quando appare sul display la scritta LOCAL. Tenere premuto il pulsante HV ON/OFF (2) mentre si preme il  pulsante HV-x (3,4,5,6) dove x è il numero del canale che si vuole accendere o spegnere. 14/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 15 Istruzioni per l’uso Figura 4 Front Panel 4UHV Ion Pump Controller Figura 5 Rear Panel 4UHV Ion Pump Controller Per spegnere i canali HV: Tenere premuto il pulsante HV ON/OFF (2) mentre si preme il  pulsante HV-x (3,4,5,6) dove x è il numero del canale che si vuole accendere o spegnere.

  • Seite 16: Manutenzione

    Mettendo in off l’interruttore generale si spegnerà l’unita HV. Manutenzione Il controller 4UHV non richiede alcun intervento di manutenzione. Qualsiasi tipo di intervento sull’unità deve essere eseguito da personale tecnico autorizzato. In caso di guasto è possibile usufruire del servizio di riparazione Agilent o del "Agilent advanced exchange service", che...

  • Seite 17: Gebrauchsanleitung

    Agilent 4UHV Ion Pump Controller User Manual G ebrauchsanleitung Allgemeines Lagerung Vor der Installation 19 Installation Gebrauch Einschalten des Controllers von der vorderen Schalttafel (LOKAL-Modus) 24 Wartung Entsorgung Übersetzung der Originalanleitungen 17/114...

  • Seite 18: Allgemeines

    Die Vorsichtshinweise vor bestimmten Prozeduren machen den Bediener darauf VORSICHT! aufmerksam, dass bei Nichteinhaltung Schäden an der Anlage entstehen können. Die HINWEISE enthalten wichtige Informationen, die im Text hervorgehoben HINWEIS werden. 18/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)

  • Seite 19: Lagerung

    Eventuelle Transportschäden müssen sofort der zuständigen örtlichen Verkaufsstelle gemeldet werden. Das Verpackungsmaterial muss korrekt entsorgt werden. Es ist vollständig recyclebar und entspricht der EG-Richtlinie 85/399 für Umweltschutz. Abbildung 1 Verpackung des Controllers Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 19/114...

  • Seite 20: Installation

    Installation Installation WARNUNG! Zur Sicherheit des Controller-Bedieners muss der 4UHV an ein 3-Draht- Speisekabel mit einem international anerkannten Stecker angeschlossen sein. Dieses Kabel und dieser Stecker müssen an eine angemessen geerdete Steckdose angeschlossen sein, um Stromschläge zu vermeiden und den Anforderungen der CE-Normen gerecht zu werden.

  • Seite 21: Während Des Betriebs Müssen Folgende Umgebungsbedingungen Eingehalten Werden

    Serienkommunikation, die an externe Kreisläufe angeschlossen sein müssen, so dass man zu keinem unter Strom stehenden Teil Zugriff hat. Vergewissern Sie sich, dass die Isolierung des Gerätes, das an den Controller 4UHV angeschlossen ist, auch bei Einzelstörungen, wie sie von der Vorschrift EN 61010-1 vorgesehen sind, angemessen isoliert ist.

  • Seite 22: Gebrauch

    Hochspannungskabel des Interlock-Kabels an die Ionenpumpen angeschlossen sind. Der Gebrauch des Controllers muss unter Verwendung eines Hochspannungskabels mit Interlock erfolgen. 4UHV KABEL PUMPE LEITUNG PUMPEN-ERDE Abbildung 2 Erdung 22/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 23 Die Verriegelung des Kabels wird auf der Masse der Pumpe geschlossen. Wenn die Verbindung unterbrochen wird, wird die Hochspannung deaktiviert. Beim Anschluss des Controller an die Pumpe ist ein HV-Kabel mit Interlock (siehe Bestellteile) zu verwenden. Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 23/114...

