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Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
August, 2012
®
Brooks
GF40/GF80 Series
TM
MultiFlo
Flow Devices
®
Brooks
Capable Digital Thermal Mass
GF40/GF80 Series available with RS485, DeviceNet
®
Brooks
GF40/GF80 Series
TM
®
®
, Profibus
or EtherCAT
I/O
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Verwandte Anleitungen für Brooks Instrument GF40 Serie
Inhaltszusammenfassung für Brooks Instrument GF40 Serie
- Seite 1 Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 ® Brooks GF40/GF80 Series MultiFlo Capable Digital Thermal Mass Flow Devices ® ® ® Brooks GF40/GF80 Series available with RS485, DeviceNet , Profibus or EtherCAT...
- Seite 2 Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012...
- Seite 3 We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
- Seite 4 Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Seite 5 Contents Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 Paragraph Page Number Number Section 1 General Information Introduction ............................ 1-1 How to Use This Manual ........................ 1-1 Product Support References ......................1-2 Notice and Caution Statements ..................... 1-2 Product Warranty ..........................
- Seite 6 Contents Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® August, 2012 Brooks GF40/GF80 Series Appendix A: GF40/GF80 Series Gas Table .....................A-1 Appendix B: GF40/GF80 Series Patents ....................B-1 Appendix C: Essential Instructions ....................... C-1 Warranty, Local Sales/Service Contact Information ............... Back Cover Figure Figure Number...
- Seite 7 Contents Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 Table Table Number Number Industry Standard References ....................... 1-3 Terms and Acronyms ........................1-4 Specifications for Standard GF40/GF80 Series ................1-8 Specifications for High Accuracy (HA) GF40/GF80 Series ............1-10 Specifications for Safe Delivery System (SDS) GF40/GF80 Series ..........
- Seite 8 Contents Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® August, 2012 Brooks GF40/GF80 Series THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Seite 9 Section 1 Introduction Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 1-1 Introduction Based upon Brooks award-winning GF100 Series, the GF40/80 Series is a performance/value MFC platform designed for OEM applications, delivering the following class leading features: •...
- Seite 10 Section 1 Introduction Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 1-3 Product Support References Refer to www.BrooksInstrument.com for Brooks sales and service locations and to obtain other documents that support the GF40/GF80 Series. Those documents include: •...
- Seite 11 Section 1 Introduction Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 1-8 GF40/GF80 Series Gas Table Refer to Appendix A. 1-9 Glossary of Terms and Acronyms Refer to Table 1-2 Table 1-1 Industry Standard References Reference Number Reference Description MIL-STD-810...
- Seite 12 Section 1 Introduction Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 Table 1-2 Terms and Acronyms Term or Acronym Definition Customer Special Requirement. Chemical Vapor Deposition. Digital Signal Processor. EPI Epitaxy (EPI). A process technology where a pure silicon crystalline structure is deposited or “grown”...
- Seite 13 Section 1 Introduction Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 1-10 Description Control The GF40/GF80 Series brings together Brooks high-performance, patented ultra-fast T-rise flow sensor, high-speed ARM based digital architecture, and a fast-acting diaphragm-free solenoid valve to deliver: •...
- Seite 14 Power Supply MFC A332297002 Cable, Power, 9-Pin A332297001 Cable, Power, DeviceNet * MultiFlo Configurator Software is available on the Brooks Instrument website at: www.BrooksInstrument.com/MultiFlo www.BrooksInstrument.com/Documentation&Downloads Advanced Thermal Measurement Sensor Brooks high-performance thermal flow sensor brings together key design elements to deliver the accurate, repeatable measurement under challenging process conditions: •...
- Seite 15 128 devices for Profibus and 32 devices for RS485 to be connected on the same network. Brooks Instruments' DeviceNet profile has been certified by the ODVA (Open DeviceNet Vendor's Association). Brooks Instrument Profibus interface has been certified by the PNO (Profibus User Organization). 1-11 Specifications for GF40/GF80 Series Devices See Table 1-3 for specifications for the GF40/GF80 Series.
- Seite 16 Section 1 Introduction Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 Table 1-3 Specifications for Standard GF40/GF80 Series GF40 GF40 GF40 GF40 GF40 GF80 GF80 GF80 GF80 GF80 P P P P P erformance erformance erformance erformance...
- Seite 17 Section 1 Introduction Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 Table 1-3 Specifications for Standard GF40/GF80 Series (continued) GF40 GF40 GF40 GF40 GF40 GF80 GF80 GF80 GF80 GF80 Electrical Electrical Electrical Electrical Electrical Diagnostic / Service P Diagnostic / Service P Diagnostic / Service P...
- Seite 18 Section 1 Introduction Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 Figure 1-2 Dimensions - GF40 Series 1-10...
