Seite 1 MKS Type 651C Pressure Controller Operating Manual Two Technology Drive 115605-P1 Andover REV H, 05/11 MA 01810 Instruction Manual Main: 978.975.2350 Fax: 978.975.0093 www.mksinst.com...
Seite 2 For the period commencing with the date of shipment of this equipment and ending one year later, MKS will, at its option, either repair or replace any part which is defective in materials or workmanship or with respect to the date-related operations warranty without charge to the purchaser.
Seite 3 115605-P1 Rev H, 05/11 MKS Type 651C Pressure Controller 600 S eries Point P ressure C ontroller Valve Stop Param eters Rem ote Learn O pen Local S elect C lose Zero A djust...
Seite 4 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.
Seite 5: Inhaltsverzeichnis
Table of Contents Table of Contents Safety Information ........................1 Symbols Used in This Instruction Manual..............1 Symbols Found on the Unit ....................2 Safety Procedures and Precautions .................3 Sicherheitshinweise........................5 In dieser Betriebsanleitung vorkommende Symbole ............5 Am Gerät angebrachte Symbole ..................6 Sicherheitsvorschriften und Vorsichtsmaßnahmen............7 Informations relatives à...
Seite 6 Table of Contents Checking the Fuses and Line Voltage Selector Switch ........25 How To Change the Line Voltage ..............26 Chapter Three: Overview......................29 Front Panel........................29 Front Panel Components..................29 Front Panel Display ...................30 Local and Remote Operation ................31 Command Priority....................31 Control Mode: Self-Tuning or PID Control............31 Softstart Control....................32 Battery Backups....................32 Rear Panel ........................33...
Seite 7 Table of Contents How To Activate Set Points....................53 How To Identify an Out-of-Range Condition..............53 How To Control the Valve....................54 How To Open the Valve ..................54 How To Close the Valve..................54 How To Halt the Valve..................54 How To Activate the Learn Function ................55 How To Stop the Learn Function ..............55 How To Zero a Sensor ....................56 How To Use Special Zero..................56...
Seite 8 Table of Contents How To Use the Special Zero................71 How To Remove the Zero..................71 How To Activate the Learn Function ................72 How To Stop the Learn Function ..............73 How To Determine the Active Set Point ................74 How To Select the Active Set Point ................75 How To Select Pressure or Position Control ..............76 How To Change the Set Point Value ................77 How To Adjust the Analog Set Point Value ..............78...
Seite 9 Table of Contents How To Check the Firmware Version ................91 Digital Logic Control......................92 I/O Board Digital Circuitry................92 Digital Input Priorities ..................94 Digital Functions ....................95 Analog Set Point Inputs ..................97 Chapter Seven: Battery-Backed Memory Module..............99 Replacing the Battery-Backed Memory Module ............99 Opening the Unit....................99 Removing the CPU Board and Memory Module ..........100 Installing a New Memory Module and Replacing the CPU Board....101...
Seite 10 Table of Contents Appendix B: Model Code Explanation..................119 Model Code........................119 Appendix C: Product Compatibility ...................121 Product Compatibility.....................121 Valves ........................121 Transducers......................121 Adapter Cables....................122 Appendix D: Type 651 Displayless Unit ..................123 Type 651 Displayless Unit....................123 RS-232 Configuration.....................124 Internal Switches....................124 Opening/Closing the 651 Controller..............124 Dipswitch Bank Settings..................126 Appendix E: Initial Settings......................129 Appendix F: Command and Request Reference .................131...
Seite 11 List of Figures List of Figures Figure 1: Voltage and Fuse Data for the Low Power Unit ............26 Figure 2: Voltage and Fuse Data for the High Power Unit............27 Figure 3: Front Panel of the 651 Instrument ................29 Figure 4: Rear Panel of the 651 Instrument ................33 Figure 5: Serial Number Label ....................40 Figure 6: I/O Board Digital Input Circuitry ................92 Figure 7: I/O Board Digital Output Circuitry ................93...
Seite 12 List of Figures...
Seite 13 Table 12: System Interface Cables for MKS Transducers............38 Table 13: Valve Connector Pinout....................39 Table 14: System Interface Cables for MKS Throttle Valves ............39 Table 15: Sensor Range Values ....................69 Table 16: Priority of Digital Inputs....................94 Table 17: Digital Input Functions ....................
Seite 14 List of Tables...
Seite 15: Safety Information
Safety Information USymbols Used in This Instruction Manual Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.
Seite 16: Symbols Found On The Unit
U Symbols Found on the Unit Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Earth (ground) Off (Supply) On (Supply) IEC 417, No.5019 IEC 417, No.5008 IEC 417, No.5017...
Seite 17: Safety Procedures And Precautions
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
Seite 18 U Safety Procedures and Precautions Safety Information USE THE PROPER POWER SOURCE This product is intended to operate from a power source that does not apply more voltage between the supply conductors, or between either of the supply conductors and ground, than that specified in the manual.
Seite 19: Sicherheitshinweise
Sicherheitshinweise UIn dieser Betriebsanleitung vorkommende Symbole Sicherheitshinweise In dieser Betriebsanleitung vorkommende Symbole Definition der mit WARNUNG!, VORSICHT! und HINWEIS überschriebenen Abschnitte in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahrenquelle hin. Es macht auf einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bzw.
Seite 20: Am Gerät Angebrachte Symbole
U Am Gerät angebrachte Symbole Sicherheitshinweise Am Gerät angebrachte Symbole Der untenstehenden Tabelle sind die Bedeutungen der Symbole zu entnehmen, die an dem Gerät angebracht sind. Definitionen der am Gerät angebrachten Symbole Ein (Netz) Aus (Netz) Erde Schutzleiter IEC 417, Nr. 5007 IEC 417, Nr.
Seite 21: Sicherheitsvorschriften Und Vorsichtsmaßnahmen
Bauen Sie in das Instrument keine Ersatzteile ein, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor! Schicken Sie das Instrument zu Wartungs- und Reparatur-zwecken an einen MKS-Kalibrierungs- und -Kundendienst ein! Dadurch wird sicher-gestellt, daß alle Sicherheitseinrichtungen voll funktionsfähig bleiben.