  • Seite 24: Einschalten Des Controllers Von Der Vorderen Schalttafel (Lokal-Modus)

    Halten Sie die Taste HV ON/OFF (2) ) gedrückt und drücken Sie  gleichzeitig die Taste HV-x (3,4,5,6) ), wobei x die Nummer der Leitung ist, die ein- oder ausgeschaltet werden soll. 24/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 25 Taste HV-x (3,4,5,6), wobei x die Nummer der Leitung ist, die ein- oder ausgeschaltet werden soll. Weitere Einzelheiten zum Gebrauch des Controllers und zur Beschreibung der Display-Angaben entnehmen Sie bitte dem Abschnitt “ Technical Information ”. Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 25/114...

  • Seite 26: Wartung

    Lieferanten des Geräts - d.h. die Muttergesellschaft oder den Wiederverkäufer - kontaktieren, um den Entsorgungsprozess zu starten, nachdem er die Verkaufsbedingungen geprüft hat. Weitere Informationen finden Sie unter: http://www.agilent.com/environment/product/index.shtml 26/137 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)

  • Seite 27: Mode D'emploi

    Agilent 4UHV Ion Pump Controller User Manual Mode d’emploi Indications Generales Emmagasinage 29 Preparation pour l’Installation 29 Installation Utilisation Allumage du Contrôleur du Panneau Frontal (Modalité LOCAL) 34 Entretien Mise au Rebut 36 Traduction de la mode d’emploi originale 27/114...

  • Seite 28: Indications Generales

    Les messages d'attention apparaissent avant certaines procédures qui, si elles ATTENTION! ne sont pas observées, pourraient endommager sérieusement l'appareillage. Les notes contiennent des renseignements importants, isolés du texte. NOTE 28/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)

  • Seite 29: Emmagasinage

    à ne lui faire subir aucun choc. Le matériel est entièrement recyclable et il est conforme aux directives CEE 85/399 en matière de protection de l'environnement. Figure 1 Emballage du contrôleur Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 29/114...

  • Seite 30: Installation

    Installation Installation AVERTISSEMENT! Pour la sécurité de l’opérateur, le contrôleur 4UHV doit être alimenté par un câble d’alimentation à 3 fils doté d’une prise mâle approuvée à un niveau international. Brancher le câble avec prise mâle à une prise femelle raccordée à la terre de façon adéquate afin d’éviter tout risque d’électrocution et de pouvoir remplir les conditions de conformité...
  • Seite 31 à une ligne d’alimentation qui soit adaptée à cette catégorie d’appareils. Le contrôleur 4UHV dispose de connecteurs pour entrées/sorties et pour la communication en série qui doivent être branchés à des circuits externes de façon à ce qu’aucune des parties sous tension ne soitaccessible. Veiller à ce que le système d’isolation du dispositif branché...

  • Seite 32: Utilisation

    Interlock. L’usage du contrôleur est subordonné à l’usage d’un câble haute tension doté d’Interlock. 4UHV POMPE LIGNE BRANCHEMENT DE TERRE DE LA POMPE Figure 2 Connexions des masses 32/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 33 L’interlock du câble est serré sur la masse de la pompe. Si le branchement est coupé, la haute tension est interrompue. Pour relier le contrôleur à la pompe, utiliser un câble HV équipé d’un interlock (voir le bordereau de commande des pièces). Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 33/114...

  • Seite 34: Allumage Du Contrôleur Du Panneau Frontal (Modalité Local)

    LOCAL jusqu’à ce que l’inscription LOCAL s’affiche sur l’écran. Maintenir le bouton HV ON/OFF (2) enfoncé tout en appuyant sur  le bouton HV-x (3,4,5,6) ; x correspond au numéro du canal à allumer ou à éteindre. 34/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 35 Mode d’emploi Utilisation Figure 4 Panneau avant 4UHV sur le contrôleur de pompe Figure 5 Panneau arrière 4UHV sur le contrôleur de pompe Pour éteindre les canaux HV : Maintenir le bouton HV ON/OFF (2) enfoncé tout en appuyant sur ...