- Seite 19 Section 1 Introduction Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 Figure 1-3 Dimensions - GF80 Series 1-11...
- Seite 20 Section 1 Introduction Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 THIS PAGE WAS INTENTIONALLY LEFT BLANK 1-12...
- Seite 21 Korea Europe, Middle East, Africa: Tel +82 31 708 2522 Brooks Instrument B.V. Neonstraat 3, P.O. Box 428 Brooks Instrument (Shanghai) Co. LTD 6710 BX Ede RM 203, Bldg 6 Netherlands NO 1888 Xin Jin Qiao Rd Tel +31 (0) 318 549292 or Jinqiao E.P.Z.
- Seite 22 All flow devices returned to Brooks require completion of Form RPR003-2, Brooks Instrument Decontamination Statement, along with a Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. Failure to provide this information will delay processing by Brooks personnel.
- Seite 23 Section 2 Installation Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 a pneumatic pressure test in accordance with applicable vessel codes. To maintain a device's clean integrity, this service should be performed by the factory or one of the certified service centers.
- Seite 24 Section 2 Installation Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG Brooks ® GF40/GF80 Series August, 2012 2-10 Flow Controller Installation Arrangement Typical gas supply arrangements are shown in Figure 2-1. GF40s/GF80s are often arranged inside a gas panel. Configure standard configurations ("SAs") or "blanks"...
- Seite 25 Section 2 Installation Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 2-11 Purge the Gas Supply Line Before GF40/GF80 Series Installation For additional safety, it is recommended to close the two valves between the charged gas line and the GF40/GF80 Series to be installed.
- Seite 26 Section 2 Installation Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG Brooks ® GF40/GF80 Series August, 2012 2-12 Position and Mount the GF40/GF80 Series It is recommended that the MFC is re-zeroed with process gas following the recommended Brooks procedure (see zeroing bulletin FSB-001-0015 for futher information).
- Seite 27 Section 2 Installation Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 Figure 2-2 GF40/GF80 Series Mounted to K1 Series Substrate Blocks Table 2-1 K1 Substrate Torque Data Connection Torque Pattern Torque (Inch-Pounds) GF40/GF80 to Use a square pattern as K1R2 Subtstrate...
- Seite 28 Section 2 Installation Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG Brooks ® GF40/GF80 Series August, 2012 2-13 Perform a Leak Test It is critical to leak test the gas supply lines and GF40/GF80 Series connections before turning on the process gas supply after any new installation.
- Seite 29 Section 2 Installation Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 6. Close the GF40/GF80 Series and wait two minutes. 7. Read the output signal of the GF40/GF80 Series. This output signal is the initial flow in percent of full scale. The output signal should be 0.0 (±...
- Seite 30 Section 2 Installation Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG Brooks ® GF40/GF80 Series August, 2012 2-17 Using the MultiFlo Configurator The MutliFlo Configurator application is used to configure the gas and range of the GF40/GF80 Series devices. The MultiFlo Configurator application allows communication to GF40/GF80 Series devices through personal computer with serial COM Port and a Windows XP or Windows 7 operating system.
- Seite 31 Connect the RS-232 end of the converter to the Serial Port of a laptop or PC. The latest MutliFlo Configurator Software and Databases and MultiFlo Configurator Quick Start Guide are available on the Brooks Instrument website at: www.BrooksInstrument.com/MultiFlo. Please reference the MultiFlo Configurator Quick Start Guide for installation and operation details.
- Seite 32 Section 2 Installation Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG Brooks ® GF40/GF80 Series August, 2012 Diagnostic Port Figure 2-7 Diagnostic Port 2-19 Electrical Connections 2-19-1 DeviceNet Connections DeviceNet is a 5 wire local network connection that employs a command response communication protocol for communicating between a master and slave.
- Seite 33 Section 2 Installation Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 2-19-2 Analog/RS485 Connections The GF40/GF80 Series devices are available with the Analog/RS485 15-Pin D-Connector shown in Figure 2-9. Analog/RS485 15-Pin Connector Figure 2-9 GF40/GF80 Series with 15-Pin Analog Connector and Pin-Outs 2-13...
- Seite 34 Section 2 Installation Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG Brooks ® GF40/GF80 Series August, 2012 2-19-3 Profibus Connections The GF40/GF80 Series devices are available with the Profibus connections as shown in Figure 2-10. Profibus Connectors Figure 2-10 GF40/GF80 Series Profibus Connections and Pin-Outs 2-19-4 EtherCAT Connections The GF40/GF80 Series devices are available with the EtherCAT connections as shown in Figure 2-11.
- Seite 35 Section 3 Operation Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 3-1 General After the device has been properly installed in the process, it is ready for operation. When initiating flow, slowly open any upstream shutoff valve to avoid a flow surge.