Seite 22 U Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitshinweise Erdung und Verwendung geeigneter elektrischer Armaturen! In diesem Instrument liegen gefährliche Spannungen an. Alle verwendeten elektrischen Armaturen und Kabel müssen dem angegebenen Typ entsprechen und sich in einwand-freiem Zustand befinden. Alle elektrischen Armaturen sind vorschriftsmäßig anzubringen und zu erden. Richtiges Netzkabel verwenden! Das verwendete Netzkabel muß...
Seite 23: Informations Relatives À La Sécurité
Informations relatives à la sécurité USymboles utilisés dans ce manuel d'utilisation Informations relatives à la sécurité Symboles utilisés dans ce manuel d'utilisation Définition des indications AVERTISSEMENT, ATTENTION et REMARQUE utilisées dans ce manuel. Avertissement L'indication AVERTISSEMENT signale un danger potentiel. Elle est destinée à...
Seite 24: Symboles Apparaissant Sur L'appareil
U Symboles apparaissant sur l'appareil Informations relatives à la sécurité Symboles apparaissant sur l'appareil Le tableau suivant décrit les symboles apparaissant sur l'appareil. Définition des symboles apparaissant sur l'appareil Terre de protection Marche (sous tension) Arrêt (hors tension) Terre (masse) (masse) IEC 417, No.
Seite 25: Mesures De Sécurité Et Mises En Garde
NE PAS SUBSTITUER DES PIÈCES OU MODIFIER L'APPAREIL Ne pas utiliser de pièces détachées autres que celles vendues par MKS Instruments, Inc. ou modifier l'appareil sans l'autorisation préalable de MKS Instruments, Inc. Renvoyer l'appareil à...
Seite 26 U Mesures de sécurité et mises en garde Informations relatives à la sécurité UTILISATION D'UN CORDON D'ALIMENTATION APPROPRIÉ Utiliser uniquement un cordon d'alimentation en bon état et conforme aux exigences de puissance d'entrée spécifiées dans le manuel. Utiliser uniquement un cordon d'alimentation amovible avec des conducteurs dont la section est égale ou supérieure à...
Seite 27: Información Sobre Seguridad
Información sobre seguridad USímbolos usados en el manual de instrucciones Información sobre seguridad Símbolos usados en el manual de instrucciones Definiciones de los mensajes de ADVERTENCIA, PRECAUCIÓN Y OBSERVACIÓN usados en el manual. Advertencia El símbolo de ADVERTENCIA indica un riesgo. Pone de relieve un procedimiento, práctica, condición, etc., que, de no realizarse u observarse correctamente, podría causar lesiones a los empleados.
Seite 28: Símbolos Que Aparecen En La Unidad
U Símbolos que aparecen en la unidad Información sobre seguridad Símbolos que aparecen en la unidad En la tabla que figura a continuación se indican los símbolos que aparecen en la unidad. Definición de los símbolos que aparecen en la unidad Encendido Apagado (alimentación eléctrica)
Seite 29: Procedimientos Y Precauciones De Seguridad
No se debe instalar piezas que no sean originales ni modificar el instrumento sin autorización. Para garantizar que las prestaciones de seguridad se observen en todo momento, enviar el instrumento al Centro de servicio y calibración de MKS cuando sea necesaria su reparación y servicio de mantenimiento.
Seite 30 U Procedimientos y precauciones de seguridad Información sobre seguridad USAR EL CABLE ELÉCTRICO ADECUADO Usar únicamente un cable eléctrico que se encuentre en buenas condiciones y que cumpla los requisitos de alimentación de entrada indicados en el manual. Usar únicamente un cable desmontable instalado con conductores que tengan un área de sección transversal equivalente o superior a 0,75mm².
Seite 31: Chapter One: General Information
Chapter One: General Information Introduction The Type 651C instrument is a self-tuning pressure controller for throttle valves. It can supply ±15 Volts to power and provide a readout for an attached capacitance manometer. The self- tuning feature of the Type 651 unit determines system characteristics necessary for control. This...
Seite 32: How This Manual Is Organized
Appendix A, Product Specifications, lists product specifications for the 651 instrument. Appendix B, Model Code Explanation, describes the instrument’s ordering code. Appendix C, Products Compatibility supplies information about MKS compatible products. Appendix D, Displayless Version, describes the displayless version and how it differs from the standard 651 unit.
Seite 33: Customer Support
Calibration and Service Center before shipping. The ERA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials.
Seite 34 U Customer Support Chapter One: General Information This page intentionally left blank.
Seite 35: Chapter Two: Installation
Chapter Two: Installation How To Unpack the Type 651 Unit MKS has carefully packed the Type 651 unit so that it will reach you in perfect operating order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that damage has not occurred during shipment.
Seite 36: Product Location And Requirements
651-K1 accessory kit (includes an I/O connector for the rear panel of the unit, a connector cover for the I/O connector, and a screwlock assembly for the I/O connector cover) • Cables for supported sensors and the MKS Types 253 or 653 valves • RM-13 or RM-14 rack mount option •...
Seite 37 Chapter Two: Installation U Setup...
Seite 38: Setup
U Setup Chapter Two: Installation Setup Environmental Requirements Follow these requirements when installing and using a 651 pressure controller. 1. Operating ambient temperature must be in the range of 15° to 40° C (15° to 35° C when equipped with the optional valve failsafe battery backup). 2.
Seite 39: Checking The Fuses And Line Voltage Selector Switch
Chapter Two: Installation U Setup Checking the Fuses and Line Voltage Selector Switch The 651 unit is shipped with the line voltage set for 115 VAC. If you need to operate the unit with a 230 VAC line voltage, follow the instructions in this section. Refer Table 5 for information on the fuse types.
Seite 40: How To Change The Line Voltage
U Setup Chapter Two: Installation How To Change the Line Voltage 1. Check the current line voltage setting. Refer to Figure 1 for the location of the voltage selector switch on the low power unit, or to Figure 2, page 27, for the location of the switch on the high power unit. The label above the switch (on either unit) shows the corresponding voltage range and fuse requirements for either voltage setting.
