Brooks Instrument SLA5840 Installations- Und Bedienungsanleitung Seite 41

Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016
Table 4-2 Standard Restrictors.
Size
No Restrictor ( ALL BODY SIZES)
A
Restrictor size selected from the table below is based on sensor Nitrogen equivalent flow
Plug (Nitrogen equivalent flows of 8.022 SCCM or less)
Min. Flow
(SCCM Nitrogen equivalent flow at 0° C)
B
C Plug (Nitrogen flows <= 8.022 SCCM)
D
8.022
E
11.23
F
15.72
G
22.01
H
30.82
J
43.14
K
60.40
L
84.56
M
118.4
N 165.7
P
232.0
Q
324.8
R
454.8
S
636.7
T
891.4
U
1248
V
1747
W 2446
X
3424
Y
4794
1
6711
2
9369
3
13150
4
18420
NOTES:
Models SLA5850 / SLA5860
Max. Flow
-----
11.36
15.90
22.26
31.17
43.64
61.09
85.53
119.7
167.6
234.7
328.6
460.0
644.0
901.6
1262
1767
2474
3464
4849
6789
9504
13310
18630
30000
1) If two sizes are allowed because of overlap, select the smaller size.
2) If customer has requested a calibration based on a 21.1'C (70'F) reference
temperature, divide the air equivalent flow rate by 1.077 before using the sizing table.
Brooks
Part Number Part Number
Sintered ACLFE
618K019BMT
S110Z296BMA S110Z275BMT
S110Z297BMA S110Z276BMT
S110Z298BMA S110Z277BMT
S110Z299BMA S110Z278BMT
S110Z300BMA S110Z279BMT
S110Z301BMA S110Z280BMT
S110Z302BMA S110Z281BMT
S110Z303BMA S110Z282BMT
S110Z304BMA S110Z283BMT
S110Z305BMA S110Z284BMT
S110Z306BMA S110Z285BMT
S110Z307BMA S110Z286BMT
S110Z308BMA S110Z287BMT
S110Z309BMA S110Z288BMT
S110Z310BMA S110Z289BMT
S110Z311BMA S110Z290BMT
S110Z312BMA S110Z291BMT
S110Z313BMA S110Z292BMT
Section 4 Maintenance
& Troubleshooting
® Model SLA5840
Part Number
Wire Mesh
S110Z319BMA
S110Z321BMA
S110Z317BMA
S110Z228BMA
S110Z226BMA
S110Z224BMA
4-9