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Operating Instructions
Pirani Gauge
TPR 010
BG 805 976 BN
(0305)
Product Identification
In all communications with Pfeiffer Vacuum, please specify
the information on the product nameplate. For convenient
reference copy that information into the space provided
below.
Pfeiffer Vacuum, D-35614 Asslar
Typ:
No:
F-No:
Validity
This manual applies to products with part numbers
PTR02270
(standard type)
PTR02250
(old type)
PTR02251
(old type)
PTR02271
(old type)
The old types are only delivered as spare parts of measure-
ment units that are no longer available. Special information
with regard to such gauges and specifications differing from
those of the standard type (PTR02270) are marked with an
asterisk (*).
The part number can be taken from the nameplate.
Intended Use
The TPR 010 Pirani gauge is used together with one of the
controllers listed below for vacuum measurement in a pres-
-4
sure range of 8×10
... 1000 mbar.
The TPR 010 Pirani gauge is not suited for corrosive media.
Standard Type
Gauges TPR 010
Controller
PTR02270
TPG 300
Old Types
Gauges TPR 010
Controller
new
PTR02270
IMG 300
PTR02250
TPG 300
TPG 035
TPG 060
TPG 070
TPG 100
PKG 020
PKG 100
VWS 120
PTR02251
–
TPG 010
TPG 031
PTR02271
–
TPG 010 A
TPG 031 A
Safety
Safety Information
a)
Take into account the relevant regulations and safety
measures for the gases used.
Consider possible reactions with the materials and the
heated filament.
b)
Take into account the relevant safety regulations when
installing and maintaining the product.
c)
Products returned to Pfeiffer Vacuum for maintenance
should if at all possible be free of harmful substances
(e.g. radioactive, toxic, caustic, or microbiological).
Otherwise the type of contamination has to be declared.
Products that are not clearly declared as "free of harmful
substances" are decontaminated at the expense of the
customer.
Pass on the safety information to other users.
Responsibility and Warranty
Pfeiffer Vacuum accepts no responsibility nor warranty if the
user or third parties
•
utilize the product not according to the defined use
•
disregard the technical data
•
make any kind of changes (modifications, alterations,
etc.) to the product
•
use the product with accessories not listed in the
product documentation
The user assumes the responsibility in conjunction with the
gases used.
Technical Data
Description
Vacuum connection
Mounting orientation
Admissible temperatures
storage
operation
without cable
Relative humidity
Filament temperature
for self-compensating
bridge circuit
for simple bridge circuit
Measurement range
(air, N
)
2
Measurement error
Time constant
for self-compensating
bridge circuit
for simple bridge circuit
Repeatability
Type of protection
Overpressure
Cable length between
gauge and controller
Materials
filament
housing,
vacuum connection
electrical feedthrough
filter
old
Weight
Standard type
* old types
DN 10 ISO-KF
Any
–40°C ... +80°C
0°C ... +70°C
(10°C ... +50°C)*
100°C
Max. 80% up to +31 °C
decreasing to 50 % at +40 °C
Ambient temperature + 130°C
300°C
-4
5.6×10
... 1000 mbar
up to factor 2 ≥100 mbar
-1
≈±20%
10 ... 10
mbar
-2
up to factor 2 ≤10
mbar
<10 ms
<0.5 s
≈±2% in the range of
-2
1×10
... 100 mbar
IP 40
≤9 bar
limited to inert gases
Depending on the measurement
unit
Tungsten
AlMgSi
FPM
Sintered bronze
0.14 kg
Dimensions [mm]
PTR02270
DN 10 ISO-KF
19
110
Installation
Connection to the Vacuum System
NOTE
Make sure to adhere to the special regulations concerning
cleanliness and damage prevention when working with
vacuum components.
DANGER
When using KF vacuum connections with elastomer seal-
ing rings (e.g. O-rings), the sealing ring must be equipped
with an outer centering ring at overpressures >2.5 bar.
At overpressures >1 bar a clamp only to be opened and
closed by means of a tool (e.g. hose clip clamping ring) has
to be used.
If the TPR 010 can come in contact with charged particles
(plasma, ion beam, etc.) where it is installed, care must be
taken that it is galvanically connected to the grounded vac-
uum chamber. Always use metallic, conductive centering
rings and clamping devices.
The gauge can be mounted in any orientation. However, it
should be mounted so that any particles present cannot enter
the measurement chamber.
The following vacuum connections are possible:
• DN 10 ISO-KF
• DN 16 ISO-KF and a reducing centering ring
Electrical Connection
The TPR 010 Pirani gauge is connected to the controller via
a measurement cable.
Construction of the gauges:
• PTR02270 and PTR02271 *
The gauge housing is grounded via the vacuum connec-
tion and the vacuum chamber. There is no galvanic con-
nection between the gauge housing and the measurement
unit.
R1: Measurement filament
R2: Temp. compensator
R1
R2
NTC
2
1
5
4
Plug C91E
9
1
5
2
4
3
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