  • Seite 36: Entretien

    En plaçant l’interrupteur général sur OFF, l’unité H.T. s’arrête. Entretien Le contrôleur 4UHV n’a besoin d’aucun entretien. N’importe quel entretien sur l’unité doit être effectué par un personnel technique autorisé. En cas de panne contacter le Support technique Agilent ou bien s’abonner au Agilent Advanced Exchange Service”...

  • Seite 37: Instructions For Use

    Agilent 4UHV Ion Pump Controller User Manual Instructions for Use General Information 38 Storage Prior to Installation 39 Installation Usage Powering On the Controller from the Front Panel (LOCAL Mode) 44 Maintenance Disposal Original Instructions 37/114...

  • Seite 38: General Information

    Caution messages are provided before procedures that could cause damage to CAUTION! the equipment if not complied with. Notes provide you with important information extracted from the text. NOTE 38/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)

  • Seite 39: Storage

    When unpacking the controller, be particularly careful to avoid dropping it or knocking it against anything. The packaging material is totally recyclable and complies with EEC directives 85/399 for the safeguard of the environment. Figure 1 Controller Packaging Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 39/114...

  • Seite 40: Installation

    Installation WARNING! For the safety of the operator, the 4UHV controller must be powered with a 3- wire power cable connected to a plug approved at international level. Use this cable and plug together with an adequately earthed socket so as to prevent electrical shocks and satisfy the requirements of EC norms.
  • Seite 41 Make sure that the insulation of the device connected to the 4UHV controller provides an adequate insulation even in the case of a single fault condition as stipulated in the EN 61010-1 normative.

  • Seite 42: Usage

    It is assumed that the controller will be used together with the high voltage cable having a safety interlock. 4UHV Figure 2 Ground Connections 42/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 43 HV cable with interlock (see parts that can be ordered). Correct connection of masses, of the HV cable between the controller and pump and of the interlock cable is illustrated in the “Connections” figure. Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 43/114...

  • Seite 44: Powering On The Controller From The Front Panel (Local Mode)

    LOCAL is shown on the display. Hold down the HV ON/OFF button (2) while pressing the HV-x  (3,4,5,6) button where x is the number of the channel to be switched on/off. 44/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 45 (3,4,5,6) button where x is the number of the channel to be switched on/off. For further details on using the controller and for a description of the information appearing on the display, refer to the section “Technical Information”. Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 45/114...

  • Seite 46: Maintenance

    When the main switch is turned off, the HV unit is switched off. Maintenance The 4UHV controller does not require any maintenance. Any form of servicing on the unit must be performed by authorized personnel. If servicing is needed, contact Agilent Technical Support or subscribe to the “Agilent Advanced Exchange Service”...

  • Seite 47: Technical Information

    Agilent 4UHV Ion Pump Controller User Manual Technical Information 4UHV Controller Description 49 Specifications Controller Outline Front Panel Description 53 Keys Rear Panel Description 55 Operating Mode 58 Selecting “Operating Mode” from Front Panel 58 Selecting “Operating Mode” via Serial 59...
  • Seite 48 PROFIBUS Connectors Pin-Out Rotary Switches Indicators GSD File State Machine Message Mapping Configuration Buffer Structure Configuration Output Structure Configuration Input Structure Diagnosis Management Diagnostic Buffer (15 byte) Orderable Parts 107 48/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)

  • Seite 49: 4Uhv Controller Description

    Technical Information 4UHV Controller Description 4UHV Controller Description The 4UHV controller is a power supply for ion pumps. It supplies a high voltage on output, selectable as 3 kV, 5 kV or 7 kV, and measures the output current. The controller has the following features: Front panel with keypad and a 4-row display (4x20, 146 x 62 ...