Seite 41: Figure 2: Voltage And Fuse Data For The High Power Unit
Chapter Two: Installation U Setup Voltage Selector Switch Fuses Figure 2: Voltage and Fuse Data for the High Power Unit The 651 pressure controller is now ready for valve connection and system setup. Refer to Chapter Three: Overview, page 29, for an overview of the controller and to Chapter Four: System Setup, page 41, for instructions on how to setup and operate the unit.
Seite 43: Chapter Three: Overview
Chapter Three: Overview UFront Panel Chapter Three: Overview Front Panel Front Panel Components Figure 3 labels all the components located on the front panel of the 651 instrument. Table 6, page 30, summarizes the functions of the front panel components. Display window Valve position control keys 600 S eries...
Seite 44: Front Panel Display
UFront Panel Chapter Three: Overview Front Panel Display The front panel display shows pressure and valve position by default. The down scrolling key, ] selects the previous display in the display list. The up scrolling key, [ ] scrolls to the next display in the display sequence.
Seite 45: Local And Remote Operation
Chapter Three: Overview UFront Panel Local and Remote Operation The Key Lock switch is used to select front panel control (Local) or rear panel control (Remote). When set to Local, control command input and set point parameter modification must be entered via the front panel.
Seite 46: Softstart Control
U Rear Panel Chapter Three: Overview When used in the PID control mode, the 651 unit employs a Proportional, Integral, and Derivative (PID) algorithm for control. PID control requires the input of user-defined lead and gain values. Each set point uses its own lead and gain values to optimize response from set point to set point.
Seite 47: Rear Panel
Chapter Three: Overview U Rear Panel Rear Panel Rear Panel Components Figure 4 labels all the components located on the rear panel of the 651 instrument. The power On/Off switch and the line voltage selector switch are on the back of the 651 unit. The four Type “D”...
Seite 48: Electrical Connections
Tables 8 through 14, on the following pages, list each connector’s pinout as well as corresponding MKS cable numbers. Note 1. An overall metal braided shielded cable, properly grounded at both ends, is required to meet CE specifications.
Seite 49: Table 9: Rs-232 Serial Communication Cables
(pins 2 and 3 reversed) Table 9: RS-232 Serial Communication Cables Caution The MKS RS-232 Serial Communications cable (CB651-10-10) must be used for the 9-pin, Serial Interface connector. Unlisted pins on this connector are not compatible with the current Type “D” 9-pin,...
Seite 50 U Rear Panel Chapter Three: Overview I/O Connector Pinout Function Number PLO relay #1 - NC contact PLO relay #1 - NO contact PLO relay #2 - NC contact Digital ground Learn system (low) Hold both pin 6 and pin 11 low to select analog set point with position control Softstart (low) Close valve (low) Reserved...
Seite 51: Table 10: I/O Connector Pinout
Chapter Three: Overview U Rear Panel I/O Connector Pinout (Continued) Function Number Remote zero (low) Stop valve (low) Open valve (low) PLO #2 status (low = out of limit) PLO #1 status (low = out of limit) +15V Output -15V Output Power ground + Set point input - Set point input...
Seite 52: Table 11: Transducer Connector Pinout
Digital ground - Pressure input Reserved Reserved Chassis ground Table 11: Transducer Connector Pinout System Interface Cables for MKS Transducers Transducer Type Number Cable Numbers 122/124/223/225/622/623 CB112-2-10 127/128/624/625/626/627/628 CB259-5-10 CB120-1-10 CB112-10-10 121/221 CB112-14-10 Table 12: System Interface Cables for MKS Transducers...
Seite 53: Table 13: Valve Connector Pinout
+15 V @25 mA (for Opto switches) Motor ground Table 13: Valve Connector Pinout System Interface Cables for MKS Throttle Valves Valve Type Number Cable Number 253A CB652-2-10 653A/B CB652-1-10 253B CB651-30-10 Table 14: System Interface Cables for MKS Throttle Valves...
Seite 54: Labels
CE mark signifying compliance with the European CE regulations. Seria l #: 0123456789 Model #: 651CXYZCD MKS Instruments, Inc. Made in the USA Figure 5: Serial Number Label The product model number (code) is identified as “651CXYZCD”, where: 651C = Type number...
Seite 55: Chapter Four: System Setup
Chapter Four: System Setup UOverview Chapter Four: System Setup Overview The 651 pressure controller is configured entirely through menu selection via display lists that appear on the front panel. It is not necessary to open the unit to set any switches. Valve connection and calibration, sensor range and pressure units, etc.
Seite 56: Valve Selection And Calibration
U Setup Menu Chapter Four: System Setup Valve Selection and Calibration Prior to its use, the appropriate valve must be connected and identified by the 651 controller. The 651 controller is initially configured to work with a 653 valve. Follow the steps below to select another valve.
Seite 57: Setup Menu
Chapter Four: System Setup U Setup Menu Setup Menu The Setup menu enables you to change the configuration of the 651 controller. The initial configuration is listed in Appendix E: Initial Settings, page 129. The instructions in this section assume that you will enter the commands from the front panel, so be sure that the key lock switch is set to local.
Seite 58: Rs-232 Communications
U Setup Menu Chapter Four: System Setup RS-232 Communications The 651 controller is initially configured with a baud rate of 9600, no parity, 8 data bits, and CRLF delimiter. Follow the steps below to change any of the RS-232 communication parameters.
Seite 59: Sensor Setup
Chapter Four: System Setup U Setup Menu Sensor Setup The 651 controller is initially configured to use Torr as the pressure units, 100 Torr as the sensor full scale range, 0 to 10 Volts for the sensor input signal, and 0 to 5 Volts for the analog set point input.
Seite 60: Pressure Units
U Setup Menu Chapter Four: System Setup 4. Scroll to the next topic. PRESSURE UNITS: Torr 5. Scroll through the display list until the unit of measure that the sensor has been calibrated to, appears. The display list includes the following pressure units: Torr* mTorr mbar...
