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Installation and Operation Manual
X-PR-PC100-Series-PC-eng
Part Number: 541B207AAG
May, 2017
PC100 Series
Ultra-High Purity Digital Pressure Control Devices
PC115 Pressure Controller, Model PC125 Pressure Controller with Flow Meter
All manuals and user guides at all-guides.com
PC100 Series

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Inhaltszusammenfassung für Brooks Instrument PC100 Serie

  • Seite 1 All manuals and user guides at all-guides.com Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 PC100 Series Ultra-High Purity Digital Pressure Control Devices PC115 Pressure Controller, Model PC125 Pressure Controller with Flow Meter...
  • Seite 2 Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
  • Seite 3 We appreciate this opportunity to service your pressure control and flow measurement requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of pressure control and flow measurement products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
  • Seite 4 All manuals and user guides at all-guides.com Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
  • Seite 5: Inhaltsverzeichnis

    All manuals and user guides at all-guides.com Contents Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Paragraph Page Number Number Section 1 General Information Introduction ........................... 1-1 How to Use This Manual ....................... 1-1 Product Support References ......................1-2 Notice and Caution Statements .....................
  • Seite 6 All manuals and user guides at all-guides.com Contents Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Figure Page Number Number PC100 Series Digital Pressure Controller ..................1-1 LCD Display ..........................1-6 Dimensions - PC100 Series ......................1-8 Typical PC100 Series Configurations ....................
  • Seite 7: Section 1 General Information

    PC100 Series May, 2017 1-1 Introduction Brooks Instrument's PC100 Series pressure control and flow measurement devices deliver outstanding performance, reliability, and system simplicity. Built on the proven, advanced technology of the GF100 Series mass flow controllers, process throughput and yield are maximized while process costs are reduced.
  • Seite 8: Product Support References

    All manuals and user guides at all-guides.com Section 1 General Information Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 1-3 Product Support References Refer to www.BrooksInstrument.com for Brooks sales and service locations and to obtain other documents that support the PC100 Series. Those documents include: Brooks DeviceNet Supplemental manual for PC100 Series: X-DPT-DeviceNet-PC100-PC-eng:...
  • Seite 9 All manuals and user guides at all-guides.com Section 1 General Information Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Table 1-1 Industry Standard References Reference Number Reference Description MIL-STD-810 Method 514.4, Category 1, Transportation Requirement Method 516.4, Procedure 1, Functional Shock Test Requirement SEMI E12 Standard temperature and pressure SEMI E16...
  • Seite 10 All manuals and user guides at all-guides.com Section 1 General Information Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Table 1-2 Terms and Acronyms Term or Acronym Definition Customer Special Requirement Chemical Vapor Deposition DeviceNet A 5-wire local network I/O communication device that employs a command/response communication protocol Digital Signal Processor...
  • Seite 11: Description

    All manuals and user guides at all-guides.com Section 1 General Information Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 1-9 Description The Brooks PC100 Series digital pressure control with patented flow sensor combined with a high speed ARM processor and fast acting diaphragm-free valve assembly enables: •...
  • Seite 12: Specifications For Pc100 Series Devices

    The PC100 Series supports DeviceNet™ communication protocol. DeviceNet is a multi-drop connection that allows a maximum of 64 devices to be connected on the same network. Brooks Instrument’s DeviceNet profile has been certified by the ODVA™ (Open DeviceNet Vendor’s Association).
  • Seite 13 All manuals and user guides at all-guides.com Section 1 General Information Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Table 1-3 Specifications - PC100 Series Performance Performance Performance Performance Performance PC115 PC115 PC115 PC115 PC115 PC125 PC125 PC125 PC125...
  • Seite 14 All manuals and user guides at all-guides.com Section 1 General Information Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 PC100 Series - VCR ® Configuration Figure 1-3 Dimensions - PC100 Series...
  • Seite 15: Section 2 Installation

    If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to the nearest Brooks Instrument location listed on the Global Service Network page on our website: BrooksInstrument.com/GlobalSupportCenters...
  • Seite 16: Transit Precautions

    All manuals and user guides at all-guides.com Section 2 Installation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 2-5 Transit Precautions To safeguard against damage during transit, transport the device to the installation site in the same container used for transportation from the factory, if circumstances permit.
  • Seite 17: Mechanical Installation

