Section 1 Introduction; Scope; Purpose; Description - Brooks Instrument Sla5840 Installations- Und Bedienungsanleitung

Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016

1-1 Scope

1-2 Purpose

1-3 Description

Thank you for purchasing a Brooks Instrument Remote Transducer
Pressure Controller/Flowmeter Product. This manual, X-PR-SLA5840-
Series-RevB-RT-eng is an installation and operation manual for your
instrument.
If you have purchased a Brooks
DeviceNet TM or Profibus ®
shall also be provided as part of the operating documentation.
The Brooks Digital Products are mass flow measurement devices
designed for accurately measuring and controlling both pressure and the
flows of gases. This instruction manual is intended to provide the user with
all the information necessary to install, operate and maintain the Brooks
This manual is organized into the following sections.
Section 1 Introduction
Section 2 Installation
Section 3 Operation
Section 4 Maintenance & Troubleshooting
Section A Essential Instructions
Back Cover Warranty, Local Sales/Service Contact Information
It is recommended that this manual be read in its entirety before attempting
to operate or repair these Brooks Digital products.
®
The Brooks Model SLA5840 Pressure Controller/Flowmeter is designed to
control pressure while also measuring flow rate. The Model SLA5840
receives a remote pressure transducer signal, and using adjustable
integral PID control electronics and control valve, will maintain a desired
set pressure. The Model SLA5840 can also be configured as a mass flow
controller for calibration or test purposes.
Brooks now offers control interface with DeviceNet and Profibus, two high-
speed digital communication networks. Other network protocols are in
development. Talk to your Brooks representative about your specific needs.
The MFC's microprocessor uses a multi-point calibration curve, to deal
with residual sensor non-linearity, yielding a highly accurate process signal.
The microprocessor then executes Brooks' proprietary Adaptive Valve
Control algorithm to rapidly adjust the valve actuation to match setpoint.
Process data and commands may be wired using either traditional analog
connections or digital communications networks, the measurement and
control performance is the same!
The SLA5800 family of products takes advantage of modular design in
both mechanical and electrical construction. This modularity allows for

Section 1 Introduction

Brooks
®
Digital Mass Flow Product with
Communications, a separate Instruction Manual
®
Model SLA5840
®
RT.
1-1