Seite 61: Analog Set Point
Chapter Four: System Setup U Setup Menu Analog Set Point 1. From the sensor type display, scroll to the next topic in the Setup menu. ANALOG SETPT RANGE: 10 VOLTS 2. Choose either 5 Volts or 10 Volts full scale signal. The initial setting is 0 to 5 Volts.
Seite 62: Set Points A Through E, Pressure/Position Selection
U Setup Menu Chapter Four: System Setup Set Points A Through E, Pressure/Position Selection The 651 controller is initially configured to use pressure control for all set points, A through E. Follow the steps below to change configuration of any of the set points. 1.
Seite 63: Softstart Rates
Chapter Four: System Setup U Setup Menu Softstart Rates Softstart rates for set points A through E, analog set point, valve open, and valve close can be established via the Setup menu. If it is not necessary to utilize softstart control in your process, the softstart rate should be left at 100% (of F.S.).
Seite 64: Valve Control
U Setup Menu Chapter Four: System Setup Valve Control A valve can be controlled to open and close in a direct or reverse direction. Direct action of valve control is defined as valve open at 100% of the valve position’s full scale. and valve close at 0%.
Seite 65: Chapter Five: Local Operation
Chapter Five: Local Operation UOverview Chapter Five: Local Operation Overview Local operation of the 651 Pressure Controller is similar to System Setup outlined in the previous chapter, in that all functions of the controller can be accessed via display lists, and they respond according to information entered at the front panel.
Seite 66: How To View And Adjust Set Points
U How To View and Adjust Set Points Chapter Five: Local Operation How To View and Adjust Set Points The 651 instrument provides five user-definable set points (set point A through set point E). Each set point can be configured as a pressure set point or a valve position set point. Pressure set points are displayed in units of Torr, mTorr, mbar, µbar, Pascal, or kPa.
Seite 67: How To Activate Set Points
Chapter Five: Local Operation U How To Activate Set Points How To Activate Set Points Activating a set point causes the 651 unit to control to that set point. To activate a set point, press the appropriate set point key (A through E). The system responds by illuminating a light in the set point key and controlling according to the selected set point.
Seite 68: How To Control The Valve
U How To Control the Valve Chapter Five: Local Operation How To Control the Valve The 651 unit can drive the throttle valve to full open or full close, or halt it at its current position. How To Open the Valve To drive the valve to full open, press the [O ] key.
Seite 69: How To Activate The Learn Function
Chapter Five: Local Operation U How To Activate the Learn Function How To Activate the Learn Function The learn function, activated by pressing the [L ] key, enables the 651 unit to identify EARN important system characteristics for Self-Tuning control. Use the learn function whenever the 651 controller is used in a new vacuum system or when processing conditions are changed (such as changed flow rate, new or refurbished pump, or piping modifications).
Seite 70: How To Zero A Sensor
U How To Zero a Sensor Chapter Five: Local Operation How To Zero a Sensor Zeroing a sensor is performed to correct sensor zero offsets. 1. Turn the gas flow off. 2. Fully open the control valve. 3. Wait until the system is pumped down to base pressure. In order to achieve a proper zero, the pressure of the system must be lower than the resolution of the Baratron used to measure system pressure.
Seite 71: How To Set A Process Limit Relay
Chapter Five: Local Operation U How To Set a Process Limit Relay How To Set a Process Limit Relay There are two process limit (PLO) relays in the 651 controller. Each relay has two trip limits: a high trip limit, and a low trip limit. Refer to Table 10, page 36, for the I/O connector pinout to determine which pins are for relay 1, and which are for relay 2.
Seite 72: How To View And Adjust The Analog Set Point
U How To View and Adjust the Analog Set Point Chapter Five: Local Operation How To View and Adjust the Analog Set Point The 651 controller is capable of accepting one analog set point through the I/O connector on the rear panel.
Seite 73: How To Calibrate Full Scale Span For The Analog Set Point
Chapter Five: Local Operation U How To Set Lead and Gain Parameters How To Calibrate Full Scale Span for the Analog Set Point The 651 units are calibrated at the factory for 10 Volt full scale input; if the actual input applied is 10 Volts, the analog set point display shows a value of 100%.
Seite 74: How To Set Lead And Gain Parameters
U How To Set Lead and Gain Parameters Chapter Five: Local Operation How To Set Lead and Gain Parameters When the 651 unit is configured for PID control, separate lead and gain parameters are maintained for each pressure set point. Set point A is associated with Lead A and Gain A. Set point B is associated with Lead B and Gain B, and so forth.
Seite 75: How To Calibrate Span Of The A/D Converter
Chapter Five: Local Operation U How To Calibrate Span of the A/D Converter How To Calibrate Span of the A/D Converter The controller’s A/D (analog-to-digital) converter converts the analog input to a digital value that the controller uses. The span of the A/D converter is calibrated at the factory before you receive your controller.
Seite 76 U How To Calibrate Span of the A/D Converter Chapter Five: Local Operation This page intentionally left blank.
Seite 77: Chapter Six: Remote Operation
Chapter Six: Remote Operation UOverview Chapter Six: Remote Operation Overview Remote operation of the 651 Pressure Controller is accomplished via the rear panel either by RS- 232 communication by means of a computer connected to the Serial Interface connector or through analog or digital logic levels at the I/O connector.
Seite 78 URS-232 Commands and Requests Chapter Six: Remote Operation Commands Sent from the Computer to the 651 Controller Table 26, page 132, lists the syntax for RS-232 commands. Commands are not case sensitive. If a command requires user-supplied parameters, it is not necessary to type a space between the command and the parameters.
Seite 79: Priority Of Command Execution
Chapter Six: Remote Operation UHow To Change Valve Selection and Calibration Responses Sent from the 651 Controller to the Computer Responses sent from the 651 controller to your computer are shown in the last column of Table 27, page 138. The format of responses sent by the 651 controller to the computer will appears in the table as: response value where response is a label that allows you to identify the response and value is the...
Seite 80 U How To Determine and Change the Control Chapter Six: Remote Operation Caution This procedure involves cycling the valve from the open to the close position. Be certain that the system can withstand valve cycling before proceeding. This test can be performed prior to installing the 651 controller and the valve in the system.
