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Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
®
Brooks
Model SLA5840
June, 2016
®
Brooks
Digital Remote Transducer
Pressure Controller/Flowmeter
Model SLA5840
Model SLA5840
Model SLA5840
Model SLA5840
With RS485 Communications
With Profibus
®
Communications
With DeviceNet
®
Communications
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Inhaltsverzeichnis
Verwandte Anleitungen für Brooks Instrument SLA5840
Inhaltszusammenfassung für Brooks Instrument SLA5840
- Seite 1 Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 June, 2016 ® Brooks Digital Remote Transducer Pressure Controller/Flowmeter Model SLA5840 Model SLA5840 Model SLA5840 Model SLA5840 With RS485 Communications With Profibus ® Communications With DeviceNet ® Communications...
- Seite 2 Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
- Seite 3 We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
- Seite 4 Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 June, 2016 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Seite 5: Inhaltsverzeichnis
Contents Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG Brooks ® Model SLA5840 June, 2016 Paragraph Page Number Number Section 1 Introduction Scope ............................1-1 Purpose ............................1-1 Description ..........................1-1 Specifications ..........................1-2 Section 2 Installation General ............................2-1 Receipt of Equipment ......................... - Seite 6 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply) ..... 2-6 Model SLA5840 System Block Diagram ..................3-1 Model SLA5840 Downstream and Upstream Applications ............3-2 Typical Application of Downstream Controller ................3-3 Typical Application of Upstream Controller................. 3-3 Externally Accessible Zero for all Meters/Controllers ..............
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Seite 7: Section 1 Introduction
PID control electronics and control valve, will maintain a desired set pressure. The Model SLA5840 can also be configured as a mass flow controller for calibration or test purposes. Brooks now offers control interface with DeviceNet and Profibus, two high- speed digital communication networks. -
Seite 8: Specifications
X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 June, 2016 simplified customer ordering and factory configuration, enabling Brooks to more easily meet the ever changing needs of our global customers. Brooks' production flexibility translates into reduced lead times for our customers. - Seite 9 Section 1 Introduction Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 June, 2016 Table 1-1 SLA5840 Flow Ranges and Pressure Ratings Pressure Controller Pressure Controller Pressure Controller Pressure Controller Pressure Controller Pressure Controller Pressure Controller Pressure Controller...
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Seite 10: Communication Protocol
Section 1 Introduction Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 June, 2016 Table 1-3 SLA5840 Series Communication Protocols Communication Protocol Communication Protocol Communication Protocol Communication Protocol Communication Protocol RS485 RS485 RS485 Profibus Profibus Profibus ® ® ® ® ®... - Seite 11 Section 1 Introduction Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 June, 2016 Table 1-4 SLA58XX Series Certifications Applicable Mark Agency Certification Standard Details Class I, Div 2, Group A, B, C, D Class I, Zone 2, IIC T4 UL &...
- Seite 12 Model SLA5840 June, 2016 Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-1 SLA5840 Analog/RS485 Connections and Pinouts RS485 Communications The Brooks Digital Series is equipped with RS485 communication capability. Refer to Figure 1-2 (Analog I/O pin connections), that enables the device to communicate via a personal computer for process control.
- Seite 13 Profibus Communications The Brooks SLA5840 is now equipped to support the Profibus communication protocol. Profibus is a fieldbus- based automation standard of Profibus and Profinet International (PI). Via a single bus cable, Profibus links controller or control systems with decentralized field devices (sensors and actuators) on the field level and also enables consistent data exchange with higher ranking communication systems.
- Seite 14 The Brooks SLA5840 is also available with DeviceNet communication capability. DeviceNet is an open digital protocol capable of high speeds and easy system connectivity. Brooks Instrument has several of its devices available on this popular networking standard, and is a member of ODVA (Open DeviceNet Vendors Association), the governing standard body for DeviceNet.
- Seite 15 Section 1 Introduction Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 June, 2016 Figure 1-4 Model SLA5840, Thru-Flow, RS485 Figure 1-5 Model SLA5840, Thru-Flow, Profibus...
- Seite 16 Section 1 Introduction Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 June, 2016 Figure 1-6 Model SLA5840, Thru-Flow, DeviceNet 1-10...