  • Seite 50: Specifications

    Two independent channels with a maximum of 200 W power per  channel One 200 W channel and two 80 W channels.  One 120 W channel  The 4UHV controller can be operated in the modes: LOCAL, SERIAL or REMOTE. Specifications Tab. 1 Specifications Component Description...
  • Seite 51 Technical Information Specifications Output curve (200W) Output curve (80W) 8000 7000 6000 5000 4000 3000 2000 1000 Current (mA) Figure 7 Output voltage vs Output current Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 51/114...

  • Seite 52: Controller Outline

    Technical Information Specifications Controller Outline The outline dimensions for the 4 UHV controller are shown in the following figures: Front View 400.50 211.40 141.20 Rear View Figure 8 Controller Model Dimensions 52/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)

  • Seite 53: Front Panel Description

    5 seconds. By keeping this key pressed for a long time (> 2 sec), you enter the menu. To exit from the menu, press the Mode key again for a long time. Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 53/114...
  • Seite 54 Blinking mark = Protect error 3. SP-x Solid mark = Set-point activate  Without mark = Set-point not active 4. Step-x Solid mark = Step  Without mark = Fixed 54/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)

  • Seite 55: Rear Panel Description

     The interlock connectors associated to each channel  The fuses  The DB9 connector for RS232 and RS485 serial communication  The DB37 connector for Remote I/O signals.  Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 55/114...
  • Seite 56 Proceed as follows to replace one or both fuses: Disconnect the mains cable Waiting for 15 second Remove the fuse with a small screwdriver Replace the fuse Use only 5x20 T6.3 A 250 V fuses 56/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)

  • Seite 57: Interlock Connection

    (connected to the ion pump) is less than 400 Ohm. Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 57/114...

  • Seite 58: Operating Mode

    Technical Information Operating Mode Operating Mode The controller 4UHV for ion pumps can be operated in three different modes: Local  Serial  Remote.  The commands sent to the controller (for example, HVON/OFF, Target voltage etc) can only be given in the mode chosen, while the data (for example, current, pressure, voltage etc…) can be read in all...

  • Seite 59: Selecting "Operating Mode" Via Serial

    Selecting “Operating Mode” via Serial Using serial communications via the protocol “WIN protocol” (see chapter: SERIAL – Window Protocol), write the chosen value in window 8: Tab. 3 Keys Value Description Serial Remote Local Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 59/114...

  • Seite 60: Start-Up

    Press the keys HV-ON/OFF keys and HV-x, where x is the number of the channel you want to switch on. Key HV-ON/OFF Main power switch Keys HV-x Figure 12 Front Panel 60/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 61 500 StarCell 9.0E-4 A 2.5E-5 A 300 StarCell 5.5E-4 A 1.6E-5 A 150 StarCell 3.0E-4 A 8.5E-6 A 75-55-40 StarCell 1.3E-4 A 3.8E-6 A 20 StarCell 6.5E-5 A 1.9E-6 A Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 61/114...
  • Seite 62 This kind of error is not a controller error but it is only a warning, informing that the HV channel is turned off because the protect current threshold was exceeded. 62/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 63 Relay A  channel 1; Relay B  channel 1 ; Relay C  channel 3; Relay D  channel 3. Example 3: all relays for only one channel (e.g. channel 2). Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 63/114...
  • Seite 64 When the Autostart is selected: If the HV channel is in ON status and the main power supply  fails, when the supply is restored the HV channel automatically turns on. 64/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 65 If you select “Threshold” the two cooling fan are switched OFF if the output current of each HV channel is below of the 1mA. Reset standard settings If “yes” is selected, the settings are restored to the standard unit configuration. Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 65/114...
  • Seite 66 Pin 19 CH1 NO Set-point Relay Channel 2 Input Pin 9 CH2 on/off Pin 10 CH2 protect Pin 11 CH2 step Pin 22 Digital Gnd Analog Output Pin 2 Analog 2 66/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 67 Digital Gnd Analog Output Pin 21 Analog 4 Pin 3 Analog Gnd Digital Output Pin 32 CH4 NC Set-point Relay Pin 33 CH4 (Common) Relay Pin 34 CH4 NO Set-point Relay Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 67/114...
  • Seite 68 24V > V > 23V I > 2.25mA I < 100uA Range 0-10V Analog Output 24V , 1A max Output Relay 24V +/- 10% - +24V dc 60mA max Figure 14 Recorder Output Pressure 68/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 69 Analog remote vs Pressure (kPa) Analog remote vs Pressure 1.3E-5 mbar 1.3E-11 mbar 1.0E-11 1.0E-10 1.0E-09 1.0E-08 1.0E-07 1.0E-06 1.0E-05 1.0E-04 Pressure (mbar) Figure 16 Analog remote vs Pressure (mbar) Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 69/114...