- Seite 36 Section 3 Operation Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG Brooks ® GF40/GF80 Series August, 2012 Figure 3-1 GF40/GF80 Series Operating Principles...
- Seite 37 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 4-1 Overview No routine maintenance is required on the Brooks GF40/GF80 Series devices. If an in-line filter is used, the filtering elements should be periodically replaced or cleaned.
- Seite 38 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG Brooks ® GF40/GF80 Series August, 2012 4-3 Troubleshooting This section includes a Troubleshooting Checklist and a GF40/GF80 Series Troubleshooting Guide that identifies symptoms, possible causes, and corrective actions. NOTICE OEM tool problems are often caused by something other than the GF40/GF80 Series.
- Seite 39 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 4-4 Troubleshooting Checklist 1. Check environmental factors that could affect changes to GF40/GF80 Series performance. The most common environmental factors are listed in Table 4-1.
- Seite 40 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG Brooks ® GF40/GF80 Series August, 2012 4-5 GF40/GF80 Series Troubleshooting Guide Table 4-2 GF40/GF80 Series Troubleshooting Guide Symptoms & Possible Causes Corrective Action 1. No gas flow. Is the gas supply turned on? Check shut-off valve and pressure readout.
- Seite 41 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 Table 4-2 GF40/GF80 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 2. Flow out of range (Continuted). Is the device zero correct? Zero the device according to zeroing procedure in Section 2-16.
- Seite 42 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG Brooks ® GF40/GF80 Series August, 2012 Table 4-2 GF40/GF80 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 5. No gas flow below some setpoint. NOTE: When the setpoint is decreased below this point, the GF40/GF80 Series signal remains at...
- Seite 43 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 Table 4-2 GF40/GF80 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 7. OEM tool does not read correct GF40/GF80 Series zero reading.
- Seite 44 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG Brooks ® GF40/GF80 Series August, 2012 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Seite 45 Section 5 Product Description Code Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 5 Product Description Code Table 5-1 GF40/GF80 Series Product Description Code Table Code Description Code Description Code Option Code Option Option Description Option Description Code Description Code Description...
- Seite 46 Section 5 Product Description Code Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG Brooks ® GF40/GF80 Series August, 2012 Table 5-1 GF40/GF80 Series Product Description Code Table (Continued) Code Description Code Description Code Option Code Option Option Description Option Description Code Description Code Description Code Description...
- Seite 47 Appendix A: GF40/GF80 Series Gas Table Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 A GF40/GF80 Series Gas Table Table A-1 GF40/GF80 Series Gas Table - Codes 1-99, Bins SA40 to SA43 Min inlet pressure for vac. Min inlet pressure for atm.
- Seite 48 Appendix A: GF40/GF80 Series Gas Table Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG Brooks ® GF40/GF80 Series August, 2012 Table A-2 GF40/GF80 Series Gas Table - Codes 108-5022, Bins SA40 to SA43 Min inlet pressure for Min inlet pressure for vac.
- Seite 49 Appendix A: GF40/GF80 Series Gas Table Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 Table A-3 GF40/GF80 Series Gas Table - Codes 1-99, Bins SA44 to SA50 SA44 SA45 SA46 SA47 SA48 SA50 Gas Symbol Code Gas Name Elastomer seal GF040...
- Seite 50 Appendix A: GF40/GF80 Series Gas Table Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG Brooks ® GF40/GF80 Series August, 2012 Table A-4 GF40/GF80 Series Gas Table - Codes 108-5022, Bins SA44 to SA50 SA44 SA45 SA46 SA47 SA48 SA50 Gas Symbol Code Gas Name Elastomer seal GF040...
- Seite 51 Appendix B: GF40/GF80 Series Patents Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 B GF40/GF80 Series Patents The GF40/GF80 Series may be protected by the following US patents and their international filings. Table B-1 GF40/GF80 Series Patents Patent/Pub.
- Seite 52 Appendix B: GF40/GF80 Series Patents Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG Brooks ® GF40/GF80 Series August, 2012 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Seite 53 Section C Essential Instructions Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG August, 2012 ® Brooks GF40/GF80 Series Bulgarian Brooks Instrument Brooks Instrument. Brooks Instrument : (1) . (2) Brooks Instrument (PED) 0,5 bar (g) 25 mm 1" ( (PED).
- Seite 54 P ed instalací si p e t te následující instrukce! Spole nost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standard . P ístroje musí být ádn nainstalovány, používány a udržovány tak, aby byl zajišt n jejich nep etržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující...
- Seite 55 Section C Essential Instructions Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG August, 2012 ® Brooks GF40/GF80 Series Dansk Grundlæggende vejledninger Læs disse før anvendelse! Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så...