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Seite 17: Section 2 Installation
Section 2 Installation Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 June 2016 2-1 General ® This section provides installation instructions for the Brooks Enhanced Remote Transducer Pressure Controller. Section 1, Figures 1-1 thru 1-6 show the dimensions and electrical connections. -
Seite 18: Return Shipment
E-mail: BrooksEu@BrooksInstrument.com All flow instruments returned to Brooks requires completion of Form RPR003-1, Brooks Instrument Decontamination Statement, along with a Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. Failure to provide this information will delay processing by Brooks personnel. -
Seite 19: Installation
Section 2 Installation Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 June 2016 2-7 Installation Recommended installation procedures: a. The SLA Enhanced RT should be located in a clean, dry atmosphere relatively free from shock and vibration. -
Seite 20: In-Line Filter
Section 2 Installation Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 June, 2016 Table 2-1 Recommended Filter Size Models Maximum Flow Rate Recommended Filter SLA5840 100 ccm 2 micron SLA5840 500 ccm 5 micron SLA5840 1 to 5 lpm... - Seite 21 Section 2 Installation Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 June 2016 Figure 2-1 D-Connector Shielded Cable Hookup Diagram - Voltage I/O Options Figure 2-2 Common Electrical Hookups Voltage I/O Version...
- Seite 22 Section 2 Installation Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 June, 2016 Figure 2-3 Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply) Figure 2-4 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply)
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Seite 23: Operation Check Procedure
Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 June 2016 2-10 Operation Check Procedure a. Mount the RT in its final orientation. b. Apply power to the RT and allow approximately 45 minutes for the instrument to completely warm up and stabilize its temperature. - Seite 24 Section 2 Installation Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 June, 2016 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Seite 25: Section 3 Operation
Mass Flow sensor for flow indication. This device will control the pressure in a vessel or feed or exhaust line by using the remote transducer output signal as the transducer input of the SLA5840. This user supplied pressure transducer can have a full scale pressure as low as10 mTorr or as high as several hundred psi and a full scale output signal of 5 or 10 Vdc. -
Seite 26: Features
Not all features are available on all instruments. The SLA5840 is a full-featured digital Remote Transducer Pressure Controller. The SLA5840 performs much like a traditional analog RT, but with improved accuracy, step response and valve control. The analog interface matches that of Brooks' popular analog 5866RTs so it can be retrofitted into tools using analog RTs. - Seite 27 Section 3 Operation Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 June, 2016 Figure 3-3 Typical Application of Downstream Controller Figure 3-4 Typical Application of Upstream Controller...
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Seite 28: Analog I/O Mode Of Operation
A. Functional Description When configured in Pressure Control mode, the SLA5840 will utilize the remote transducer signal in it’s internal PID control. When configured in Mass Flow Control mode, the device utilizes the internal thermal sensor for mass flow control. - Seite 29 (max. = 15 Vdc), the valve will be forced to its open state. E. Mode Select The SLA5840 RT can operate in either a Remote Transducer mode (PID response to the connected remote transducer) or in the Mass Flow Controller mode (PID response to the on board thermal mass flow sensor) Switching between modes can only be done by use of a software tool called BEST (available for download on the Brooks Instrument website).
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Seite 30: Communications Features
PC-RT-eng) for more details regarding the capabilities of this communication interface. 3-5-2 Profibus Communications Features The Brooks SLA5840 is now equipped to support the Profibus communication protocol. The communication electronics allows for automatic baud rate detection ranging from 9600 baud to 12 Mbaud, thus making the need for any hardware baud rate selection methods not required. -
Seite 31: Devicenet Communications Features
DeviceNet is an open digital protocol capable of high speeds and easy system connectivity. Brooks Instrument has several of its devices available on this popular networking standard, and is a member of ODVA (Open DeviceNet Vendors Association), the governing standard body for DeviceNet. - Seite 32 Section 3 Operation Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 June, 2016 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Seite 33: Section 4 Maintenance & Troubleshooting
X-PR-SLA5840-Series-RevB-RT-eng & Troubleshooting Part Number: 541B201AAG Brooks ® Model SLA5840 June, 2016 4-1 Overview No routine maintenance is required on the Brooks Digital RT's. If an in-line filter is used, the filtering elements should be periodically replaced. This section provides the following information: •... - Seite 34 The Brooks SLA5840 (RT) can operate in mass flow mode as a mass flow controller utilizing the on board thermal flow sensor, or it can operate in pressure control mode utilizing the user supplied external pressure transducer.