  • Seite 70: Connection Of Input Remote

    In order to activate the inputs remote (CH on/off, Ch protect, CH Step) connect the pins as following: +24V 4,7 KΩ Input pin Digital GND Customer Controller device’s Figure 17 Input 70/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)

  • Seite 71: Serial

    The following figure shows the 4UHV interconnections. Figure 18 4UHV interconnections This is a 9-pin D-type serial input/output connector that allows the 4UHV to be controlled via an RS232 or RS485 connection. Tab. 8 PIN No. Signal Name +5 V (OUT)

  • Seite 72: Connector Examples

    (see the structure below), but only the RS485 handles the address field. Therefore, to enable the RS485, you need to select both the type of communication and the device address using the front panel menu or the Navigator software. 72/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 73 EEPROM <ADDR> (Unit address) = 0x80 + device number (0 to 31) (for RS485) Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 73/114...
  • Seite 74 MESSAGE. Using the RS485 interface, the message structure is identical to that used for NOTE the RS232 interface, the only difference being the value assigned to the ADDRESS <ADDR>. 74/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)

  • Seite 75: Status

    HV ON/OFF CH4 0 = OFF(def) ; 1=ON Baud rate (1-4) [1200-2400-4800-9600] Status Error code Controller Model Controller Serial number RS485 Serial Address [0-31]; 1=def Serial Type Select 0= RS232(def) ; Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 75/114...
  • Seite 76 I protect CH3 [1,100] step 1 mA Set Point CH3 [X.XE-XX] Device Number CH4 (see below) Power max CH4 20 W – 80 W V target CH4 [3000,7000] V step 1000; def=7000 76/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 77 100 V I measured CH3 [1E-10, 9E-1] A Pressure CH3 [X.XE-XX] V measured CH4 [0, 10000] V ; step 100 V I measured CH4 [1E-10, 9E-1] A Pressure CH4 [X.XE-XX] Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 77/114...
  • Seite 78 Controller ADDR Turn OFF Channel 1  Controller ADDR WINDOW DATA  Controller ADDR Read Pressure (win 812) Channel 1  Controller ADDR WINDOW  Controller ADDR WINDOW DATA Data=1.5E-8 78/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 79 Controller ADDR WINDOW  Controller ADDR WINDOW DATA Data=2.9E-5 Operating mode (Win 601) Autostart ON  Controller ADDR WINDOW DATA  Controller ADDR Autostart OFF  Controller ADDR WINDOW DATA Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 79/114...
  • Seite 80 (all char are “30”=0 and only the third form right is “31”=1). So it means activate the protect on CH3, while protect on CH1,2,4 will be not activated. Status Set Point (804)  Controller ADDR WINDOW  Controller ADDR WINDOW DATA 80/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)

  • Seite 81: Error Description

    Error code in decimal format Binary Description 0000000000000 No error 0000000000001 FAN error 0000000000010 Power input error from HV 0000000000100 Power input error from PFC 0000000001000 Overtemp PFC 0000000010000 Error communication CPU-HV Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 81/114...
  • Seite 82 0000000110000 ( binary) Interlock cable error + Overtemp HV Error code (Win 206) Error interlock ADDR WINDOW ADDR WINDOW DATA Channel selection (Win 505) Read ADDR WINDOW ADDR WINDOW DATA 82/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 83 DATA Channel selection (Win 505) Write 2 ADDR WINDOW DATA ADDR Error code (Win 206) Interlock not present error because channel 2 has been selected: ADDR WINDOW ADDR WINDOW DATA Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 83/114...

