MKS Baratron 627B Betriebsanleitung
Druckmeßumformer
Verwandte Anleitungen für MKS Baratron 627B
Inhaltszusammenfassung für MKS Baratron 627B
- Seite 1 122430-P1 Rev B, 8/99 Instruction Manual ® MKS Baratron Type 627B Absolute Pressure Transducer Six Shattuck Road Fax: (978) 975-0093 Andover, MA 01810-2449 E-mail: mks@mksinst.com (800) 227-8766 or (978) 975-2350 Web site: http://www.mksinst.com...
- Seite 2 WARRANTY CONCERNING DATE-RELATED OPERATIONS. For the period commencing with the date of shipment of this equipment and ending two years later, MKS will, at its option, either repair or replace any part which is defective in materials or workmanship or with respect to the date-related operations warranty without charge to the purchaser.
- Seite 3 122430-P1 Rev B, 8/99 ® MKS Baratron Type 627B Absolute Pressure Transducer...
- Seite 4 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.
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Seite 5: Inhaltsverzeichnis
Table of Contents Table of Contents Pressure Transducer Safety Information.................. 1 Symbols Used in This Instruction Manual..............1 Symbols Found on the Unit ..................2 Safety Procedures and Precautions ................3 Sicherheitshinweise für den Druckmeßumformer..............5 In dieser Betriebsanleitung vorkommende Symbole ........... 5 Erklärung der am Gerät angebrachten Symbole ............ - Seite 6 Table of Contents Setup..........................23 Dimensions....................23 Fittings ......................24 Mounting Instructions..................24 Electrical Information....................25 Grounding .....................25 Interface Connector..................26 Start Up........................28 Warm Up Time....................28 Chapter Three: Overview .......................29 General Information ....................29 Sensor ........................29 Signal Conditioner/Electronics ...................29 Instrument Components....................30 Coarse Zero Switch..................30 Optional Heater Status LEDs and Semiconductor Switches......30 Zero Potentiometer ..................30 Interface Connector..................30 Labels ........................31...
- Seite 7 Table of Contents Appendix A: Product Specifications ..................39 Electrical Specifications..................... 39 Environmental Specifications..................39 Performance Specifications ..................39 Physical Specifications ....................40 Optional Semiconductor Switch Specifications ............40 Appendix B: Model Code Explanation .................. 41 Model Code....................... 41 Index............................43...
- Seite 8 Table of Contents...
- Seite 9 List of Figures and Tables List of Figures and Tables Figures Figure 1: Top View Dimensions.................... 23 Figure 2: Side View Dimensions ................... 23 Figure 3: Example Power, Signal, and Chassis Grounding Scheme ........25 Figure 4: Top View of the 627 Transducer ................30 Figure 5: Top Panel Label for Units without the Optional Heater Status LEDs ......
- Seite 10 List of Figures and Tables viii...
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Seite 11: Pressure Transducer Safety Information
Pressure Transducer Safety Information Symbols Used in This Instruction Manual Pressure Transducer Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel. -
Seite 12: Symbols Found On The Unit
Symbols Found on the Unit Pressure Transducer Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Off (Supply) Earth (ground) On (Supply) IEC 417, No.5019 IEC 417, No.5017... -
Seite 13: Safety Procedures And Precautions
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained. - Seite 14 Safety Procedures and Precautions Pressure Transducer Safety Information CHECK FOR LEAK-TIGHT FITTINGS Carefully check all vacuum component connections to ensure leak-tight installation. OPERATE AT SAFE INLET PRESSURES Never operate at pressures higher than the rated maximum pressure (refer to the product specifications for the maximum allowable pressure).
