Product Support References; Warning, Caution And Notice Statements; Product Warranty; Glossary Of Terms And Acronyms - Brooks Instrument Vdm300 Installations- Und Bedienungsanleitung

Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018

1-3 Product Support References

1-4 Warning, Caution and Notice Statements

1-5 Product Warranty

1-6 Glossary of Terms and Acronyms

1-2
Brooks
Refer to www.BrooksInstrument.com for Brooks sales and service locations
and to obtain other documents that support the VDM300 Series.
Those documents include:
• Brooks VDM300 data sheet (DS-VAP-VDM300-eng)
• Supplemental Manual for Brooks
Series (X-DPT-EtherCAT-VDM300-eng; part number: 541B217AAG)
• Supplemental Manual for Brooks Instrument Expert Support Tool
(X-SW-BEST-eng; part number 541B197AAG)
Warning, caution and notice statements are located throughout this manual
in ANSI format.
A WARNING statement indicates a potentially hazardous situation which, if
not avoided, COULD result in death or serious injury.
A CAUTION statement indicates a potentially hazardous situation which, if
not avoided, MAY result in minor or moderate injury. It may also be used to
alert against unsafe practices.
A NOTICE statement describes specific information that requires special at-
tention.
Product warranty information can be found on the back cover of this
manual and on the Brooks website at www.BrooksInstrument.com. This
information provides general warranty information, limitations, disclaimers,
and applicable warranty periods according to product group.
(Refer to Table 1-1)
Table 1-1 Terms and Acronyms
Term/ Acronym Definition
BEST Brooks Expert Support Tool (GUI)
COO Cost of Ownership
DIW Deionized Water
DSP Digital Signal Processor
EtherCAT Ethernet for Control Automation Technology is an open high
performance Ethernet-based fieldbus system
F.S. Full scale
GUI Graphical user interface (refer to BEST)
IEC International Electrotechnical Commission
LA Link Active
LED Light-emitting diode
MFC Mass flow controller
PID Proportional Integral Derivative
PDC Product description code
PSID Pounds per square inch differential
PSIG Pounds per square inch gauge
RH Relative humidity
RJ-45 Standard type of connector for network cables featuring eight
pins to which the wire strands of a cable interface electrically
SDS Safety data sheet
S.P. Setpoint
VDM300 Vapor Delivery Module
®
Instrument EtherCAT for VDM300
®