Brooks Instrument SLA5840 Installations- Und Bedienungsanleitung Seite 37

Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016
Table 4-1 Conversion Factors (Nitrogen Base).
GAS NAME
Acetylene
Air
Allene
Ammonia
Argon
Arsine
Boron Trichloride
Boron Trifluoride
Bromine Pentafluoride
Bromine Trifluoride
Bromotrifluoroethylene
Bromotrifluoromethane f-13B1
1,3-Butadiene
Butane
1-Butene
CIS-2-Butene
Trans-2-Butene
Carbon Dioxide
Carbon Disulfide
Carbon Monoxide
Carbon Tetrachloride
Carbon Tetrafluoride f-14
Carbonyl Fluoride
Carbonyl Sulfide
Chlorine
Chlorine Dioxide
Chlorine Trifluoride
2-Chlorobutane
Chlorodifluoromethane f-22
Chloroform (Trichloromethane)
Chloropentafluoroethane f-115
Chlorotrifluoroethylene
Chlorotrifluoromethane f-13
Cyanogen
Cyanogen Chloride
Cyclobutane
Cyclopropane
Deuterium
Diborane
Diboromodifluoromethane f-12B2
1,2-Dibromotetrafluoroethane f-114B2
Dichlorodifluoromethane f-12
Dichlorofluoromethane f-21
Dichlorosilane
1,2-Dichloroethane
1,2-Dichlorotetrafluoroethane f-114
2,2 Dichloro
1,1-Difluoro-1-Chloroethane
1,1-Difluoroethane
1,1-Difluoroethylene
Diethylsilane
Difluoromethane f-32
Dimethylamine
Dimethylether
2,2-Dimethylpropane
Disilane
Ethane
Ethanol
Ethylacetylene
Ethyl Chloride
FORMULA SENSOR
FACTOR
C H 0.615
2 2
Mixture 0.998
C H 0.478
3 4
NH 0.786
3
Ar 1.395
AsH 0.754
3
BCL 0.443
3
BF 0.579
3
BrF 0.287
5
BrF 0.439
3
C BrF 0.326
2 3
CBrF 0.412
3
C H 0.354
4 6
C H 0.257
4 10
C H 0.294
4 8
C H 0.320
4 8
C H 0.291
4 8
CO 0.740
2
CS 0.638
2
CO 0.995
CCL 0.344
4
CF 0.440
4
COF 0.567
2
COS 0.680
CL 0.876
2
CLO 0.693
2
CLF 0.433
3
C H Cl 0.234
4 9
CHCLF 0.505
2
CHCL 0.442
3
C CLF 0.243
2 5
C CLF 0.337
2 3
CCLF 0.430
3
(CN) 0.498
2
CLCN 0.618
C H 0.387
4 8
C H 0.505
3 6
D 0.995
2
B H 0.448
2 6
CBr F 0.363
2 2
C Br F 0.215
2 2 4
CCL F 0.390
2 2
CHCL F 0.456
2
SiH CL 0.442
2 2
C H Cl 0.382
2 4 2
C CL F 0.231
2 2 4
C HC F 0.259
2 12 3
C H CLF 0.341
2 3 2
CH CHF 0.415
3 2
CH :CF 0.458
2 2
C H Si 0.183
4 12
CF H 0.627
2 2
(CH ) NH 0.370
3 2
(CH ) O 0.392
3 2
C(CH ) 0.247
3 4
Si H 0.332
2 6
C H 0.490
2 6
C H O 0.394
2 6
C H 0.365
4 6
C H CL 0.408
2 5
Section 4 Maintenance
& Troubleshooting
Brooks ® Model SLA5840
ORIFICE DENSITY (KG/m
FACTOR @0°C, 1 atm
0.970 1.173
1.018 1.293
1.199 1.787
0.781 0.771
1.195 1.784
1.661 3.478
2.044 5.227
1.569 3.025
2.502 7.806
2.214 6.108
2.397 7.165
2.303 6.615
1.413 2.491
1.467 2.593
1.435 2.503
1.435 2.503
1.435 2.503
1.255 1.977
1.650 3.393
1.000 1.250
2.345 6.860
1.770 3.926
1.555 2.045
1.463 2.180
1.598 3.214
1.554 3.011
1.812 4.125
1.818 4.134
1.770 3.906
2.066 5.340
2.397 7.165
2.044 5.208
1.985 4.912
1.366 2.322
1.480 2.730
1.413 2.491
1.224 1.877
0.379 0.177
1.000 1.235
2.652 8.768
2.905 10.53
2.099 5.492
1.985 4.912
1.897 4.506
1.879 4.419
2.449 7.479
2.336 6.829
1.957 4.776
1.536 2.940
1.512 2.860
1.775 3.940
1.360 2.411
1.269 2.013
1.281 2.055
1.613 3.244
1.493 2.779
1.038 1.357
1.282 2.057
1.384 2.388
1.516 2.879
3
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4-5