Connections - Leybold vacuum TURBOVAC 1100 C Gebrauchsanleitung

Connections

E
F
A High-vacuum connector flange
B Forevacuum connector flange
C Airing flange
D Purge gas flange
E Connection for water cooling
F Connection for TURBOTRONIK
G Sub-D socket for
- Processing status signals
- Manual query of the rotor bearing temperature
Fig. 1 TURBOVAC 1100 C
16
A
C
D
B
E
G
Fig. 2 Transport
2 Connections
Caution
Unless appropriate accessories and attach-
ments are used, the TURBOVAC is not
suitable for aggressive or corrosive media,
or those containing dust. When handling
reactive media or media which contain par-
ticles the C version pump must be operated
with purge gas.
Observe the information on media compati-
bility, to be found at the beginning of these
operating instructions.
Do not open the packaging until immediately prior to
installation.
Remove the covers and the blank flanges at the turbo-
molecular pump only just before installing, to ensure that
the is installed under the cleanest possible
TURBOVAC
conditions.
When moving the heavier pumps, the lower surfaces on
the base flange are suitable for accepting a lifting fork;
see Fig. 2.
Caution
Take care not to damage the plugs and
coolant connections during movement.
Do not stand below the
TURBOVAC
connected to or detached from the system.
pump while it is being
GA 05.128/7 - 05/2002