- Seite 35 & Troubleshooting Part Number: 541B201AAG Brooks ® Model SLA5840 June, 2016 Figure 4-1 Bench Troubleshooting Circuit (Flow mode) a. Problem: No response to input commands/No output status signal. 1. The unit may not be receiving power. Check that module status LED is green.
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Seite 36: Gas Conversion Factors
Model SLA5840 June, 2016 4-3 Gas Conversion Factors (SLA5840 Only) If an RT is operated in flow control mode on a gas other than the gas it was calibrated with, a scale shift will occur in the relation between the output signal and the mass flow rate. - Seite 37 Section 4 Maintenance Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng & Troubleshooting Part Number: 541B201AAG Brooks ® Model SLA5840 June, 2016 Table 4-1 Conversion Factors (Nitrogen Base). GAS NAME FORMULA SENSOR ORIFICE DENSITY (KG/m FACTOR FACTOR @0°C, 1 atm Acetylene 0.615 0.970 1.173...
- Seite 38 Section 4 Maintenance Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng & Troubleshooting Part Number: 541B201AAG ® Brooks Model SLA5840 June, 2016 Table 4-1 Conversion Factors (Nitrogen Base) Continued. GAS NAME FORMULA SENSOR ORIFICE DENSITY (KG/m FACTOR FACTOR @0°C, 1 atm Ethylene 0.619 1.000...
- Seite 39 Section 4 Maintenance Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng & Troubleshooting Part Number: 541B201AAG Brooks ® Model SLA5840 June, 2016 Table 4-1 Conversion Factors (Nitrogen Base) Continued. GAS NAME FORMULA SENSOR ORIFICE DENSITY (KG/m FACTOR FACTOR @0°C, 1 atm Perfluoropropane 0.179 2.591...
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Seite 40: Restrictor Sizing
All SLA5840 Restrictor Assemblies are factory adjusted to provide a specific pressure drop for each flow rate. This corresponds to the desired full scale flow rate. A list of restrictor assemblies used in the SLA5840 mass flow controllers/meters are shown in Table 4-2... - Seite 41 Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng & Troubleshooting Part Number: 541B201AAG Brooks ® Model SLA5840 June, 2016 Table 4-2 Standard Restrictors. Size No Restrictor ( ALL BODY SIZES) Restrictor size selected from the table below is based on sensor Nitrogen equivalent flow Plug (Nitrogen equivalent flows of 8.022 SCCM or less)
- Seite 42 Section 4 Maintenance Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng & Troubleshooting Part Number: 541B201AAG ® Brooks Model SLA5840 June, 2016 THIS PAGE WAS INTENTIONALLY LEFT BLANK 4-10...
- Seite 43 Section A Essential Instructions Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG June, 2016 ® Brooks Model SLA5840 Bulgarian Brooks Instrument Brooks Instrument. Brooks Instrument : (1) . (2) Brooks Instrument (PED) 0,5 bar (g) 25 mm 1" (inch), (PED).
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Seite 44: Základní Instrukce
P ed instalací si p e t te následující instrukce! Spole nost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standard . P ístroje musí být ádn nainstalovány, používány a udržovány tak, aby byl zajišt n jejich nep etržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující... - Seite 45 X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG June, 2016 ® Brooks Model SLA5840 Dansk Grundlæggende vejledninger Læs disse før anvendelse! Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så at de kan virke tilsvarende deres normale anvendelsesperiode. De følgende regler skal overholdes og implementeres under installeringen samt ved brug og reparation.
- Seite 46 Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken.