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Seite 15: Sicherheitshinweise Für Den Druckmeßumformer
Sicherheitshinweise für den Druckmeßumformer In dieser Betriebsanleitung vorkommende Symbole Sicherheitshinweise für den Druckmeßumformer In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. -
Seite 16: Erklärung Der Am Gerät Angebrachten Symbole
Erklärung der am Gerät angebrachten Symbole Sicherheitshinweise für den Druckmeßumformer Erklärung der am Gerät angebrachten Symbole Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können. Bedeutung der am Gerät angebrachten Symbole Ein (Energie) Aus (Energie) Erdanschluß... -
Seite 17: Sicherheitsvorschriften Und Vorsichtsmaßnahmen
Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor. Schicken Sie das Gerät zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daß alle Schutzvorrichtungen voll funktionsfähig bleiben. - Seite 18 Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitshinweise für den Druckmeßumformer Anweisungen zum Installieren der Armaturen! Alle Anschlußstücke und Armaturenteile müssen mit der Gerätespezifikation übereinstimmen, und mit dem geplanten Einsatz des Gerätes kompatibel sein. Der Einbau, insbesondere das Anziehen und Abdichten, muß gemäß den Anweisungen des Herstellers vorgenommen werden. Verbindungen auf Undichtigkeiten prüfen! Überprüfen Sie sorgfältig alle Verbindungen der Vakuumkomponenten auf undichte Stellen.
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Seite 19: Informations Relatives À La Sécurité Pour Le Transducteur De Pression
Informations relatives à la sécurité pour le Symboles utilisés dans ce manuel d'utilisation transducteur de pression Informations relatives à la sécurité pour le transducteur de pression Symboles utilisés dans ce manuel d'utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel. -
Seite 20: Symboles Apparaissant Sur L'unité
Symboles apparaissant sur l'unité Informations relatives à la sécurité pour le transducteur de pression Symboles apparaissant sur l'unité Le tableau suivant décrit les symboles pouvant apparaître sur l'unité. Définition des symboles apparaissant sur l'unité Marche Terre de protection (sous tension) Arrêt (hors tension) Terre (masse) (masse) -
Seite 21: Mesures De Sécurité Et Précautions
Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur l'appareil. Renvoyer l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité. - Seite 22 Mesures de sécurité et précautions Informations relatives à la sécurité pour le transducteur de pression VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS Vérifier attentivement toutes les connexions des composants pour le vide afin de garantir l'étanchéité de l'installation. EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES Ne jamais utiliser des pressions supérieures à...
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Seite 23: Medidas De Seguridad Del Transductor De Presión
Medidas de seguridad del transductor de presión Símbolos usados en este manual de instrucciones Medidas de seguridad del transductor de presión Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales. -
Seite 24: Símbolos Hallados En La Unidad
Símbolos hallados en la unidad Medidas de seguridad del transductor de presión Símbolos hallados en la unidad La tabla siguiente contiene los símbolos que puede hallar en la unidad. Definición de los símbolos hallados en la unidad Encendido Apagado (alimentación eléctrica) (alimentación eléctrica) Puesta a tierra Protección a tierra... -
Seite 25: Procedimientos Y Precauciones De Seguridad
No instale piezas que no sean originales ni modifique el instrumento sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe el instrumento al Centro de servicio y calibración de MKS toda vez que sea necesario repararlo o efectuar tareas de mantenimiento. - Seite 26 Procedimientos y precauciones de seguridad Medidas de seguridad del transductor de presión USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS PROCEDIMIENTOS DE AJUSTE Todos los accesorios del instrumento deben cumplir las especificaciones del mismo y ser compatibles con el uso que se debe dar al instrumento. Arme y ajuste los accesorios de acuerdo con las instrucciones del fabricante.
