Shutdown; Low Speed Operation; Power Failure; Accessories And Spare Parts - Varian 969-9461 Bedienungshandbuch

Shutdown

•
Press the ST ART/STOP button or remove the
remote signal; power from the turbopump is
removed and the pump will begin to slow down.
If the forepump is interfaced to the controller it
will automatically be switched off.
If the recommended Turbo-V pump will be
vented:
(&
CAUTION!
When the Turbo-V pump is shut down for any reasons
the pump must be vented from high vacuum side with
dry and inert gas to prevent back-streaming from the
forepump line into the Turbo -V pump.
•
The Turbo-V pump can be shut down at any
rotational speed by pressing the ST ART/STOP
button.
NOTE
It is recommended to operate the vent device and the
forepump automatically by the controller in order to
ensure correct sequences.
• When the turbo pump is stopped, tum off the
cooling water supply
condensation in the pump.
Low speed operati o n
NOTE
With the Low Speed front panel switch pressed, the
remote signal is inoperative and viceversa.
This feature is provided to operate the pump at
moderate high pressure with gas throughput.
To operate in this low speed mode, engage the Low
Speed switch either before starting the pump or after it
is operating.
About half of the frequency L.E.D.'s will remain lighted
to indicate the low speed operation and the RPM
display shows about 18.
The pump will run at about 70% of its nonnal speed
and achieve a base pressure somewhat higher than the
standard specifications. If the gas load become higher,
the controller output frequency and voltage start to
decrease automatically and the Turbo-V pump is
slowed down proportionally to the gas load till reaching
1/3 of the nominal speed. Subsequently the power
drawn by the turbopump increase to the overload
threshold. At this point the turbo pump and the
interconnected accessories are stopped.

Power Failure

In the event of a power failure (momentary or long
period} the Turbo-V controller will stop the turbopump
and all the interconnected pumps/devices. The Turbo-V
vent device if used will vent the turbopump only if the
power failure is longer than preset delay time.
When power is restored, the Turbo-V controller
automatically restarts the interconnected devices and
turbopump in the proper sequence.

ACCESSORIES AND SPARE PARTS

to avoid vapor
TECHNICAL INFORMATION
P/N DESCRIPTION
03.660435-01 Push-button START/STOP
03 .660435-02 Push-button LOW SPEED
Push-button START/STOP
03.660435-03
03.660435-55 lamp 28V (Low Speed,
Start/Stop )
03.660435-56 Lamp 60V (Heater}
03.660405-52 Hour counter
03.660433-03 Panel connector J22 logic (w
flat cable)
03.660421 Mating connector J21 power
03.660436-01 Panel connector J21 power
Mating connector P21
03.660436-02