6.1 Tägliche Wartung ................................................................................................................ 6-4
6.2 Ersatzteilliste ........................................................................................................................ 6-5
A.2.1 CPU-PCB ...................................................................................................................A-3
A.2.3 Ionenquellen-PCB ......................................................................................................A-5
A.2.6 Vorverstärker-PCB .....................................................................................................A-7
A.2.8 Diskretes I/O-PCB .....................................................................................................A-8
A.2.9 PROFINET I/O-Modul ................................................................................................A-8
B.4 Kalibrierungsleck ...............................................................................................................B-10
B.5 Turbo-Reglerkarte .............................................................................................................B-16
B.6 CPU-Karte .........................................................................................................................B-18
B.7 Ionenquellen-Platine ..........................................................................................................B-21
B.8 Hauptplatine ......................................................................................................................B-24
B.9 Diskrete I/O-Platine ...........................................................................................................B-27
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