    All manuals and user guides at all-guides.com Section 2 Installation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 2-9 Mechanical Installation The recommended installation procedure guidelines are as follows: • The device should be located in a clean, dry atmosphere relatively free from shock and vibration.
  • Seite 18: Purge The Gas Supply Line Before Pc100 Series Installation

    All manuals and user guides at all-guides.com Section 2 Installation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 2-11 Purge the Gas Supply Line Before PC100 Series Installation Before operating the PC100 Series, the gas supply line must be completely purged with nitrogen or argon to ensure the line is free from toxic or flammable gases, contaminants, moisture, and oxygen.
  • Seite 19: Position And Mount The Pc100 Series

    All manuals and user guides at all-guides.com Section 2 Installation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 2-12 Position and Mount the PC100 Series Position the PC100 Series so that the gas flow is pointed in the direction of the flow arrow on the PC100 Series rear S/N label.
  • Seite 20: Perform A Leak Test

    All manuals and user guides at all-guides.com Section 2 Installation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 2-13 Perform a Leak Test It is critical to leak test the gas supply lines and PC100 Series connections before turning on the process gas supply after any new installation.
  • Seite 21 All manuals and user guides at all-guides.com Section 2 Installation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Figure 2-4 Display with PSI Reading Figure 2-5 Display Reading Zero PSI 2. Looking at the top of the PC100 Series, press the "Display" button, starting at the MACID, four times to "PSI", five times to "kPa"...
  • Seite 22: Zeroing Pc125 Series Flow From Lcd Display Panel

    All manuals and user guides at all-guides.com Section 2 Installation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 2-14-2 Zeroing PC125 Series Flow from LCD Display Panel 1. Place the PC125 Series under normal inlet operating pressure. Close the down stream valve to prevent any flow.
  • Seite 23: Performance Checks

    All manuals and user guides at all-guides.com Section 2 Installation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 2-15 Performance Checks This section describes how to zero and sequence the PC100 Series devices for proper operation. •...
  • Seite 24: Electrical Connections

    All manuals and user guides at all-guides.com Section 2 Installation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 2-16 Electrical Connections 2-16-1 DeviceNet Connections DeviceNet is a 5 wire local network connection that employs a command response communication protocol for communicating between a master and slave.
  • Seite 25: Section 3 Operation

    All manuals and user guides at all-guides.com Section 3 Operation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 3-1 General After the device has been properly installed in the process, it is ready for operation. When initiating flow, slowly open any upstream shutoff valve to avoid a flow surge.
  • Seite 26 All manuals and user guides at all-guides.com Section 3 Operation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
  • Seite 27: Section 4 Maintenance & Troubleshooting

    All manuals and user guides at all-guides.com Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 4-1 Overview No routine maintenance is required on the Brooks PC100 Series devices. If an in-line filter is used, the filtering elements should be periodically replaced or cleaned.
  • Seite 28 All manuals and user guides at all-guides.com Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017...
  • Seite 29: Troubleshooting

    All manuals and user guides at all-guides.com Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 4-3 Troubleshooting This section includes a Troubleshooting Checklist and a PC100 Series Troubleshooting Guide that identifies symptoms, possible causes, and corrective actions.
  • Seite 30 All manuals and user guides at all-guides.com Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 4-5 PC100 Series Troubleshooting Guide Table 4-1 PC100 Series Troubleshooting Guide Symptoms & Possible Causes Corrective Action 1.
  • Seite 31 All manuals and user guides at all-guides.com Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Table 4-2 PC100 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 4. No pressure control above some setpoint. NOTE: When the setpoint is increased beyond this point, the PC100 Series pressure signal remains at...
  • Seite 32 All manuals and user guides at all-guides.com Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Table 4-2 PC100 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 8. OEM tool does not read correct PC100 Series pressure or flow meter zero reading.
  • Seite 33 All manuals and user guides at all-guides.com Section 5 Product Description Code Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Table 5-1 PC100 Series Product Description Code Table Code Description Code Description Code Option Code Option Option Description Option Description Code Description...
  • Seite 34 All manuals and user guides at all-guides.com Section 5 Product Description Code Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
  • Seite 35 All manuals and user guides at all-guides.com Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Bulgarian Brooks Instrument Brooks Instrument. Brooks Instrument : (1) . (2) Brooks Instrument (PED) 0,5 bar (g) 25 mm 1" (inch), (PED).
  • Seite 36: Základní Instrukce

