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Technical Information; Description Of The Tps-Compact; Turbopump Description; Controller Description - Agilent Varian TPS-compact serie Bedienungshandbuch

Turbomolekularpumpen
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DESCRIPTION OF THE TPS-COMPACT

The TPS-compact pumping system consists of a
pump with an integrated controller and a forepump
and is available in sixteen models which differ in
the TPM size, high vacuum flange and voltage.
The models are:
P/N
TMP
Flange
969-8217
TV81M
KF40
969-8218
TV81M
CFF 2.75
969-8219
TV81M
ISO63
969-8220
TV81M
CFF 4.5
969-8221
TV301
ISO100
969-8222
TV301
CFF6
969-8223
TV301
ISO160
969-8224
TV301
CFF8
P/N
TMP
Flange
969-8225
TV81M
KF40
969-8226
TV81M
CFF 2.75
969-8227
TV81M
ISO63
969-8228
TV81M
CFF 4.5
969-8229
TV301
ISO100
969-8230
TV301
CFF6
969-8231
TV301
ISO160
969-8232
TV301
CFF8

Turbopump Description

The turbopump consists of a high frequency motor
driving a turbine fitted with many bladed stages
and Macrotorr stages. The turbine rotates in an
anticlockwise direction when viewed from the high
vacuum flange end.
The turbine is made of high-strength, light alumin-
ium alloy, and is machined from a single block of
aluminium. The turbine blades have five different
angles, from 44° to 12°, while the Macrotorr stages
are in the form of discs.
The turbine rotor is supported by permanently lu-
bricated high precision ceramic ball bearings in-
stalled on the forevacuum side of the pump.
The static blades of the stator are fabricated in
stainless steel. These are supported and accu-
rately positioned by spacer rings.
The Macrotorr stators are in the form of self-
positioning machined discs with pumping channels
and an opening restricted by the corresponding
Foreline
Voltage
3
3.6 m
/h Scroll
110V 60Hz
3
3.6 m
/h Scroll
110V 60Hz
3
3.6 m
/h Scroll
110V 60Hz
3
3.6 m
/h Scroll
110V 60Hz
3
3.6 m
/h Scroll
110V 60Hz
3
3.6 m
/h Scroll
110V 60Hz
3
3.6 m
/h Scroll
110V 60Hz
3
3.6 m
/h Scroll
110V 60Hz
Foreline
Voltage
3
3.0m
/h Scroll
220V 50-60Hz
3
3.0m
/h Scroll
220V 50-60Hz
3
3.0m
/h Scroll
220V 50-60Hz
3
3.0m
/h Scroll
220V 50-60Hz
3
3.0m
/h Scroll
220V 50-60Hz
3
3.0m
/h Scroll
220V 50-60Hz
3
3.0m
/h Scroll
220V 50-60Hz
3
3.0m
/h Scroll
220V 50-60Hz
rotor discs. These are fabricated in aluminium al-
loy.
During normal operation, the motor functions with
a power feed at 54 Vac three-phase at 1330 Hz
(TV81M) or 963 Hz (TV301). To reduce losses
during start-up to a minimum, the frequency in-
creases according to a ramp with a higher initial
voltage/frequency ratio.
A thermistor sensor is mounted near the upper
bearing to prevent the pump from overheating.
The pump is balanced after assembly with a resid-
ual vibration amplitude less than 0.01 µm.

Controller Description

The integrated controller is a solid-state frequency
converter which is driven by a single chip micro-
computer and is composed of a PCB which in-
cludes a power supply with a 3-phase AC output,
analog and input/output section, microprocessor
and digital section. The controller recognizes the
mains presence and converts the single phase AC
mains supply into a 3-phase, medium frequency
output which is required to power the pump.
The controller can be operated by a remote host
computer via the serial connection.

Control Panel Description

The following picture shows the TPS-compact con-
trol panel; the associated table lists the available
commands. For a detailed description see the fol-
lowing paragraphs.
CONTROL NAME
J5 IN-OUT
J6 SERIAL
STATUS
P3 VENT
GAUGE
ON-OFF switch
(not shown in the
picture)
56/74

TECHNICAL INFORMATION

DESCRIPTION
Input-output connector to remote control
the TPS-compact
Serial input-output connector to control
the TPS-compact via an RS 232 or RS
485 connection
Blue LED to show the system operating
condition
Connector to control the optional vent
valve
Connector to control external EyeSys
Gauge
It is located on the rear side of the sys-
tem. It is the power supply switch.
87-901-010-01

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