Sony LH71A Bedienungsanleitung Seite 116

5. Settings
Measurement of machine precision
To perform the segmented error compensation, measurement is made to find the amount of error and where
it occurs on the machine. Be sure to measure the error amount with the reference point position of the
measuring unit at 0.
Number of points that can be input : 32
Compensation amount
Compensation
amount
Measuring unit reference point position =
Laser interferometer measurement zero point
[Notes on precision measurement]
The precision can be measured based on the measuring unit standard or laser standard. The measuring unit
standard is more accurate, and so measurement of the measuring unit standard is recommended.
Measuring unit standard : If the counter unit shows 100.000 mm when the display on the standard measuring
Laser standard
<Measurement example: Measuring unit standard>
Input point
Values shown on
counter unit
Laser display value
Compensation amount
5-16
(E)
: up to ±600 um
(can be entered in measuring unit input resolution units)
unit (laser) shows 100.005, the compensation amount is +0.005 mm.
: If the display on the standard measuring unit (laser) shows 100.000 mm when
the counter unit shows 100.010, the compensation amount is _0.010 mm.
1 2
_200.000 _100.000
_200.005 _99.995
_0.005 0.005
+
Input point Error
Error
Laser interferometer
measurement
Counter display
value
ex :
Therefore, you would input an error
of 0.045.
3 4
100.000 200.000
100.010 200.005
0.010 0.005
+ +
ε ε
−
: x =
M
ε
:
M
ε
: c
ε
x = 156.000 – 155.955
= 0.045 mm
(Unit: mm)
5 ....................... 32
300.000
300.010
0.010
+
ε
c
LH71A / LH72