    P ed instalací si p e t te následující instrukce! Spole nost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standard . P ístroje musí být ádn nainstalovány, používány a udržovány tak, aby byl zajišt n jejich nep etržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující...
  • Seite 37 All manuals and user guides at all-guides.com Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Dansk Grundlæggende vejledninger Læs disse før anvendelse! Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så...
  • Seite 38 Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken.
  • Seite 39: Olulised Juhised

    Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljudele riiklikele ja rahvusvahelistele standarditele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrumenti toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi.
  • Seite 40 Perusohjeet Lue ensin ohjeet huolellisesti! Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan. Brooks Instrumentin laitteiden asennuksessa, käytössä ja huollossa on noudatettava soveltuvia määräyksiä ja ohjeita, lisäksi mainitut ohjeet on huomioitava työsuojelun ohjeistuksessa.
  • Seite 41 AVERTISSEMENT: n’utilisez pas cet instrument au-delà des spécifications énumérées dans le manuel d’utilisation. Le non-respect de cet avertissement peut entraîner de graves blessures et / ou endommager l’équipement. • Si vous ne comprenez pas l’une des instructions, prenez contact avec un représentant de Brooks Instrument pour obtenir des explications. •...
  • Seite 42 Produkte mit einer Größe von 25 mm oder 1“ (inch) oder kleiner sind Sound Engineering Practice (SEP). Europäische Verordnung zur elektromagnetischen Verträglichkeit (EMV) Geräte von Brooks Instrument (elektrischer und elektronischer Art) mit CE-Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen Verträglichkeit (EMV Richtlinie 2014/30/EU) erfolgreich bestanden.
  • Seite 43 All manuals and user guides at all-guides.com Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Greek Brooks Instrument Brooks Instrument. ’ Brooks Instrument. : (1) . (2) Brooks Instrument. (PED) 0,5 bar (g) 25 mm (PED).
  • Seite 44 üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál m ködési tartományuknak megfelel en üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során.
  • Seite 45 Direttiva europea relativa alla compatibilità elettromagnetica (EMC) Le apparecchiature (elettriche/elettroniche) Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilità elettromagnetica (Direttiva EMC 2014/30/EU). In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE.
  • Seite 46 Lai nodrošin tu šo izstr d jumu turpm ku darb bu atbilstoši noteiktajiem parametriem, tie ir pareizi j uzst da, j lieto un j apkopj. Uzst dot, lietojot „Brooks Instrument” izstr d jumus un veicot to apkopi, ir j iev ro šie nor d jumi un j iek auj tie j su droš bas programm .
  • Seite 47 SP JIMAS: nenaudokite šio prietaiso viršydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis. Nesilaikydami šio sp jimo galite sunkiai susižeisti ir (arba) sugadinti rang . Jei nesuprantate koki nors nurodym , kreipkit s „Brooks Instrument“ atstov , kad paaiškint . Paisykite vis sp jim , persp jim ir nurodym , pažym t ant gaminio arba pateikt su juo.
  • Seite 48 Produkty o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom „Uznanej Praktyki In ynierskiej” (SEP). Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej (EMC) Urz dzenia elektryczne / elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE, przesz y pozytywnie testy pod k tem spe niania przez nich wymogów kompatybilno ci elektromagnetycznej (Dyrektywa EMC 2014/30/EU).
  • Seite 49 Ler antes de proceder! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de...
  • Seite 50 În m sura în care indica iile c r ii ma inii nu sunt suficient de l muritoare, lua i leg tura cu reprezentantul Brooks Instrument pentru clarificarea problemei.
  • Seite 51 Pre íta pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalova , prevádzkova a udržiava , na zabezpe enie ich spo ahlivej a normálnej prevádzky v celom pracovnom rozsahu.
  • Seite 52 Pred servisom morate odstraniti tlak v obdelovalni liniji. e potrebujete rezervne dele, zagotovite, da usposobljeno osebje uporablja rezervne dele, ki jih je odobrila družba Brooks Instrument. Neodobreni deli in postopki lahko vplivajo na u inkovitost delovanja izdelka ali ogrozijo varno upravljanje postopka.
  • Seite 53 ¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento.
  • Seite 54 Läs detta innan du fortsätter! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls.
  • Seite 55 All manuals and user guides at all-guides.com Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
  • Seite 56 Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons. Please contact your nearest sales representative for more details. Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice. TRADEMARKS Brooks and MultiFlo are trademarks of Brooks Instrument, LLC All other trademarks are the property of their respective owners.

Diese Anleitung auch für:

Pc125

Inhaltsverzeichnis