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Seite 47: Olulised Juhised
Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljudele riiklikele ja rahvusvahelistele standarditele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrumenti toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi. - Seite 48 Perusohjeet Lue ensin ohjeet huolellisesti! Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan. Brooks Instrumentin laitteiden asennuksessa, käytössä ja huollossa on noudatettava soveltuvia määräyksiä ja ohjeita, lisäksi mainitut ohjeet on huomioitava työsuojelun ohjeistuksessa.
- Seite 49 AVERTISSEMENT: n’utilisez pas cet instrument au-delà des spécifications énumérées dans le manuel d’utilisation. Le non-respect de cet avertissement peut entraîner de graves blessures et / ou endommager l’équipement. • Si vous ne comprenez pas l’une des instructions, prenez contact avec un représentant de Brooks Instrument pour obtenir des explications. •...
- Seite 50 Produkte mit einer Größe von 25 mm oder 1“ (inch) oder kleiner sind Sound Engineering Practice (SEP). Europäische Verordnung zur elektromagnetischen Verträglichkeit (EMV) Geräte von Brooks Instrument (elektrischer und elektronischer Art) mit CE-Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen Verträglichkeit (EMV Richtlinie 2004/108/EC) erfolgreich bestanden.
- Seite 51 Section A Essential Instructions Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG June, 2016 ® Brooks Model SLA5840 Greek Brooks Instrument Brooks Instrument. ’ Brooks Instrument. : (1) . (2) Brooks Instrument. (PED) 0,5 bar (g) 25 mm (PED). PED.
- Seite 52 üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál m ködési tartományuknak megfelel en üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során.
- Seite 53 Direttiva europea relativa alla compatibilità elettromagnetica (EMC) Le apparecchiature (elettriche/elettroniche) Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilità elettromagnetica (Direttiva EMC 2004/108/EC). In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE.
- Seite 54 Lai nodrošin tu šo izstr d jumu turpm ku darb bu atbilstoši noteiktajiem parametriem, tie ir pareizi j uzst da, j lieto un j apkopj. Uzst dot, lietojot „Brooks Instrument” izstr d jumus un veicot to apkopi, ir j iev ro šie nor d jumi un j iek auj tie j su droš bas programm .
- Seite 55 SP JIMAS: nenaudokite šio prietaiso viršydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis. Nesilaikydami šio sp jimo galite sunkiai susižeisti ir (arba) sugadinti rang . Jei nesuprantate koki nors nurodym , kreipkit s „Brooks Instrument“ atstov , kad paaiškint . Paisykite vis sp jim , persp jim ir nurodym , pažym t ant gaminio arba pateikt su juo.
- Seite 56 Produkty o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom „Uznanej Praktyki In ynierskiej” (SEP). Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej (EMC) Urz dzenia elektryczne / elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE, przesz y pozytywnie testy pod k tem spe niania przez nich wymogów kompatybilno ci elektromagnetycznej (Dyrektywa EMC 2004/108/EC).
- Seite 57 Ler antes de proceder! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de...
- Seite 58 În m sura în care indica iile c r ii ma inii nu sunt suficient de l muritoare, lua i leg tura cu reprezentantul Brooks Instrument pentru clarificarea problemei.
- Seite 59 Pre íta pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalova , prevádzkova a udržiava , na zabezpe enie ich spo ahlivej a normálnej prevádzky v celom pracovnom rozsahu.
- Seite 60 Pred servisom morate odstraniti tlak v obdelovalni liniji. e potrebujete rezervne dele, zagotovite, da usposobljeno osebje uporablja rezervne dele, ki jih je odobrila družba Brooks Instrument. Neodobreni deli in postopki lahko vplivajo na u inkovitost delovanja izdelka ali ogrozijo varno upravljanje postopka.
- Seite 61 ¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento.
- Seite 62 Läs detta innan du fortsätter! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls.
- Seite 63 Installation and Operation Manual X-PR-SLA5840-Series-RevB-RT-eng Part Number: 541B201AAG ® Brooks Model SLA5840 June, 2016 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Seite 64 +31 (0) 318 549 290 Asia +81 (0) 3 5633 7100 Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice. TRADEMARKS Brooks is a trademark of Brooks Instrument, LLC All other trademarks are the property of their respective owners.