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Seite 27: Chapter One: General Information
® The MKS Baratron Type 627B Absolute Pressure Transducer is part of the MKS family of general purpose pressure transducers designed to provide accurate, reliable, and repeatable pressure measurements in the range from 1K Torr to as low as 0.02 Torr Full Scale (FS). The instrument operates with ±15 VDC (±5%) input at ≤... -
Seite 28: How This Manual Is Organized
Calibration and Service Center before shipping. The ERA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials. -
Seite 29: Chapter Two: Installation
Chapter Two: Installation How To Unpack the Type 627 Unit MKS has carefully packed the Type 627 unit so that it will reach you in perfect operating order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that damage has not occurred during shipment. -
Seite 30: Interface Cables
627 unit to a 651 controller, use part number CB259-5-10; for a metal braided shielded cable use part number CB259S-5-10. You can purchase interface cables to all MKS companion products from MKS (refer to Table 5), or optionally you can make cables that meet the appropriate specifications. For cables connecting to non-MKS products, MKS can provide normal shielding or braided shielded cable assemblies in a nominal 10’... -
Seite 31: Generic Shielded Cable Guidelines
Chapter Two: Installation Interface Cables Generic Shielded Cable Guidelines Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective; using either may nullify regulatory compliance. 2. -
Seite 32: Product Location And Requirements
Product Location and Requirements Chapter Two: Installation Product Location and Requirements Ambient Operating Temperature The acceptable ambient operating temperature range for the 627 transducer is 15° to 40° C (59° to 104° F). The unit is temperature controlled at 45° C (113° F). Power Requirements The 627 transducer requires an external power source capable of supplying ±15 VDC (±5%) at ≤... -
Seite 33: Setup
Chapter Two: Installation Setup Setup Dimensions Note All dimensions are listed in inches with millimeters referenced in parentheses. The tolerances for the dimensions are ±0.1 inches (X.X) and ±0.01 inches (X.XX). 3.13 (79.5) Figure 1: Top View Dimensions (shown with the optional heater status LEDs) 3.87 1.38 0.21... -
Seite 34: Fittings
Setup Chapter Two: Installation Fittings The 627 transducer is available with the following fittings: • ½” diameter (12.7 mm) tubulation • ® ® Swagelok 8-VCR (female) • Mini-CF (rotatable) • NW-16-KF • NW-25-KF • ® Swagelok 8-VCO (female) Mounting Instructions Mount the transducer with the inlet port pointing (vertically) downward. -
Seite 35: Electrical Information
Chapter Two: Installation Electrical Information Electrical Information Grounding Note The ground of any external power supply and readout should be the same as the transducer ground (chassis ground) to minimize any possible ground loops which can affect the performance and stability of the system. -
Seite 36: Interface Connector
Thread Locks The 15-pin connector with thread locks utilizes threaded posts onto which the mating connector is mechanically fastened using screws. This is the standard MKS style Type “D” connector. Slide Locks The 15-pin connector with slide locks utilizes slotted posts onto which the mating connector is mechanically fastened using a slide mechanism which engages the slots in the posts. -
Seite 37: Table 6: Interface Connector Pinout
Chapter Two: Installation Electrical Information Interface Connector Pinout Pin Number Assignment At Temperature Status* or Reserved Pressure Signal Output No Connection At Temperature Status Return* or Reserved Power Return (Power Common) -15 VDC +15 VDC No Connection Heater Failure Status* or Reserved Heater Failure Status Return* or Reserved No Connection... -
Seite 38: Start Up
Start Up Chapter Two: Installation Start Up After installation, allow your transducer to warm up until it is stabilized, then check the transducer zero to verify the proper output. Refer to How To Adjust the Zero, page 33, for complete instructions on adjusting the zero controls on the 627 unit. Warm Up Time Allow sufficient time for your transducer to warm up. -
Seite 39: Chapter Three: Overview
An MKS or MKS-compatible power supply is required to complete the pressure to DC voltage conversion. For a direct readout of the pressure measurement, a meter (analog or digital) is required. -
Seite 40: Instrument Components
Instrument Components Chapter Three: Overview Instrument Components Zero Potentiometer Heater Failure Heater Temperature Status LED Status LED (optional) (optional) Interface Connector Coarse Zero Switch Figure 4: Top View of the 627 Transducer (shown with the optional heater status LEDs) Coarse Zero Switch This multi-position switch adjusts the transducer zero if the potentiometer fails to provide ZERO... -
