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Verwandte Anleitungen für Brooks Instrument 48 Serie
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- Seite 1 Installation and Operation Manual X -TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 ® Brooks 48xx Series 4850 Mass Flow Controller 4860 Mass Flow Meter Model 4850/4860 with Model 4850/4860 with Compression Fittings Local Operator Interface...
- Seite 2 Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
- Seite 3 We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
- Seite 4 Installation and Operation Manual X -TMF-4800-MFC-eng Part Number:541B072AAG ® Brooks 48xx Series October, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Seite 5: Inhaltsverzeichnis
Contents Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG Brooks ® 48xx Series October, 2017 Paragraph Page Number Number Section 1 Introduction How to Use This Manual ......................1-1 Description ..........................1-1 Specifications ..........................1-1 Specifications for Local Operator Interface (LOI) ............... 1-6 Section 2 Installation General ............................ - Seite 6 Contents Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B0072AG Brooks ® 48xx Series October, 2017 Figures Figure Page Number Number Dimensions for Model 4850/4860 with Standard Process Connections ........1-4 Dimensions for Model 4850/4860 with Downport Connections ..........1-4 Dimensions for the 48xx Series Local Operator Interface (LOI) ..........1-6 Gas Flow Across the MEMS Sensor ..................
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Seite 7: Section 1 Introduction
Section 1 Introduction Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 1-1 How to Use This Manual This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Brooks 48xx Series Products. - Seite 8 Section 1 Introduction Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 Table 1-1 48xx Series Specifications P P P P P erformance erformance erformance erformance erformance Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range...
- Seite 9 Section 1 Introduction Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 These certifications cover the 48xx Series thermal mass flow devices as well as the Local Operator Interface (LOI). Applicable Mark Agency Certification/ Marking/ Directive Standard Details Class I, Div 2 Groups A, B, C &...
- Seite 10 Section 1 Introduction Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 Figure 1-1 Dimensions for Model 4850/4860 with Standard Process Connections Figure 1-2 Dimensions for Model 4850/4860 with Downport Connections...
- Seite 11 Section 1 Introduction Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 Figure 1-3 Dimensions for the 48xx Series Local Operator Interface (LOI) Table 1-2 15-Pin D-Sub Connector Pin-out PIN # 4800 Series 5850TR S – SERIES (58xxS) SETPOINT SIGNAL COMMON ANALOG COMMON SETPOINT SIGNAL COMMON...
- Seite 12 Section 1 Introduction Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Seite 13: Section 2 Installation
If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to the nearest Brooks Instrument location listed on the Global Service Network page on our website: BrooksInstrument.com/GlobalSupportCenters... -
Seite 14: Return Shipment
Section 2 Installation Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 2-4 Return Shipment Prior to returning any instrument to the factory for any reason, visit our website for instructions on how to obtain a Return Materials Authorization Number (RMA #) and complete a Decontamination Statement to accompany it: BrooksInstrument.com/Service. -
Seite 15: Mechanical Connections
48xx Series October, 2017 2-7 Mechanical Connections If mechanical connections were ordered from Brooks Instrument, an integrated filter of 40 microns is already installed in the upstream fitting. This is to prevent the possibility of any foreign material entering the flow sensor or control valve (for MFC). -
Seite 16: Electrical Connections
Section 2 Installation Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 2-8 Electrical Connections The setpoint signal is supplied as a 0 to 5 Vdc or 4 to 20 mA analog signal. All signals are supplied via the 15-pin D-Connector. There is also an optional local operator interface (LOI). -
Seite 17: Operation Check Procedure
Section 2 Installation Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 Analog I/O Versions • Signal Common • Signal Output (Voltage or Current) • Nominal +15 Vdc or +24 Vdc • Setpoint Input (Voltage or Current) •... - Seite 18 Section 2 Installation Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 h. Check the analog output signal. The output signal should match the setpoint signal in accordance with the accuracy specifications provided in Section 1 of this document. i.
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Seite 19: Section 3 Operation
Section 3 Operation Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 3-1 Operating Procedure After the MFC/MFM has been properly installed in the process, it is ready for operation. When initiating flow, slowly open the valve to avoid a flow surge. -
Seite 20: Features
Section 3 Operation Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 temperature difference measured by the two temperature sensors to increase with increasing flow. The temperature difference is then converted into a flow signal based on the factory calibration. There is one major difference between a traditional thermal mass flow sensor and the MEMS based sensor. - Seite 21 The re-zero function can be accessed via RS232. An optional software tool for ease of RS232 connection is available on the Brooks Instrument website. See Section 3, PC-based Support Tools for instructions on how to...
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Seite 22: Pc-Based Support Tools
Section 3 Operation Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 3-5 PC-Based Support Tools A basic PC-based service tool for re-zeroing, gas selection, valve override and monitoring of the 48xx Series instruments is available on the Brooks Instrument website. -
Seite 23: Section 4 Maintenance And Troubleshooting
Section 4 Maintenance and Troubleshooting Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 4-1 Overview No routine maintenance is required on the 48xx Series devices. However, if an in-line filter is used, the filtering elements should be periodically replaced. -
Seite 24: Troubleshooting
Section 4 Maintenance and Troubleshooting Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 CAUTION This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed during the removal, installation, or other handling of internal circuit boards or devices. -
Seite 25: Frequently Asked Questions
Section 4 Maintenance and Troubleshooting Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 4-2-2 Frequently Asked Questions Q: Where is the zero button? A: There is no zero button on the 48xx Series devices.The re-zeroing function is handled via a PC-based software tool. - Seite 26 (see Section 3 for information about the zeroing function). If the output signal does not zero properly, please contact Brooks Instrument. 2. Connect the instrument to a source of the same gas used for it's original calibration.
