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M10MB Mass-Flo
MKS M10MB Mass-Flo Handbücher
Anleitungen und Benutzerhandbücher für MKS M10MB Mass-Flo. Wir haben
1
MKS M10MB Mass-Flo Anleitung zum kostenlosen PDF-Download zur Verfügung: Betriebsanleitung
MKS M10MB Mass-Flo Betriebsanleitung (74 Seiten)
Controller and Meter
Marke:
MKS
| Kategorie:
Steuergeräte
Inhaltsverzeichnis
Inhaltsverzeichnis
3
Safety Information
7
Mass Flow Controller Safety Information
7
Symbols Used in this Instruction Manual
7
Symbols Found on the Unit
8
Table 1: Definition of Symbols Found on the Unit
8
Safety Procedures and Precautions
9
Sicherheitshinweise für den Massenflußregler
11
In dieser Betriebsanleitung Vorkommende Symbole
11
Erklärung der am Gerät Angebrachten Symbole
12
Tabelle 2: Bedeutung der am Gerät Angebrachten Symbole
12
Sicherheitsvorschriften und Vorsichtsmaßnahmen
13
Informations Relatives à la Sécurité pour le Contrôleur de Débit de Masse
15
Symboles Utilisés Dans Ce Manuel D'utilisation
15
Symboles Apparaissant Sur L'unité
16
Tableau 3: Définition des Symboles Apparaissant Sur L'unité
16
Mesures de Sécurité et Précautions
17
Medidas de Seguridad del Controlador de Flujo de Masa
19
Símbolos Usados en Este Manual de Instrucciones
19
Símbolos Hallados en la Unidad
20
Tabla 4: Definición de Los Símbolos Hallados en la Unidad
20
Procedimientos y Precauciones de Seguridad
21
Chapter One: General Information
23
Introduction
23
Design Features
23
Reliability
24
Cleanliness Features
24
How this Manual Is Organized
25
Manual Conventions
25
Customer Support
26
Chapter Two: Installation
27
How to Unpack the Type M100B/M10MB Unit
27
Unpacking Checklist
27
Interface Cables
28
Table 5: Interface Cables
28
Generic Shielded Cable Guidelines
29
Product Location and Requirements
30
Setup
31
Dimensions
32
Figure 1: Front and Side Views of the M100B/M10MB Mass Flow Device
32
Table 6: Measurement for Dimension a
32
Figure 2: Back View of the Type M100B/M10MB Mass Flow Device
33
Figure 3: Top View of the Type M100B/M10MB Mass Flow Device
33
Gas Line Connections
34
Fittings
34
Mounting the M100B/M10MB Unit
34
Figure 4: Mounting Dimensions
34
Electrical Information
35
Standard I/O Connector
35
Table 7: I/O Connector Pinout
35
Chapter Three: Overview
37
Gas Correction Factor
37
How to Calculate the GCF for Pure Gases
37
How to Calculate the GCF for Gas Mixtures
38
How to Read Mass Flow at a Different Reference Temperature
39
Labels
40
Figure 5: Serial Number Label
40
Chapter Four: Operation
41
How to Start up the Flow Device
41
How to Zero the Flow Device
42
How to Adjust the Controller Gain
43
How to Override the Valve
44
Priority of the Commands
44
How to Use the Optional Input
44
Chapter Five: Theory of Operation
45
General Information
45
Flow Path
45
Measurement Technique
45
Control Circuitry
46
Chapter Six: Maintenance
47
General Information
47
How to Clean the Unit
47
Zero Adjustment
47
Repair
48
Chapter Seven: Troubleshooting
49
Troubleshooting Chart
49
Table 8: Troubleshooting Chart
49
How to Adjust the Valve Preload
50
Figure 6: Control Valve Connected to a Digital Multi Meter (DMM)
52
Figure 7: Location of the Lock Nut and Centershaft
52
Table 9: Maximum Valve Currents
54
Appendix A: Product Specifications
55
Performance Specifications
55
Environmental Specifications
56
Electrical Specifications
56
Physical Specifications
56
Appendix B: Model Code Explanation
58
Model Code
58
Appendix C: Gas Correction Factors
63
Common Gases
63
Appendix D: MFC Sizing Guidelines
67
General Information
67
How to Determine the Flow Controller Range
68
How to Determine the Valve Configuration
69
Table 10: C V Pressure Factors
69
Table 11: Valve Configuration Selection Guide
70
Example
71
Index
73
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