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87-900-924-01(B)
APRIL 2002
TV 141
RS485
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
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Inhaltsverzeichnis
Verwandte Anleitungen für Varian TV 141 969-9388
Inhaltszusammenfassung für Varian TV 141 969-9388
- Seite 1 MANUALE DI ISTRUZIONI TV 141 BEDIENUNGSHANDBUCH Navigator NOTICE DE MODE D’EMPLOI RS485 MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES Model 969-9388 BEDRIJFSHANDLEIDING Model 969-9389 INSTRUKSTIONSBOG Model 969-9390 BRUKSANVISNING Model 969-9391 Model 969-9392 INSTRUKSJON MANUAL Model 969-9393 OHJEKÄSIKIRJA Model 969-9394 ODHGIES CRHSEWS Model 969-9395 INSTRUCTION MANUAL 87-900-924-01(B)
- Seite 2 TV 141 Navigator RS 485...
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Seite 5: Inhaltsverzeichnis
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO....................9 GEBRUIKSAANWIJZINGEN..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING ......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Seite 6: Informazioni Generali
ISTRUZIONI PER L'USO INFORMAZIONI GENERALI Questa apparecchiatura è destinata ad uso professionale. L'utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Varian prima dell'utilizzo dell'apparecchiatura. La Varian si ritiene sollevata eventuali responsabilità dovute... - Seite 7 In caso di guasto è possibile usufruire del servizio di riparazione ATTENZIONE! Varian o del "Varian advanced exchange service", che permette di ottenere un sistema rigenerato in sostituzione di quello guasto. Per la mandata all'aria della pompa utilizzare aria o gas inerte esente da polvere o particelle.
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Seite 8: Allgemeine Informationen
Anweisungen, unsachgemäßem Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen und Mißachtung der nationalen einschlägigen Normen übernimmt die Firma Varian keinerlei Haftung. Modell TV 141 Navigator ist ein integriertes System, das aus einer Turbomolekularpumpe für Hoch- und Höchstvakuum- anwendungen, integriert mit einem entsprechenden Controller, besteht. -
Seite 9: Wartung
Temperatur am Pumpengehäuse unter 50°C abgesunken ist. oder ruckartigen Bewegungen ausgesetzt werden, da die Lager beschädigt werden könnten. Bei Defekten kann der Varian Service oder der "Varian advanced exchange service" in Anspruch genommen werden, ! ! ! ! der ein generalüberholtes System als Ersatz für das defekte ACHTUNG! System zur Verfügung stellt. -
Seite 10: Indications Generales
Cet appareillage a été conçu en vue d'une utilisation professionnelle. Avant toute utilisation de l'appareil, il est conseillé à l'utilisateur de lire attentivement cette notice d'instructions ainsi que toute autre indication supplémentaire fournie Varian décline conséquent toute responsabilité en cas de non respect total ou partiel des instructions données, d'utilisation impropre par un personnel... - Seite 11 "advanced exchange service", remplir et faire parvenir au d'une porte spéciale à travers laquelle il est nécessaire de bureau Varian de votre région la fiche "Sécurité et Santé" jointe fournir à la pompe un flux de gaz inerte (azote ou argon) pour au présent manuel d'instructions.
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Seite 12: Información General
Varian antes de usar el aparato. Varian se considera libre de posibles responsabilidades debidas al incumplimiento total o parcial de las instrucciones, al uso impropio por parte de personal no preparado, a operaciones no autorizadas o a un uso contrario a las normas nacionales específicas. - Seite 13 En caso de avería se podrá utilizar el servicio de reparación ¡ATENCIÓN! Varian o el “Varian advanced exchange service”, que permite Para el envío de aire de la bomba utilizar aire o gas inerte sin obtener un sistema regenerado para sustituir el averiado.