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Seite 27: Calibration Procedure
Section 4 Maintenance and Troubleshooting Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 Figure 4-1 Bench Troubleshooting Circuit 4-2-4 Calibration Procedure The calibration of Brooks 48xx Series Mass Flow devices is not described in this manual. Such calibration requires accurate and traceable calibration equipment. - Seite 28 Section 4 Maintenance and Troubleshooting Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Seite 29: Section A Essential Instructions
Section A Essential Instructions Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG October, 2017 ® Brooks 48xx Series Bulgarian Brooks Instrument Brooks Instrument. Brooks Instrument : (1) . (2) Brooks Instrument (PED) 0,5 bar (g) 25 mm 1" (inch), (PED). -
Seite 30: Základní Instrukce
P ed instalací si p e t te následující instrukce! Spole nost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standard . P ístroje musí být ádn nainstalovány, používány a udržovány tak, aby byl zajišt n jejich nep etržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující... - Seite 31 Section A Essential Instructions Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG October, 2017 ® Brooks 48xx Series Dansk Grundlæggende vejledninger Læs disse før anvendelse! Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så...
- Seite 32 Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken.
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Seite 33: Olulised Juhised
Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljudele riiklikele ja rahvusvahelistele standarditele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrumenti toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi. - Seite 34 Perusohjeet Lue ensin ohjeet huolellisesti! Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan. Brooks Instrumentin laitteiden asennuksessa, käytössä ja huollossa on noudatettava soveltuvia määräyksiä ja ohjeita, lisäksi mainitut ohjeet on huomioitava työsuojelun ohjeistuksessa.
- Seite 35 AVERTISSEMENT: n’utilisez pas cet instrument au-delà des spécifications énumérées dans le manuel d’utilisation. Le non-respect de cet avertissement peut entraîner de graves blessures et / ou endommager l’équipement. • Si vous ne comprenez pas l’une des instructions, prenez contact avec un représentant de Brooks Instrument pour obtenir des explications. •...
- Seite 36 Produkte mit einer Größe von 25 mm oder 1“ (inch) oder kleiner sind Sound Engineering Practice (SEP). Europäische Verordnung zur elektromagnetischen Verträglichkeit (EMV) Geräte von Brooks Instrument (elektrischer und elektronischer Art) mit CE-Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen Verträglichkeit (EMV Richtlinie 2014/30/EU) erfolgreich bestanden.
- Seite 37 Section A Essential Instructions Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG October, 2017 ® Brooks 48xx Series Greek Brooks Instrument Brooks Instrument. ’ Brooks Instrument. : (1) . (2) Brooks Instrument. (PED) 0,5 bar (g) 25 mm (PED). PED.
- Seite 38 üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál m ködési tartományuknak megfelel en üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során.
- Seite 39 Direttiva europea relativa alla compatibilità elettromagnetica (EMC) Le apparecchiature (elettriche/elettroniche) Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilità elettromagnetica (Direttiva EMC 2014/30/EU). In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE.
- Seite 40 Lai nodrošin tu šo izstr d jumu turpm ku darb bu atbilstoši noteiktajiem parametriem, tie ir pareizi j uzst da, j lieto un j apkopj. Uzst dot, lietojot „Brooks Instrument” izstr d jumus un veicot to apkopi, ir j iev ro šie nor d jumi un j iek auj tie j su droš bas programm .
- Seite 41 SP JIMAS: nenaudokite šio prietaiso viršydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis. Nesilaikydami šio sp jimo galite sunkiai susižeisti ir (arba) sugadinti rang . Jei nesuprantate koki nors nurodym , kreipkit s „Brooks Instrument“ atstov , kad paaiškint . Paisykite vis sp jim , persp jim ir nurodym , pažym t ant gaminio arba pateikt su juo.
- Seite 42 Produkty o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom „Uznanej Praktyki In ynierskiej” (SEP). Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej (EMC) Urz dzenia elektryczne / elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE, przesz y pozytywnie testy pod k tem spe niania przez nich wymogów kompatybilno ci elektromagnetycznej (Dyrektywa EMC 2014/30/EU).
- Seite 43 Ler antes de proceder! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de...
- Seite 44 În m sura în care indica iile c r ii ma inii nu sunt suficient de l muritoare, lua i leg tura cu reprezentantul Brooks Instrument pentru clarificarea problemei.
- Seite 45 Pre íta pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalova , prevádzkova a udržiava , na zabezpe enie ich spo ahlivej a normálnej prevádzky v celom pracovnom rozsahu.
- Seite 46 Pred servisom morate odstraniti tlak v obdelovalni liniji. e potrebujete rezervne dele, zagotovite, da usposobljeno osebje uporablja rezervne dele, ki jih je odobrila družba Brooks Instrument. Neodobreni deli in postopki lahko vplivajo na u inkovitost delovanja izdelka ali ogrozijo varno upravljanje postopka.
- Seite 47 ¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento.
- Seite 48 Läs detta innan du fortsätter! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls.
- Seite 49 Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Seite 50 Brooks Instrument can provide seminars and dedicated training to engineers, end users and maintenance persons. Please contact your nearest sales representative for more details. Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice. TRADEMARKS Brooks ..............