Inhaltsverzeichnis
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Instructions in the Text
59
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Stickers on the Product
60
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General Safety Information
62
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Limits of Use of the Product
67
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Foreseeable Improper Use
67
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Identifying the Product
70
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Transportation and Storage
71
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Connecting the High Vacuum Side
72
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Requirements for the Dimensioning of a Counter Flange
72
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Considering Earthquake Protection
73
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Using a Splinter Shield or Protective Screen
74
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Using the Vibration Compensator
74
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Attaching ISO-K Flange Onto ISO-K
75
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Attaching ISO-K Flange to ISO-F
75
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Attaching ISO-F Flange to ISO-F
77
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Attaching CF Flange to CF-F
78
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Connecting the Fore-Vacuum Side
80
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Connecting Accessories
81
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Connecting the Electrical Supply
81
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Earthing the Turbopump
82
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Establishing the Electric Connection
82
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Operation Without Operating Unit
85
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Operation Via Multi-Function Connection "X3
85
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Operation Via Pfeiffer Vacuum Display and Control Unit
85
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Operation Via Connection "E74
85
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Operation Via Field Bus
85
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Switching on the Turbopump
86
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Operating Mode Display Via LED
86
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Temperature Monitoring
87
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Switching off and Venting
87
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General Maintenance Information
89
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Maintenance Intervals and Responsibilities
89
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Removing the Operating Fluid Reservoir
89
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Removing Electronic Drive Unit
90
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Confirming the Speed Specification
91
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Shutting down for Longer Periods
92
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Recycling and Disposal
93
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General Disposal Information
93
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Service Solutions by Pfeiffer Vacuum
96
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Technical Data and Dimensions
101
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Substances in Contact with the Media
103
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EC Declaration of Conformity
105
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UK Declaration of Conformity
106
Turbopumpe
Inhaltsverzeichnis
Turbopumpe
Inhaltsverzeichnis
Luftkühlung
Inhaltsverzeichnis
Luftkuhlung
Inhaltsverzeichnis