Brooks Instrument VDM300 Installations- Und Bedienungsanleitung Seite 35

Brooks VDM300 Vapor Delivery Module
®
Table 4-2 List of Possible Alarm Codes Detected by the VDM300 (continued)
Installation and Operation Manual
Part Number: 541B210AAG
2. Input voltage is
incorrect.
5. The thermal cuto
on the heater circuit is
open due to over
temperature condition.
5. Return unit to
Brooks Instrument
for repair.
X-VAP-VDM300-eng
October, 2018
4-6