Seite 41: Labels
Chapter Three: Overview Labels Labels Note The figures showing the instrument labels (Figures 5 through 7, and Figure 8, page 32) are not drawn to scale. Top Panel Labels The label on the top panel of the 627 unit identifies the potentiometer, and if ordered, the ZERO optional Heater Failure and Temperature Status LEDs. -
Seite 42: Serial Number Label
Labels Chapter Three: Overview Serial Number Label The serial number label, located on the seam of the band label, lists the unit’s serial number, model code, full scale range, input voltage, and output voltage. The label also displays the CE mark signifying compliance with the European CE regulations. -
Seite 43: Chapter Four: Operation
ZERO transducer (refer to How To Adjust the Zero Potentiometer, page 34) or at the front panel of any MKS Power Supply/Readout being used. If the potentiometer fails to provide sufficient ZERO adjustment, the... -
Seite 44: How To Adjust The Zero Potentiometer
How To Adjust the Zero Chapter Four: Operation How To Adjust the Zero Potentiometer To adjust the potentiometer: ZERO 1. Install the transducer in a system and connect a power supply/readout. 2. Power the transducer and allow it to warm up and stabilize. Allow 2 hours for ≥... -
Seite 45: How To Adjust The Coarse Zero Switch
Chapter Four: Operation How To Adjust the Zero How To Adjust the Coarse Zero Switch Note Use the switch only if the potentiometer fails to COARSE ZERO ZERO provide sufficient adjustment. To adjust the switch: COARSE ZERO 1. Install the transducer in a system and connect a power supply/readout. 2. -
Seite 46: Suggested Pressures For Reading And Control
How To Adjust the Zero Chapter Four: Operation Suggested Pressures for Reading and Control The lowest suggested pressures for reading and control with the 627 transducer are listed in Table Lowest Suggested Pressures for Reading and Control Full Scale Range Lowest Suggested Pressure Lowest Suggested Pressure (Torr) -
Seite 47: Chapter Five: Maintenance And Troubleshooting
ZERO the unit (refer to Figure 4, page 30), or at the front panel of any MKS or MKS-compatible power supply being used. Refer to How To Adjust the Zero, page 33, for complete instructions on how to adjust the transducer’s zero controls. -
Seite 48: Troubleshooting
(transducer to electronics Inspect cable and transducer. module). Replace if necessary. Measurement slowly goes Overpressure and/or a build- Return to MKS for servicing positive over time up of contamination in the or transducer replacement. measurement cavity. Unstable zero output The ambient temperature may Ensure the ambient be too high. -
Seite 49: Appendix A: Product Specifications
Appendix A: Product Specifications Electrical Specifications Appendix A: Product Specifications Electrical Specifications CE Compliance EMC Directive 89/336/EEC Electromagnetic Compatibility Product Safety Directive 92/59/EEC Product Safety Requirements Input Power Requirement Voltage ±15 VDC ±5% ≤ 250 mA Current Signal Output 0 to +10 VDC, 110% overrange, active zero Environmental Specifications Ambient Operating Temperature Range 15°... -
Seite 50: Physical Specifications
Physical Specifications Appendix A: Product Specifications Performance Specifications (Continued) Temperature Coefficients Zero ≥ 1 Torr units 0.002% FS/ °C 0.005% FS/ °C 0.1 Torr units 0.015% FS/ °C 0.05 Torr units 0.030% FS/ °C 0.02 Torr units 0.02% Reading/ °C Span (all ranges) <... -
Seite 51: Appendix B: Model Code Explanation
Appendix B: Model Code Explanation Model Code Appendix B: Model Code Explanation Model Code The options of your transducer are identified in the model code when you order the unit. The model code is identified as follows: 627B XXX Y Z B C where: 627B Type Number... - Seite 52 Model Code Appendix B: Model Code Explanation Fittings (Y) Six types of fittings are available, designated by a single letter code. Fittings Ordering Code ½” Diameter tubulation Swagelok 8-VCR (female) Mini-CF (rotatable) NW-16-KF NW-25-KF Swagelok 8-VCO female Accuracy (Z) Three specifications for accuracy are available, designated by a single letter code. Accuracy Ordering Code 0.12% of Reading (≥...
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Seite 53: Index
Index Index Accuracy, 39, 42 Maintenance, 37 Manual organization, 18 Model code, 41 Band label, 31 Mounting instructions, 24 Cables, 20–21 Optional equipment, 19 CE mark, 17, 20, 32 Options Coarse zero switch, description of, 30 heater status LEDs, 30, 42 Customer support, 18 Interface connector, 26, 42 Fittings, 24, 40, 42... - Seite 54 Index Slide locks, 26 Specifications, 39–40 Standard equipment, 19 Start up, 28 Temperature operating, 22, 39 storage, 39 Thread locks, 26 Top panel labels, 31 Troubleshooting, 38 Warm up time, 28, 40 Zero adjustment, 37 coarse zero switch, 35 zero pot, 34 Zero pot, description of, 30...