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Seite 14: Instalação
INSTRUÇÕES DE USO INFORMAÇÕES GERAIS Esta aparelhagem destina-se a uso profissional. O utilizador deve ler atentamente o presente manual de instruções e todas as informações adicionais fornecidas pela Varian antes de utilizar aparelhagem. Varian não responsabiliza pela inobservância total ou parcial das instruções, pelo uso indevido por parte de pessoas não treinadas, por operações não... - Seite 15 Os rolamentos poderiam sofrer Em caso de defeito é possível usufruir do serviço de danos. assistência Varian ou do "Varian advanced exchange service", que permite obter um sistema regenerado que substitua a bomba com defeito. ATENÇÃO! Para a saída de ar da bomba utilizar ar ou gás inerte sem...
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Seite 16: Algemene Informatie
Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik... - Seite 17 Hierdoor kunnen de lagers namelijk In geval van storing is het mogelijk om de reparatiedienst van schade oplopen. Varian of de "Varian advanced exchange service" in te schakelen: zo krijgt men een ruilpomp ter vervanging van de ! ! ! ! defecte pomp.
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Seite 18: Brugsanvisning
Varian, før udstyret anvendes. Varian tager ikke ansvar for skader helt eller delvis som følge af tilsidesættelse af disse instruktioner, fejlagtig brug af personer uden tilstrækkeligt kendskab, ukorrekt anvendelse af udstyret eller håndtering, der strider imod gældende lokale regler. - Seite 19 50°C. ! ! ! ! VIGTIGT! I tilfælde af skader på systemet kontaktes et Varian Pumpen skal forsynes med luft eller ædelgasser, der ikke reparationsværksted eller “Varian advanced exchange service”, indeholder støv eller faste partikler. Indgangstrykket ved den der udskifter systemet med et repareret system.
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Seite 20: Allmän Information
Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen eller hantering som strider mot gällande lokala föreskrifter. - Seite 21 Om pumpen havererar, kontakta Varian reparationsverkstad uppvärmningen för att undvika brännskador. eller Varian utbytesservice, som kan ersätta systemet med ett renoverat system. ! ! ! ! VIKTIGT! OBSERVERA Undvik stötar eller plötsliga rörelser av pumpen under drift. I Innan systemet lämnas in till tillverkaren för reparation eller...
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Seite 22: Klargjøre Til Installasjon
Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra Varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglende oppfølging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som på... - Seite 23 (ca. hver 400 ms): systemet er i Varian. For detaljer henvises det til “Teknisk informasjon”. stilling for akselerasjon, bremsing, stopp eller “Waiting for interlock”...
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Seite 24: Yleisiä Tietoja
KÄYTTÖOHJEET YLEISIÄ TIETOJA Tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti ohjekirja ja muut Varianin toimittamat lisätiedot. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden täydellisestä tai osittaisesta laiminlyönnistä, ammattitaidottoman henkilön virheellisestä laitteen käytöstä, valtuuttamattomista toimenpiteistä... - Seite 25 Antakaa tämän jälkeen pumpun pintalämmön laskea alle 50ºC:en. " " " " HUOMIO! Laitteen vahingoittuessa on mahdollista käyttää Varianin korjauspalvelua tai "Varian advanced exchange service" - Käytä pumpun ilmansyöttöön ilmaa tai jalokaasua, joissa ei ole vaihtopalvelua, jonka kautta...
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Seite 26: Pdhgies Crhsews
£llh prÒsqeth plhrofor∂a pou d∂nei h Varian, prin apÒ th crhsimopo∂hsh thj suskeuÿj. H Varian den f◊rei kamm∂a euqÚnh Òson afor£ thn olikÿ ÿ merikÿ aq◊thsh twn odhgièn, thn akat£llhlh crÿsh ek m◊rouj anekpa∂deutou proswpikoÚ, mh exousiodothm◊nej epemb£seij ÿ... - Seite 27 H uyhlÿ qermokras∂a mpore∂ na antl∂aj na e∂nai katèterh apÒ 50°C. prokal◊sei proswpik◊j bl£bej. Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto service thj ! ! ! ! Varian ÿ sto “Varian advanced exchange service”, pou saj d∂nei PROSOCH PROSOCH PROSOCH PROSOCH th dunatÒthta na antikatastÿsete thn calasm◊nh antl∂a me m∂a...