- Seite 56 Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken. De volgende instructies moeten worden toegevoegd aan en geïntegreerd in uw veiligheidsprogramma als u producten van Brooks Instrument installeert, bedient en onderhoudt.
- Seite 57 Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljude erinevate riiklike ja rahvusvaheliste standardite nõuetele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrument'i toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi.
- Seite 58 Perusohjeet Lue ensin ohjeet huolellisesti! Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan. Brooks Instrumentin laitteiden asennuksessa, käytössä ja huollossa on noudatettava soveltuvia määräyksiä ja ohjeita, lisäksi mainitut ohjeet on huomioitava työsuojelun ohjeistuksessa.
- Seite 59 Brooks Instrument et que des personnes qualifiées effectuent le remplacement. Les pièces et procédures non autorisées peuvent porter atteinte au fonctionnement du produit et mettre en péril la sécurité de votre procédé. Les remplacements par des pièces d’apparence similaire peuvent entraîner des incendies, des risques électriques ou un mauvais fonctionnement.
- Seite 60 Bitte zuerst lesen! Brooks Instrument entwickelt, produziert und testet seine Produkte derart, dass sie viele nationale und internationale Standards erfüllen. Nur bei korrektem Einbau sowie richtiger Bedienung und Wartung dieser Produkte ist ein Betrieb unter Einhaltung der Standardvorgaben sichergestellt. Die folgenden Anweisungen müssen eingehalten werden und in Ihr Sicherheitsprogramm integriert werden, wenn Sie Brooks Produkte installieren, bedienen und warten.
- Seite 61 Section C Essential Instructions Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG August, 2012 ® Brooks GF40/GF80 Series Greek Brooks Instrument Brooks Instrument. ’ Brooks Instrument. : (1) . (2) Brooks Instrument. (PED) 0,5 bar (g) 25 mm (PED). PED.
- Seite 62 üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál m ködési tartományuknak megfelel en üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során.
- Seite 63 Leggerle subito! La Brooks Instrument progetta, fabbrica e collauda i propri prodotti in maniera tale che siano conformi ai vari standard nazionali ed internazionali. Tali apparecchiature devono essere installate, messe in esercizio e tenute in manutenzione in maniera adeguata affinché operino in conformità alle loro normali specifiche di funzionamento.
- Seite 64 P rliecinieties par to, lai pirms instrumenta tehnisk s apkopes b tu likvid ts procesa l nijas spiediens. Ja ir nepieciešams veikt k du da u nomai u, nodrošiniet, lai tiktu izmantotas „Brooks Instrument” nor d t s da as un da u nomai u veiktu kvalific ts person ls. Neat autu da u un proced ru izmantošana var ietekm s ražojuma sniegumu un samazin t procesa droš...
- Seite 65 25 mm arba 1 colio ar mažesni matuokliai atitinka tinkam inžinerijos praktik (SEP). Europoje taikomi elektromagnetinio suderinamumo (EMC) reikalavimai CE ženklu pažym ta „Brooks Instrument“ (elektrin / elektronin ) ranga buvo s kmingai išbandyta pagal elektromagnetinio suderinamumo reikalavimus (EMC direktyv 2004/108/EC).
- Seite 66 Urz dzenia pomiarowe o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom „Uznanej Praktyki In ynierskiej” (SEP). Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej (EMC) Urz dzenia elektryczne / elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE, przesz y pozytywnie testy pod k tem spe niania przez nich wymogów kompatybilno ci elektromagnetycznej (Dyrektywa EMC 2004/108/EC).
- Seite 67 Ler antes de proceder! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de...
- Seite 68 În m sura în care indica iile c r ii ma inii nu sunt suficient de l muritoare, lua i leg tura cu reprezentantul Brooks Instrument pentru clarificarea problemei.
- Seite 69 Pre íta pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalova , prevádzkova a udržiava , na zabezpe enie ich spo ahlivej a normálnej prevádzky v celom pracovnom rozsahu.
- Seite 70 Najprej preberite jih Brooks Instrument tako konstruira, izdeluje in terstira svoje izdelke, da oni ustrezajo številnim doma im in mednarodnim standardom. Te naprave se morajo ustrezno instalirati, koristiti in vzdrževati, da vsekakor delajo ustrezno normalnom podro ju funkcioniranja. Naslednjih navodil se mora držati in potrebno je vgraditi v program varstva pri delu pri instaliranju, koriš...
- Seite 71 ¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento.
- Seite 72 Läs detta innan du fortsätter ! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls.
- Seite 73 Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG ® Brooks GF40/GF80 Series August, 2012 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Seite 74 Japan +81 3 5633 7100 Singapore +6297 9741 Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice. TRADEMARKS Brooks ............Brooks Instrument, LLC DeviceNet ...... Open DeviceNet Vendors Association, Inc.