  • Seite 84: Old Serial Protocol ("Binary Protocol")

    Nevertheless, for compatibility with the old systems, some commands of the “Binary Dual” have been implemented. The 4UHV controller cannot implement all the commands of the Dual but only a subset. Communications Format These protocols have the following formats: Tab.
  • Seite 85 XOR of all bytes (checksum excluded) in and with 7Fh. Command Listing It is not possible to implement all the “Binary Dual” protocol commands on the 4UHV controller. The commands that are implemented on the 4UHV controller are the following: Agilent 4UHV Ion Pump Controller User Manual...
  • Seite 86 4Bh 30h Set point 50h 30h V meas. 53h 30h I meas. 54h 30h P meas. 55h 30h Set-point status 67h 30h Interlock status 5Dh 30h Error status 7Ah 30h 86/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 87 Tab. 18 Value Error Status Coding (active if 1) Cable Interlock Excess temperature Power input error FAN Error Protect 31h 30h Short-circuit 31h 31h HV out error 31h 32h Zero Measurement Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 87/114...

  • Seite 88: Display And Menus

    The voltage on all the four channels can be displayed simultaneously, or the current of all four channels, or the pressure. To do this, press the “V/I/P” key; the following screens appear cyclically. 88/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 89 + 7 0 0 10 Press “V/I/P” 11 Display the current for each channel E - X - X X X E - X X E - X X 12 Press “V/I/P” Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 89/114...
  • Seite 90 To activate or disactivate Protect mode, keep the Protect key pressed while you press the HV-x key, where x is the number of channel for which you want to activate or disactivate the “Protect” functionality. 90/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 91 The specific parameters for each channel are the following: Pump: Select the type of pump  I Protect: Set the Protect current  Power max: Set the maximum power.  Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 91/114...
  • Seite 92 Technical Information Display and Menus Scrolling Through the Menus The 4UHV controller menu has a three-level structure. To scroll through the menus, remaining on the same level, press  the keys “ ◄ “ “ ►”. To go to submenu, press “Enter” in the transition menus.

  • Seite 93: Menu Screens

    ■ C O N F G E N E R A L F a n H R E S H O L D ■ A L W A Y S Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 93/114...
  • Seite 94 G U R H V 1 H V 2 X X X X X ► H V 3 H V 1 P r o H V 1 M a x 94/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)

  • Seite 95: Profibus

    Indicators Two LEDs are present on the interface: one green and one red. The red led indicates that the interface is correctly powered. Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 95/114...

  • Seite 96: Power_On

    Regular data exchange). This failure has priority (in the indication) over the previous. Blink fast Gateway fail (internal check) or wrong address set (address > 0x7D or address not stable during power-on). Blink slow Gateway operating properly. 96/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)

  • Seite 97: Wait_Prm

    (one for ProfiBus and the other for RS-485) linked together. Each device has its own state machine to manage the device operation. Profibus state machine RS485 state machine Power-on Power-on SRC_ADDR WAIT_PRM IDENTIFY WAIT_CFG DATA_EXCH DATA_EXCH Figure 26 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 97/114...

  • Seite 98: Regular Data Exchange

    ProfiBus State machine is not in Data Exchange mode As a general rule, unrecoverable communication errors make each machine to jump to the state immediately following the power-on state (WAIT_PRM or SRC_ADDR). 98/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)