Seite 81: How To Determine And Change The Control Mode
Chapter Six: Remote Operation U How To Determine and Change the Control How To Determine and Change the Control Mode The 651 controller is initially configured for PID control. Follow the steps below to change the control mode setting. 1. To determine which control mode is currently selected, issue the request: ENTER The 651 controller will return the following response: V value...
Seite 82: How To Configure The Sensor Parameters
U How To Configure the Sensor Parameters Chapter Six: Remote Operation How To Configure the Sensor Parameters The 651 controller is initially configured to use 100 Torr as the sensor full scale range, and 0 to 10 Volts for the sensor input signal. Follow the steps below to change these parameters. Note Be sure that the sensor is connected to the 651 controller before changing the sensor parameters.
Seite 83: How To Change The Sensor Range
Chapter Six: Remote Operation U How To Request the Pressure Reading How To Change the Sensor Range The 651 controller is initially configured to work with a 100 Torr pressure sensor. If your sensor covers a different range, issue the command: E value ENTER where value is a valid sensor range.
Seite 84: How To Request The Pressure Reading
U How To Request the Pressure Reading Chapter Six: Remote Operation How To Request the Pressure Reading To request the system pressure, issue the request: ENTER The 651 controller responds with the message: P value where value is % of Full Scale. For example, if the pressure is 10 Torr for a 10 Torr F.S.
Seite 85: How To Zero A Sensor
Chapter Six: Remote Operation U How To Zero a Sensor How To Zero a Sensor Zeroing a sensor allows you to correct any zero offsets. 1. Turn the gas flow off. 2. Fully open the control valve. 3. Wait until the system is pumped down to base pressure. In order to achieve a proper zero, the pressure of the system must be lower than the resolution of the Baratron used to measure system pressure.
Seite 86: How To Activate The Learn Function
U How To Activate the Learn Function Chapter Six: Remote Operation How To Activate the Learn Function The learn function enables the 651 unit to identify important system characteristics for Self-Tuning control. Use the learn function whenever you install a new vacuum system or change any processing conditions (such as changed flow rate, new or refurbished pump, or piping changes).
Seite 87: How To Stop The Learn Function
Chapter Six: Remote Operation U How To Determine the Active Set Point How To Stop the Learn Function It is recommended that the learn function go through to completion. However, if your process is slow to reach its highest pressures and your process will not be operating at those pressures, it is possible to stop the learn function early.
Seite 88: How To Determine The Active Set Point
U How To Determine the Active Set Point Chapter Six: Remote Operation How To Determine the Active Set Point To determine the set point currently selected as active: • Issue the following request to determine the active set point: ENTER The 651 controller responds with the following message: MXYZ where X = indicates the active set point:...
Seite 89: How To Select The Active Set Point
Chapter Six: Remote Operation U How To Select the Active Set Point How To Select the Active Set Point The 651 instrument provides five user-definable set points (set point A through set point E) and one external analog set point, received through the I/O connector. The 651 controller uses the “active”...
Seite 90: How To Select Pressure Or Position Control
U How To Select Pressure or Position Control Chapter Six: Remote Operation How To Select Pressure or Position Control The 651 controller is initially configured to use pressure control for the internal set points, A through E, and the analog set point. 1.
Seite 91: How To Change The Set Point Value
Chapter Six: Remote Operation U How To Change the Set Point Value How To Change the Set Point Value Follow these instructions to change the value of one of the internal set points, A through E. Refer to How To Adjust the Analog Set Point Value, page 78, for information on changing the analog set point value.
Seite 92: How To Adjust The Analog Set Point Value
U How To Adjust the Analog Set Point Value Chapter Six: Remote Operation How To Adjust the Analog Set Point Value The 651 controller is capable of accepting one analog set point through the I/O connector on the rear panel. The analog set point value is expressed as a % of full scale, using the following formula: analog set point = (analog set point voltage / full scale voltage) For example, if the 651 unit is configured for 5 Volt full scale input, and the actual input applied...
Seite 93: How To Zero The Analog Set Point
Chapter Six: Remote Operation U How To Adjust the Analog Set Point Value How To Zero the Analog Set Point Zeroing the analog set point allows you to correct any zero offsets. The Z4 command instructs the controller to take the current value of the external analog set point for its zero value.
Seite 94: How To Set The Full Scale Level Of The Analog Set Point
U How To Calibrate Span of the A/D Converter Chapter Six: Remote Operation How To Set the Full Scale Level of the Analog Set Point 1. Issue the following command to set the value of the analog set point: S6 value ENTER where value = 0 for 100% of the controlling transducer’s range;...
Seite 95: How To Calibrate Span Of The A/D Converter
In that case, perform the procedure to calibrate the span of the A/D converter again. If the error persists, it indicates a hardware failure of the EEPROM. Contact any MKS Service Center, listed on the inside back cover of this manual, for assistance.
Seite 96: How To Respond To A Checksum Error
Perform the steps described in How To Calibrate Span of the A/D Converter, page 81. If the checksum error persists after you perform a full calibration, the error indicates a hardware failure of the EEPROM. Contact any MKS Service Center, listed on the inside back cover of this manual, for assistance.
Seite 97: How To Set The Lead And Gain Parameters
Chapter Six: Remote Operation U How To Set the Lead and Gain Parameters How To Set the Lead and Gain Parameters When the 651 unit is configured for PID control, separate lead and gain parameters are maintained for each pressure set point. Set point A is associated with Lead A and Gain A. Set point B is associated with Lead B and Gain B, and so forth.
Seite 98 U How To Set The Softstart Control Rate Chapter Six: Remote Operation 4. Issue the following command to enter a new gain parameter: Mx value ENTER where x = 1 is the gain parameter for set point A 2 is the gain parameter for set point B 3 is the gain parameter for set point C 4 is the gain parameter for set point D 5 is the gain parameter for set point E...