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Seite 28: General Information
Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, im- proper use by untrained persons, non-authorized interference with the equipment or any action contrary to that provided for by specific national standards. -
Seite 29: Emergency Stop
50 °C. Use air or inert gas free from dust or particles for venting the In the case of breakdown, contact your local Varian service pump. The pressure at the vent port must be less than 2 bar center who can supply a reconditioned system to replace that (above atmospheric pressure). -
Seite 30: Technical Information
TECHNICAL INFORMATION DESCRIPTION OF THE TV 141 NAVIGATOR The TV 141 Navigator pumping system consists of a pump with an integrated controller and is avail- able in four models supplied with an USA standard plug, and other four models supplied with an Euro- pean standard plug. -
Seite 31: Controller Description
ISO 100, ISO 63, CFF 6", CFF 4.5” Foreline flange KF 16 NW Rotational speed 62000 rpm < 90 seconds Start-up time Recommended Mechanical: Varian SD 40 forepump Diaphragm: MD12 Operating position Operating ambient See the following diagram temperature (see the following note) Bakeout temperature 120°... -
Seite 32: Tv 141 Navigator Outline
TECHNICAL INFORMATION Compliance with: EN 55011 class A group 1 / FCC 47 CFR part 15, sub part J, class A / EN 61010-1 / IEC 1000-4-2 / IEC 1000-4-3 / IEC 1000-4-4 Power cable With European or USA plug 3 meters long RS 485 cable 5 meters long terminated with... - Seite 33 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure (with inlet screen) Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-924-01(B)
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Seite 34: Interconnections
TECHNICAL INFORMATION INTERCONNECTIONS Connection C (P3) - IN-OUT The following figure shows the TV 141 intercon- nections. This connector carries all the input and output sig- nals to remote control the TV 141. The available signals are the following: − START: input signal to start or stop the pump. With the supplied cover connector the START signal is connected to COMMON: the pump automatically starts as soon as the controller... -
Seite 35: Connection D (J4) - Serial
TECHNICAL INFORMATION Connection D (J4) - Serial This is a serial input/output connector to control via an RS 485 connection the TV 141. Note that the vent valve can also be controlled by means of the RS 485 connection. FAN INSTALLATION VENT VALVE INSTALLATION The vent valve (mod. -
Seite 36: Purge Valve Installation
TECHNICAL INFORMATION RS 485 OPTIONAL CABLE INSTALLATION ! ! ! ! CAUTION The optional RS 485 cable (969-9881) must be or- Do not overtighten the valve as this may damage dered when the TV 141 Navigator has to be con- the thread on the pump. -
Seite 37: Rs 485 Communication Description
TECHNICAL INFORMATION RS 485 COMMUNICATION DESCRIPTION DATA TYPE FIELD VALID LENGTH CHARACTERS Communication Format Logic (L) ‘0’ = OFF ‘1’ = ON • 8 data bit Numeric (N) ‘-‘, ‘.’, ‘0’ . . . ‘9’ right justified with ‘0’ • no parity Alphanumeric from blank to ‘_’... -
Seite 38: Window Meanings
TECHNICAL INFORMATION Example: Window Meanings Read/ Data Description Admitted − writing request of logic window n. 10 with the Write Type Values logic value ‘0’ (OFF): Start/Stop Start = 1 MASTER to SLAVE: <0x02> + <0x80> + (in remote Stop = 0 <’010’>... -
Seite 39: Accessories And Spare Parts
Off = 0 by the reset (on = command) (default = 1) closed) Pump life in 0 to 4x10 Reserved to Varian service hours (ze- roed by the reset com- Set the vent Automatic = 0 mand) valve (see note 1.) -
Seite 40: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Seite 41 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Seite 42 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...