Agilent Technologies TV 551 SEM Navigator Bedienungshandbuch Seite 203

WARNING! Never use the turbopump when the inlet flange is not connected to the
vacuum chamber. Do not touch the turbopump or any of its accessories
during the heating process. The high temperatures may cause burns.
Avoid impacts, oscillations or harsh movements of the pump when in operation.
CAUTION!
The bearings may become damaged. Use air or inert gas free from dust or
particles for venting the pump. The pressure at the vent port must be less than
2 bar (above atmospheric pressure). For pumping aggressive gases, these
pumps are fitted with a special port to allow a steady flow of inert gas (like N
Ar) for pump bearing protection (see the appendix "Technical Information").
WARNING! When employing the pump for pumping toxic, flammable, or radioactive
gases, please follow the required procedures for each gas disposal. Do not
use the pump in presence of explosive gases.
TV 551/701 SEM Navigator User Manual / 87-900-958-01(G)
Instructions for Use
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