Seite 99: How To Set The Softstart Control Rate
Chapter Six: Remote Operation U How To Set The Softstart Control Rate How To Set The Softstart Control Rate Each set point, A through E, can be assigned a different softstart rate. In addition, you can assign a softstart rate for the valve open and valve close commands. If it is not necessary to utilize softstart control in your process, leave the softstart rate at 100% (of F.S.).
Seite 100: How To Check The Softstart Rate
U How To Configure the Valve Parameters Chapter Six: Remote Operation How To Check the Softstart Rate Issue the RS-232 request: ENTER where xx = 15 for set point A 16 for set point B 17 for set point C 18 for set point D for set point E for the analog set point...
Seite 101: How To Configure The Valve Parameters
Chapter Six: Remote Operation U How To Configure the Valve Parameters How To Configure the Valve Parameters order for the 651 cont roller to wor properly with your valve, you need to check several valve arameters. All of the p arame ters are set to an initial value, so it may be unnecessary for you to change any e...
Seite 102: How To Change The Valve Position Output
U How To Control the Valve Chapter Six: Remote Operation How To Change the Valve Position Output The valve position output can be configured for 5 Volts or 10 Volts full scale. The 651 controller is initially configured for 10 Volts. To change the valve position output, follow the steps below. 1.
Seite 103: How To Control The Valve
Chapter Six: Remote Operation U How To Control the Valve How To Control the Valve You can command the 651 unit to drive the throttle valve to full open or full close, or hold the valve at its current position. Note The RS-232 com ands to open, close, or hold the valve, override the active set point control of the valve.
Seite 104: How To Set A Process Limit Relay
U How To Set a Process Limit Relay Chapter Six: Remote Operation How To Set a Process Limit Relay There are two process limit relays (also known as trip point relays) in the 651 controller. Each relay has two trip limits: a hi gh trip limit, and a low trip limit.
Seite 105: How To Check The System Status
Chapter Six: Remote Operation U How To Check the System Status How To Check the System Status You can issue a “system status” request to determine the state of the 651 controller. The reques ENTER The 651 controller sends the response: MXYZ where X = 1 for remote control...
Seite 106: Digital Logic Control
U Digital Logic Control Chapter Six: Remote Operation Digital Logic Control Digital and analog control of the 651 unit is accomplished via the I/O connector located on the rear panel. Refer to Table 10, page 36, for the pinout of the I/O connector. Note Any RS-232 command takes priority over digital logic commands.
Seite 107: Figure 7: I/O Board Digital Output Circuitry
Chapter Six: Remote Operation U Digital Logic Control The I/O board contains 6 type 74 HC digital outputs, each having the capacity to drive one standard TTL load. The approxi mate time constant of the outputs are 2.5 microseconds. Each output includes a 240 ohms series resistor to protect it against line surges and spikes.
Seite 108: Digital Input Priorities
U Digital Logic Control Chapter Six: Remote Operation Digital Input Priorities Digital inputs are scanned and selected in a prioritized manner, enabling a higher priority reques to override a lower one. The order of priority is shown in Table 16. Priority of Digital Inputs Order of Priority I/O Pin No.
Seite 109: Digital Functions
Chapter Six: Remote Operation U Digital Logic Control Digital Functions Most digital input functions are activated by pulling the input to a TTL low level (0 to 0.8 Volts) for a minimum of 50 milliseconds. If a higher priority function has not already been selected, the requested function will be activated.
Seite 110 U Digital Logic Control Chapter Six: Remote Operation Digital Input Functions (Continued) Digital I/O Pin No. State Digital Input Function Input No. Selects set point A High No function Selects set point B High No function Selects set point C High No function Selects set point D...
Seite 111: Analog Set Point Inputs
Chapter Six: Remote Operation U Digital Logic Control Digital Output Functions Digital Output I/O Pin No. State Digital Output Function Pressure outside of PLO 1 band (relay is not energized) High Pressure inside of PLO 1 band (relay is energized) Pressure outside of PLO 2 band (relay is not energized) High...
Seite 112 U Digital Logic Control Chapter Six: Remote Operation This page intentionally left blank.
Seite 113: Chapter Seven: Battery-Backed Memory Module
651 pressure controller has a battery-backed memory module which stores configuration and arned system information while power is off. The battery-backed memory module (MKS part o. 037-9227) is specified to provide at least seven years of memory storage under all operating onditions.
Seite 114: Removing The Cpu Board And Memory Module
UReplacing the Battery-Backed Memory Module Chapter Seven: Battery-Backed Memory Module Removing the CPU Board and Memory Module 1. Locate the CPU board. It is labeled on the rear panel as the Serial Interface connector (in slot 1). 2. Remove the screw to the left of the connector. 3.
Seite 115: Installing A New Memory Module And Replacing The Cpu Board
Chapter Seven: Battery-Backed Memory Module UReplacing the Battery-Backed Memory Module Instal ling a New Memory Module and Replacing the CPU Board 1. Position the new memory module over the socket, being careful to line up the pins correctly (pin 1 is located directly to the left of the notch). Snap the module firmly into place.
Seite 116 UReplacing the Battery-Backed Memory Module Chapter Seven: Battery-Backed Memory Module This page intentionally left blank...
Seite 117: Chapter Eight: Valve Failsafe Battery Back-Up Option
Note If a Valve Failsafe battery backup is ordered for a 651A or 651B unit, the unit must be sent back to your local MKS Service Center to have the battery backup system installed. Before returning the instrument to MKS, obtain an ERA Number (Equipment Return Authorization Number) from an MKS Service Center.
Seite 118: Battery Voltage
U Battery Voltage Chapter Eight: Valve Failsafe Battery Back-up Option Battery Voltage he normal voltage level of the battery ranges from 11 V to 15.5 V. A voltage level below 11 V indicates a discharged battery . A voltage level above 15.5 V indicates an open fuse, a isconnected battery, or a defective charger.
Seite 119: Startup
Pressure an Position screen: 651C V 1.8 Figure 9: Initial Display Screen PRES 4.90 Torr 35.0 % Figure 10: Default Pressure and Position Screen...
