Inhaltsverzeichnis - Brooks Instrument Sla5840 Installations- Und Bedienungsanleitung
Pressure controller/flowmeter
Inhaltsverzeichnis
Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016
Paragraph
Number
1-1
Scope ......................................................................................................................................... 1-1
1-2
Purpose ...................................................................................................................................... 1-1
1-3
Description ................................................................................................................................. 1-1
1-4
Specifications ............................................................................................................................. 1-2
2-1
General ...................................................................................................................................... 2-1
2-2
Receipt of Equipment ................................................................................................................. 2-1
2-3
Recommended Storage Practice ............................................................................................... 2-1
2-4
Return Shipment ........................................................................................................................ 2-2
2-5
Removal from Storage ............................................................................................................... 2-2
2-6
Gas Connections ........................................................................................................................ 2-2
2-7
Installation .................................................................................................................................. 2-3
2-8
In-Line Filter ............................................................................................................................... 2-4
2-9
Electrical Interface ...................................................................................................................... 2-4
2-10
Operation Check Procedure ....................................................................................................... 2-7
3-1
Overview .................................................................................................................................... 3-1
3-2
Theory of Operation for RT ........................................................................................................ 3-1
3-3
Features ..................................................................................................................................... 3-2
3-4
Analog I/O Mode of Operation .................................................................................................... 3-4
3-5
Communications Features ......................................................................................................... 3-6
3-5-1 Analog/RS485 Communications Features ................................................................................. 3-6
3-5-2 Profibus Communications Features ........................................................................................... 3-6
3-5-3 DeviceNet Communications Features ........................................................................................ 3-7
4-1
Overview .................................................................................................................................... 4-1
4-2
Troubleshooting .......................................................................................................................... 4-1
4-3
Gas Conversion Factors ............................................................................................................ 4-4
4-4
Restrictor Sizing ......................................................................................................................... 4-8
Contents
Brooks
®
Model SLA5840
Page
Number
i
Inhaltsverzeichnis