  • Seite 99: Message Mapping

    The profibus communication and the serial communication use the same link NOTE inside of the controller, then you can not use at the same time the profibus communication and the serial communication. Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 99/114...
  • Seite 100 C to channel 4 you have to write byte offset 13 B = 0100 if you want assign the set point D to channel 1 you have to write byte offset 13 B = 0001 100/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 101  1=remote, 2 = local, 3= Profibus It is not possible to switch between profibus mode and serial mode using the NOTE profibus communication you can switch between these two modes only in Local mode. Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 101/114...
  • Seite 102 4 (floating Channel 2 , Pressure measured selected point) Pressure unit 4 (floating Channel 3 , Pressure measured selected point) Pressure unit 4 (floating Channel 4 , Pressure measured selected point) 102/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 103 Otherwise there is a problem. During the start-up phase after one interface power on or controller power on, the first byte can assume values different from zero for few seconds. Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 103/114...
  • Seite 104 If the user sets one or more parameters out of their allowed range, a Profibus external diagnostic service is required and some bits in the diagnosis frame signals which parameter is wrong (i.e. over range or under range). 104/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)
  • Seite 105 (slave is parameterised by another master) Reserved Master Add (master address after parameterisation. FF= without parameter) Ident number high Ident number low External diagnosis “Header” length indication including header Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D) 105/114...
  • Seite 106 HV1 Fixed/Step Mode diagnostic status 7…4 HV2 Fixed/Step Mode diagnostic status 3…0 HV3 Fixed/Step Mode diagnostic status 7…4 HV4 Fixed/Step Mode diagnostic status 3…0 Serial/Remote/Local/Profibus diagnostic status 7…4 Not used 3…0 106/114 Agilent 4UHV Ion Pump Controller User Manual 87-900-137-01 (D)

  • Seite 107: Orderable Parts

    Orderable Parts Tab. 26 Part Description Controllers 8299010 4UHV with 1 channel 200 W Negative with profibus interface 8299011 4UHV with 1 channel 200 W Positive with profibus interface 8299020 4UHV with 2 channels 200 W Negative with profibus interface 8299021...
  • Seite 108 4UHV with 4 channels 80 W Negative 9299401 4UHV with 4 channels 80 W Positive 9299210 4UHV with 2 channels 80 W Negative + 1 channel 200 W Negative 9299211 4UHV with 2 channels 80W Positive + 1 channel 200 W Positive...
  • Seite 109 Vacuum Products Division Dear Customer, Thank you for purchasing an Agilent vacuum product. At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and/or service you have purchased. As part of our Continuous Improvement effort, we ask that you report to us any problem you may have had with the purchase or operation of our products.
  • Seite 110 CUSTOMER REQUEST FOR CORRECTIVE / PREVENTIVE / IMPROVEMENT ACTION AGILENT VACUUM PRODUCTS DIVISION TORINO – QUALITY ASSURANCE FAX N°: XXXX‐011‐9979350 ADDRESS: AGILENT TECHNOLOGIES ITALIA S.p.A. – Vacuum Products Division – Via F.lli Varian, 54 – 10040 Leinì (TO) – Italy E‐MAIL: vpd‐qualityassurance_pdl‐ext@agilent.com NAME...
  • Seite 111 Please follow these instructions whenever one of our products needs to be returned. Complete the attached Request for Return form and send it to Agilent Technologies (see below), taking particular care to include the completed Health and Safety declaration Section. No work can be started on your unit until we receive a completed copy of this form.
  • Seite 112 Terms and conditions TERMS AND CONDITIONS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division – Products and Services Terms of Sale. Unless otherwise pre-negotiated, customer is responsible for the freight charges for the returning product.
  • Seite 113 Vacuum Products Division Request for Return Form Customer information Company : Contact Name: Address: Tel: Fax: Email: Equipment Product description Agilent PartNo Agilent Serial No Original Purchasing Reference Failure description Type of process (for which the equipment was used) Type of return Non Billable Billable New PO # (hard copy must be submitted with this form): ______________________________________...
  • Seite 114 Agilent Vacuum Products Division/Sales and Service Offices United States India (Sales) India (Service) Agilent Technologies Agilent Technologies India Pvt. Ltd. Agilent Technologies India Pvt. Ltd. 121 Hartwell Avenue C-Block, RMZ Centennial Plot Number- Unit Nos 110- 116, & Part of 101 & 109...

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