Seite 120: Battery Voltage Out-Of-Range
U Operation Chapter Eight: Valve Failsafe Battery Back-up Option Battery Voltage Out-of-Range If the battery voltage is out-of-range, the instrument revision and the current software/firmware version appears on the front panel display for about five seconds (refer to Figure 9, page 105), followed by the appropriate error message, rather than advancing to the default Pressur e and Position display screen (refer to Figure 10, pa...
Seite 121: Operation
If the battery back-up module has not been recognized, the screen reverts to the initial display screen w hich lists the instrument revision and the current s oftware/firmware version: 651C V 1.8 Press any key to return to the default Pressure and Position screen.
Seite 122: How To Set The Battery Back-Up Valve Control
U Operation Chapter Eight: Valve Failsafe Battery Back-up Option How To Set The Battery Back-up Valve Control Local Operation 1. Ensure the Key Lock Switch is set to Local and that the default Pressure and Position display appears on the screen. PRES 4.90 To 35.0 % 2.
Seite 123 Chapter Eight: Valve Failsafe Battery Back-up Option U Expected Battery Life Remote RS-232 Operation The command [K value] defines the direction of valve control upon power failure, where: value: 0 disable option open valve at power failure close valve at power failure To check the type of valve battery back-up control, issue the reque R 40 The controller responds with the me...
Seite 124: Expected Battery Life
U Expected Battery Life Chapter Eight: Valve Failsafe Battery Back-up Option Expected Battery Life When AC power is lost, the valve battery backup drives the valve to full open or full closed within 20 seconds. An AC power failure ty pically results in a 30% discharge of the battery.
Seite 125 Chapter Eight: Valve Failsafe Battery Back-up Option U Battery Replacement...
Seite 126: Battery Replacement
U Battery Replacement Chapter Eight: Valve Failsafe Battery Back-up Option Battery Replacement Opening the Unit Warning The 651 unit has lethal voltages inside. Servicing of the unit must be performed by qualified personnel only. To avoid an electrical shock, disconnect the power line before opening the unit.
Seite 127: Installing The New Battery
Chapter Eight: Valve Failsafe Battery Back-up Option U Battery Replacement Installing the New Battery 1. Disconnect the two insulated clips from the battery terminals. Caution Do not allow anything to short across the battery terminals; for example, a screwdriver. 2. Push the battery straight up (from underneath) and out. 3.
Seite 128: Chapter Nine: Maintenance
Return Authoriz ation Number) from a MKS Service Center before shipping. Please refer to the inside back cover of this manual for a list of MKS Calibration and Service Centers. Peri odi ally, check for wear on the cable s and inspect the enclosure for visible signs of damage.
Seite 129: Figure 13: Fuse Holder
Chapter Nine: Maintenance UHow To Replace Fuses Fuse Holder Clip Figure 13: Fuse Holder 4. Gently press against the clip and push up with the screwdriver until the plastic fuse holder pops out. It may be necessary to repeat steps 2 and 3 on the left side to release t he fuse holder.
Seite 131: Appendix A: Product Specifications
An overall metal braided shielded cable, properly grounded at both ends, is required during use. Interconnecting cables between the Type 651 and the valve, sensor, and serial communications are available at an additional charge. Please consult factory for ordering information. Necessary adapter cables are included when retrofitting MKS Type 152, 252, and 652 controllers.
Seite 132 Appendix A: Product Specifications Input power Low power unit 90 to 132 or 180 to 264 VAC @50/60 Hz 75 VA (max) High power unit 90 to 132 or 180 to 264 VAC @48/62 Hz 150 VA (max) Interface RS-232 Analog Digital Inputs (16): HCMOS pulled high with a 4.7k...
Seite 133: Appendix B: Model Code Explanation
Type Number Display Interface Valve Driver Power S upply Options Type Number (651C) This designates the mode l number of the instrum ent. Display The display on your 651 unit is designated by a s ingle letter code. Ordering Co...
Seite 134 UModel Code Appendix B: Model Code Explanation Interface (Y) The t ype of interface is indicated by a single dig it code. Ordering Code RS-232 Valve Dr iver (Z) The valve driver is designated by a single letter code. Ordering Code Stepper Motor Power Supply (C) Two power supplies are available, designated by...
Seite 135: Appendix C: Product Compatibility
UProduct Compatibility Appendix C: Product Compatibility Product Compatibility Valves MKS downstream control valves compatible with the 651 unit include: Types 253 and 653 Transducers Table 21 lists the current available to a transducer from a 651 controller (and its specific valve configuration).
Seite 136: Adapter Cables
UProduct Compatibility Appendix C: Product Compatibility Adapter Cables The 651 Pressure Controller can replace the 152, 252, an d 652 controllers. It may, however, be ecessary to fit the Type “D” connectors on the 651 unit with adapter cables. Refer to Table 22 r a listing of the appropriate cable numbers.
Seite 137: Appendix D: Type 651 Displayless Unit
Appendix D: Type 651 Displayless Unit UType 651 Displayless Unit Appendix D: Type 651 Displayless Unit Type 651 Displayless U The displayless unit is a standard 651 unit with the following differences: • There is no front panel display • An additional RS -232 serial port, located on the front panel, is intended to be used in conjunction with a laptop or notebook com...
Seite 138: Rs-232 Configuration
U RS-232 Configuration Appendix D: Type 651 Displayless Unit RS-232 Configuration Since the displayless 651 controller cannot use the Setup menu to change the controller’s RS-23 configuration, changes can be made by means of internal dipswitch settings. Note If a 651 controller has a front panel display, use the Setup m nu to change the RS-232 configuration, described in Setup Menu, page 43.
Seite 139: Figure 15: Dipswitch Bank Location (Top View)
Appendix D: Type 651 Displayless Unit U RS-232 Configuration Dipswitch Bank on I/O Board Figure 15: Dipswitch Bank Location (Top View) he dipswitch bank is located on the I/O board, shown in Figure 15. You can also identify the I/O board by locating the I/O connector on the rear panel (refer to Figure 4, page 33). Figure 16, shows an enlarged view of a dipswitch bank.
Seite 140: Dipswitch Bank Settings
U RS-232 Configuration Appendix D: Type 651 Displayless Unit Dipswitch Bank Settings The dipswitch settings control the RS-232 communications parameters. When you receive your 651 controller, the unit is set up with the initial dipswitch settings listed in Table 23. Default Dipswitch Settings Dipswitch Setting...
Seite 141: Table 24: I/O Board Dipswitch Bank And Rs-232 Communications Settings
Appendix D: Type 651 Displayless Unit U RS-232 Configuration Caution Before opening the unit to change dipswitch settings, you must power off the unit as a safety precaution. Refer to Opening/Closing the Type 651 Controller, page 124. Any new dipswitch settings take effect when the unit is powered up.
Seite 142 U RS-232 Configuration Appendix D: Type 651 Displayless Unit This page intentionally left blank.
Seite 143: Appendix E: Initial Settings
Appendix E: Initial Settings U RS-232 Configuration Appendix E: Initial Settings Your 651 controller is shipped with the following in itial configuration. This configuration is not default configuration, however, since the 651 unit stores most of the configuration settings in on-volatile RAM.
Seite 144: Table 25: Initial Settings
U RS-232 Configuration Appendix E: Initial Settings Initial Settings (Continued) Parameter Default Options Page mTorr, mbar, µbar, Pa, kPa, Display Units Torr cmH 2 O, inH 2 O Analog Set point Input 0 to 5 V 0 to 10 V Pressure Sensor Input 0 to 10 V 0 to 5 V, 0 to 1 V...
Seite 145: Appendix F: Command And Request Reference
Appendix F: Command and Request Reference UCommand Reference Appendix F: Command and Request Reference Command Reference A command sent to the 651 unit instructs it to perform a task or change a setting. Commands are grouped into two categories: control commands and parameter commands. Control commands directly control the actions of the valve.
Seite 146 UCommand Reference Appendix F: Command and Request Reference RS-232 Command Summary Command Function Set level of s et point A; where value is the % of S1 value pressure for pressure set points; position for position set points % of open for direct direction control f closed for rev erse direction cont S2 value...
Seite 147 Appendix F: Command and Request Reference UCommand Reference RS-232 Command Summary (Continued) Command Function Select set point C Select set point D Select set point E Select analog set point E value Sensor range value 0 = 0.1 10 = 1000 1 = 0.2 11 = 5000 2 = 0.5...
Seite 148 UCommand Reference Appendix F: Command and Request Reference RS-23 2 Command Summary (Contin ued) Command Function I1 value Set softstart rate of set point A, value is % of full speed I2 value Set softstart rate of set point B, value is % of full speed I3 value Set softstart rate of set point C, value is % of full speed...
Seite 149 Appendix F: Command and Request Reference UCommand Reference RS-232 Command Summary (Continued) Command Function Y1 value Calibrate span of A /D converter; calibrate position output and zeroed pressure output. The controller will assign value to the conver ter reading of the pressure channel. Learn the full scale of the analog set point.
Seite 150: Table 26: Rs-232 Command Summary
UCommand Reference Appendix F: Command and Request Reference RS-232 Command Summary (Continued) Command Function Set point E type where value is: T5 value 0 = position 1 = pressure Set point analog type where value is: T6 value 0 = position 1 = pressure Valve position output range where value is: B value...
Seite 151 Appendix F: Command and Request Reference U Request and Response Reference RS-232 Command Summary (Continued) Command Function Disable battery backup Select valve to open upon power fail Select valve to close upon power fail Table 26: RS-232 Command Summary...
Seite 152: Request And Response Reference
U Request and Response Reference Appendix F: Command and Request Reference Request and Response Reference A request to the 651 controller causes it to send back information. Refer to Table 27 for a mplete list of request messages. Note To conserve space, the ENTER key is not included in the request messages listed...
Seite 153 Appendix F: Command and Request Reference U Request and Response Reference RS-232 Request and Response Summary (Continue Request M essage Info rmation Requested Response Message Alternate system s tatus MXYZ (for compatibility For the value of X: 0 = analog set point 1 = set point A 2 = set point B 3 = set po...
Seite 154 U Request and Response Reference Appendix F: Command and Request Reference RS-232 Request and Response Summary (Continued) Request Message Information Requested Response Message I4 value Softstart rate for set point D where value is % of full speed I5 value Softstart rate for set point E where value is % of full speed I6 value...
Seite 155 Appendix F: Command and Request Reference U Request and Response Reference RS-232 Request and Response Summary (Continued) Request Message Information Requested Response Message Set point D type (either pe, where type equals: T4 ty pressure or position) 0 = position pressure Set point E type (either type, where ty...
Seite 156: Table 27: Rs-232 Request And Response Summary
U Request and Response Reference Appendix F: Command and Request Reference RS-232 Request and Response Summary (Continued) Request Message formation Requested Response Mes sage Sensor voltage range G value, where value equals: 0 = 1 Volt 1 = 5 Volts 2 = 10 Volts Sensor type U value, where value equals:...
Seite 157 Appendix F: Command and Request Reference U Request and Response Reference RS-232 Request and Response Summary (Continued) Request Message Information Requested Response Message Valve response to power fail K0 = Option is disabled (or not (when using the optio nal valve installed) failsafe backup) K1 = Valve o...
Seite 158 U Request and Response Reference Appendix F: Command and Request Reference This page intentionally left blank.
Seite 159: Index
Index Index Fuse, 24–26 Analog set point, 30, 45, 55–57, 58, 76–78, Gain parameter, 58, 81 Analog set po int inpu ts, 95 Initia l settings, 125 Battery backup, 30 Instal lation Category, Battery -back ed memo ry module, 97 –99 Intern al switches, 120...
Seite 160 Index Settings, initial, 125 Setup menu, 65–80 ID control mode, 29, 41, 65 Softstart control, 30, 41 ID control parameters, 58, 81 Softstart rates, 47 ollution Degree, 22 Specifications, 113–16 osition set points, 74 ressure set points, 74 ressure units, displaying, 43, 44 Temperature, 22 rocess limit relays, 55, 88 Trip point relay, 88...

MKS 651C Bedienungsanleitung

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